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Patent applications and USPTO patent grants for Tang; Mark.The latest application filed is for "substrate transfer robot and automatic teaching method".
Patent | Date |
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Substrate transfer robot and automatic teaching method Grant 10,953,539 - Yoshida , et al. March 23, 2 | 2021-03-23 |
Substrate transfer robot and method of teaching edge position of target body Grant 10,867,821 - Yoshida , et al. December 15, 2 | 2020-12-15 |
Substrate Transfer Robot And Automatic Teaching Method App 20200206917 - YOSHIDA; Masaya ;   et al. | 2020-07-02 |
Substrate Transfer Robot And Method Of Teaching Edge Position Of Target Body App 20200083073 - YOSHIDA; Tetsuya ;   et al. | 2020-03-12 |
Substrate conveying robot and substrate processing system with pair of blade members arranged in position out of vertical direction Grant 10,381,257 - Tang , et al. A | 2019-08-13 |
Substrate Holding Hand And Substrate Conveying Apparatus Including The Same App 20190013215 - YOSHIDA; Tetsuya ;   et al. | 2019-01-10 |
Substrate Conveying Robot And Substrate Processing System App 20170062264 - TANG; Mark ;   et al. | 2017-03-02 |
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