TANAKA; Sumi
Patent Applications and Registrations
Patent applications and USPTO patent grants for TANAKA; Sumi.The latest application filed is for "plasma processing apparatus and lower stage".
Company Profile
1.20.32
- TANAKA; Sumi - Nirasaki City Yamanashi
- TANAKA; Sumi - Yamanashi JP
- Tanaka; Sumi - Nirasaki N/A JP
- TANAKA; Sumi - Nirasaki-shi JP
- Tanaka; Sumi - Yamanashi-Ken JP
- Tanaka; Sumi - Tokyo JP
- Tanaka, Sumi - Nirasaka-shi JP
- Tanaka; Sumi - Kofu JP
Patent Activity
| Patent | Date |
|---|---|
| Plasma Processing Apparatus And Lower Stage App 20220068603 - IKEDA; Taro ; et al. | 2022-03-03 |
| Stage, Plasma Processing Apparatus, And Plasma Processing Method App 20210265138 - IKEDA; Taro ; et al. | 2021-08-26 |
| Substrate Processing Apparatus And Substrate Processing Method App 20210225618 - TANAKA; Sumi ; et al. | 2021-07-22 |
| Substrate Processing Apparatus And Substrate Processing Method App 20210071302 - TANAKA; Sumi | 2021-03-11 |
| Microwave irradiation apparatus Grant 9,224,623 - Kasai , et al. December 29, 2 | 2015-12-29 |
| Microwave Heating Apparatus App 20150136759 - IKEDA; Taro ; et al. | 2015-05-21 |
| Microwave Heating Apparatus And Processing Method App 20150090708 - Tanaka; Sumi ; et al. | 2015-04-02 |
| Microwave Heating Apparatus App 20140291318 - SHIMOMURA; Kouji ; et al. | 2014-10-02 |
| Microwave Processing Apparatus And Microwave Processing Method App 20140248784 - HAYASHI; Hiroyuki ; et al. | 2014-09-04 |
| Microwave Irradiation Apparatus App 20140034636 - YAMAMOTO; Nobuhiko ; et al. | 2014-02-06 |
| Microwave Heating Apparatus And Processing Method App 20130168389 - IKEDA; Taro ; et al. | 2013-07-04 |
| Annealing device Grant 8,440,939 - Kasai , et al. May 14, 2 | 2013-05-14 |
| Annealing Apparatus App 20120279944 - KASAI; Shigeru ; et al. | 2012-11-08 |
| Microwave Irradiation Apparatus App 20120211486 - Kasai; Shigeru ; et al. | 2012-08-23 |
| Annealing apparatus Grant 8,246,900 - Kasai , et al. August 21, 2 | 2012-08-21 |
| Vaporizer, vaporization module and film forming apparatus Grant 8,197,601 - Tanaka June 12, 2 | 2012-06-12 |
| Processing Apparatus And Method For Operating Same App 20120118504 - Nomura; Masamichi ; et al. | 2012-05-17 |
| Vaporizer And Deposition System Using The Same App 20110180002 - Tanaka; Sumi ; et al. | 2011-07-28 |
| Loading Table Structure And Processing Device App 20110005686 - TANAKA; Sumi ; et al. | 2011-01-13 |
| Annealing Device App 20100314377 - Kasai; Shigeru ; et al. | 2010-12-16 |
| Substrate processing apparatus and substrate rotating device Grant 7,842,229 - Tanaka , et al. November 30, 2 | 2010-11-30 |
| Substrate supporting structure for semiconductor processing, and plasma processing device Grant 7,837,828 - Ikeda , et al. November 23, 2 | 2010-11-23 |
| Heat treatment apparatus Grant 7,769,279 - Tanaka , et al. August 3, 2 | 2010-08-03 |
| Vaporizer, Material Gas Supply System Including Vaporizer And Film Forming Apparatus Using Such System App 20100186673 - TANAKA; Sumi ; et al. | 2010-07-29 |
| Mounting Table Structure And Processing Apparatus App 20100163188 - Tanaka; Sumi ; et al. | 2010-07-01 |
| Mounting Table Structure And Heat Treatment Apparatus App 20100163183 - TANAKA; Sumi ; et al. | 2010-07-01 |
| Annealing Apparatus App 20100038833 - Kasai; Shigeru ; et al. | 2010-02-18 |
| Vaporizer, Vaporization Module And Film Forming Apparatus App 20100006033 - TANAKA; SUMI | 2010-01-14 |
| Substrate holding structure and substrate processing device Grant 7,618,494 - Tanaka , et al. November 17, 2 | 2009-11-17 |
| Microwave plasma processing apparatus for semiconductor element production Grant 7,547,860 - Tanaka , et al. June 16, 2 | 2009-06-16 |
| Substrate Processing Apparatus and Substrate Rotating Device App 20080042328 - Tanaka; Sumi ; et al. | 2008-02-21 |
| Heat-treating Apparatus App 20080011734 - TANAKA; Sumi ; et al. | 2008-01-17 |
| Heat treatment apparatus Grant 7,250,094 - Tanaka , et al. July 31, 2 | 2007-07-31 |
| Gas supply system and processing system App 20070163713 - Kasai; Shigeru ; et al. | 2007-07-19 |
| Substrate holding structure and substrate processing device App 20060191639 - Tanaka; Sumi ; et al. | 2006-08-31 |
| Vacuum processing apparatus App 20060160359 - Kasai; Shigeru ; et al. | 2006-07-20 |
| Heat-treating apparatus App 20060124060 - Tanaka; Sumi ; et al. | 2006-06-15 |
| Substrate supporting structure for semiconductor processing, and plasma processing device App 20060005930 - Ikeda; Taro ; et al. | 2006-01-12 |
| Gas processing apparatus and method and computer storage medium storing program for controlling same App 20050189074 - Kasai, Shigeru ; et al. | 2005-09-01 |
| Processing apparatus App 20050051520 - Tanaka, Sumi | 2005-03-10 |
| Film forming device Grant 6,733,593 - Tanaka , et al. May 11, 2 | 2004-05-11 |
| Treating device App 20040020599 - Tanaka, Sumi ; et al. | 2004-02-05 |
| Processing apparatus App 20020046810 - Tanaka, Masayuki ; et al. | 2002-04-25 |
| Shower head Grant 6,036,782 - Tanaka , et al. March 14, 2 | 2000-03-14 |
| Vacuum processing apparatus Grant 5,951,772 - Matsuse , et al. September 14, 1 | 1999-09-14 |
| Vacuum processing apparatus Grant 5,647,945 - Matsuse , et al. July 15, 1 | 1997-07-15 |
| Film deposition processing device having transparent support and transfer pins Grant 5,525,160 - Tanaka , et al. June 11, 1 | 1996-06-11 |
| Surface processing apparatus Grant 5,332,442 - Kubodera , et al. July 26, 1 | 1994-07-26 |
| Electric probing test machine Grant 4,950,982 - Obikane , et al. August 21, 1 | 1990-08-21 |
| Carrier for transferring plate-like objects one by one, a handling apparatus for loading or unloading the carrier, and a wafer probing machine fitted with the handling apparatus for the wafer carrier Grant 4,901,011 - Koike , et al. February 13, 1 | 1990-02-13 |
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