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Patent applications and USPTO patent grants for Taneda; Akihiko.The latest application filed is for "semiconductor thin film forming system".
Patent | Date |
---|---|
Semiconductor Thin Film Forming System App 20100006776 - Tanabe; Hiroshi ;   et al. | 2010-01-14 |
Thin film processing method and thin processing apparatus Grant 7,396,712 - Tanabe , et al. July 8, 2 | 2008-07-08 |
Thin film processing method and thin film processing apparatus App 20060189034 - Tanabe; Hiroshi ;   et al. | 2006-08-24 |
Thin film processing method and thin film processing apparatus including controlling the cooling rate to control the crystal sizes Grant 7,063,999 - Tanabe , et al. June 20, 2 | 2006-06-20 |
Method for processing thin film and apparatus for processing thin film App 20040053480 - Tanabe, Hiroshi ;   et al. | 2004-03-18 |
Thin film processing method and thin film processing apparatus App 20040009632 - Tanabe, Hiroshi ;   et al. | 2004-01-15 |
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