Tang; Zaifeng
Patent Applications and Registrations
Patent applications and USPTO patent grants for Tang; Zaifeng.The latest application filed is for "method for manufacturing shallow trench isolation".
- Tang; Zaifeng - Shanghai CN
| Patent | Date |
|---|---|
| Method for Manufacturing Shallow Trench Isolation App 20220277986 - Xu; Jin ; et al. | 2022-09-01 |
| Vacuum Pumping Valve For Semiconductor Equipment And Vacuum Control System Thereof App 20220165576 - Ren; Yu ; et al. | 2022-05-26 |
| Wafer Transfer Module and Method Thereof for Transferring To-Be-Transferred Wafer App 20220139749 - Ren; Yu ; et al. | 2022-05-05 |
| Method of etching a shallow trench Grant 9,842,743 - Xu , et al. December 12, 2 | 2017-12-12 |
| Method for etching polysilicon gate Grant 8,900,887 - Tang , et al. December 2, 2 | 2014-12-02 |
| Method For Etching Polysilicon Gate App 20140106475 - TANG; Zaifeng ; et al. | 2014-04-17 |
| Method for reducing morphological difference between N-doped and undoped polysilicon gates after etching Grant 8,658,502 - Tang , et al. February 25, 2 | 2014-02-25 |
| Method For Reducing Morphological Difference Between N-doped And Undoped Polysilicon Gates After Etching App 20130316539 - TANG; Zaifeng ; et al. | 2013-11-28 |
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