Tang; Shouhong

Patent Applications and Registrations

Patent applications and USPTO patent grants for Tang; Shouhong.The latest application filed is for "method and apparatus to fold optics in tools for measuring shape and/or thickness of a large and thin substrate".

Company Profile

1.30.23

Tang; Shouhong - Santa Clara CA
Tang; Shouhong - Tucson AZ

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Systems and methods for wafer structure uniformity monitoring using interferometry wafer geometry tool Grant 10,352,691 - Chen , et al. July 16, 2	2019-07-16
Method and apparatus to fold optics in tools for measuring shape and/or thickness of a large and thin substrate Grant 9,903,708 - Wang , et al. February 27, 2	2018-02-27
Systems and methods for wafer surface feature detection and quantification Grant 9,702,829 - Chen , et al. July 11, 2	2017-07-11
Method and Apparatus to Fold Optics in Tools for Measuring Shape and/or Thickness of a Large and Thin Substrate App 20160265904 - Wang; Chunhai ; et al.	2016-09-15
Method and apparatus to fold optics in tools for measuring shape and/or thickness of a large and thin substrate Grant 9,279,663 - Wang , et al. March 8, 2	2016-03-08
Reducing registration error of front and back wafer surfaces utilizing a see-through calibration wafer Grant 9,163,928 - Tang , et al. October 20, 2	2015-10-20
Method for reducing wafer shape and thickness measurement errors resulted from cavity shape changes Grant 9,121,684 - Tang , et al. September 1, 2	2015-09-01
Reducing Registration Error Of Front And Back Wafer Surfaces Utilizing A See-through Calibration Wafer App 20150192404 - Tang; Shouhong ; et al.	2015-07-09
Measurement of thickness variation and shape of wafers Grant 9,074,873 - Tang July 7, 2	2015-07-07
A Dual Interferometer System With A Short Reference Flat Distance For Wafer Shape And Thickness Variation Measurement App 20150176973 - Tang; Shouhong ; et al.	2015-06-25
Method and apparatus for measuring shape and thickness variation of a wafer Grant 9,019,491 - Tang April 28, 2	2015-04-28
Method for compensating for wafer shape measurement variation due to variation of environment temperature Grant 8,949,057 - Seong , et al. February 3, 2	2015-02-03
Reducing Registration Error of Front and Back Wafer Surfaces Utilizing a See-Through Calibration Wafer App 20140313516 - Tang; Shouhong ; et al.	2014-10-23
Wafer Shape and Thickness Measurement System Utilizing Shearing Interferometers App 20140293291 - Tang; Shouhong	2014-10-02
Method And Apparatus To Fold Optics In Tools For Measuring Shape And/or Thickness Of A Large And Thin Substrate App 20140029016 - Wang; Chunhai ; et al.	2014-01-30
Methods and systems for improved localized feature quantification in surface metrology tools Grant 8,630,479 - Chen , et al. January 14, 2	2014-01-14
Method and apparatus for improving the temperature stability and minimizing the noise of the environment that encloses an interferometric measuring system Grant 8,621,945 - Zeng , et al. January 7, 2	2014-01-07
Method and apparatus for measuring the shape and thickness variation of a wafer by two single-shot phase-shifting interferometers Grant 8,537,369 - Tang September 17, 2	2013-09-17
Method And Apparatus For Measuring Shape And Thickness Variation Of A Wafer App 20130188179 - Tang; Shouhong	2013-07-25
Method for Reducing Wafer Shape and Thickness Measurement Errors Resulted From Cavity Shape Changes App 20130182262 - Tang; Shouhong ; et al.	2013-07-18
Methods And Systems For Improved Localized Feature Quantification In Surface Metrology Tools App 20120177282 - Chen; Haiguang ; et al.	2012-07-12
Method And Appaatus For Improving The Temperature Stability And Minimizing The Noise Of The Environment That Encloses An Interferometric Measuring System App 20120118061 - Zeng; An Andrew ; et al.	2012-05-17
Method and apparatus for measuring shape or thickness information of a substrate Grant 8,068,234 - Tang , et al. November 29, 2	2011-11-29
Measuring the shape and thickness variation of a wafer with high slopes Grant 7,847,954 - Tang , et al. December 7, 2	2010-12-07
Method And Apparatus For Measuring Shape Or Thickness Information Of A Substrate App 20100208272 - Tang; Shouhong ; et al.	2010-08-19
Measuring the shape, thickness variation, and material inhomogeneity of a wafer Grant 7,667,852 - Tang February 23, 2	2010-02-23
Measuring The Shape And Thickness Variation Of A Wafer With High Slopes App 20090284734 - Tang; Shouhong ; et al.	2009-11-19
Measurement of the top surface of an object with/without transparent thin films in white light interferometry Grant 7,595,891 - Tang September 29, 2	2009-09-29
Method and apparatus for optically analyzing a surface Grant 7,583,386 - Freischlad , et al. September 1, 2	2009-09-01
Temporal interferometric signal modeling with constant phase shift in white light interferometry Grant 7,538,887 - Tang May 26, 2	2009-05-26
Method And Apparatus For Optically Analyzing A Surface App 20080304078 - Freishlad; Klaus ; et al.	2008-12-11
Measuring The Shape, Thickness Variation, And Material Inhomogeneity Of A Wafer App 20080285053 - Tang; Shouhong	2008-11-20
Method and apparatus for optically analyzing a surface Grant 7,428,056 - Freischlad , et al. September 23, 2	2008-09-23
Method and apparatus for optically analyzing a surface Grant 7,408,649 - Freischlad , et al. August 5, 2	2008-08-05
Method & apparatus for optically analyzing a surface App 20070091318 - Freishlad; Klaus ; et al.	2007-04-26
Method and apparatus for optically analyzing a surface App 20070091317 - Freischlad; Klaus ; et al.	2007-04-26
Measurement of the top surface of an object with/without transparent thin films in white light interferometry App 20070008551 - Tang; Shouhong	2007-01-11
Weighted least-square interferometric measurement of multiple surfaces Grant 6,885,461 - Tang April 26, 2	2005-04-26
Non linear phase shift calibration for interferometric measurement of multiple surfaces Grant 6,856,405 - Tang February 15, 2	2005-02-15
Method and apparatus for measuring the shape and thickness variation of polished opaque plates Grant 6,847,458 - Freischlad , et al. January 25, 2	2005-01-25
Method and apparatus for measuring the shape and thickness variation of polished opaque plates App 20040184038 - Freischlad, Klaus ; et al.	2004-09-23
Non linear phase shift calibration for interferometric measurement of multiple surfaces App 20040174526 - Tang, Shouhong	2004-09-09
Weighted least-square interferometric measurement of multiple surfaces App 20040105097 - Tang, Shouhong	2004-06-03
Sheet flatness measurement system and method Grant 5,471,307 - Koliopoulos , et al. November 28, 1	1995-11-28

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