TANAKA; Maki

Patent Applications and Registrations

Patent applications and USPTO patent grants for TANAKA; Maki.The latest application filed is for "charged particle microscope device and wide-field image generation method".

Company Profile

4.97.93

TANAKA; Maki - Tokyo JP
Tanaka; Maki - Taito-ku JP
Tanaka; Maki - Mito JP
Tanaka; Maki - Yokohama N/A JP
Tanaka; Maki - Yokohama-shi JP
Tanaka; Maki - Saitama JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Charged Particle Microscope Device And Wide-field Image Generation Method App 20200265568 - KOBAYASHI; Mitsutoshi ; et al.	2020-08-20
Touch sensor substrate, touch panel, display device, and method for producing touch sensor substrate Grant 10,331,249 - Goto , et al.	2019-06-25
Image processing device, image processing method and image processing system Grant 10,242,489 - Yoshida , et al.	2019-03-26
Scanning electron microscope Grant 10,186,399 - Osaki , et al. Ja	2019-01-22
Method of improving quality of scanning charged particle microscope image, and scanning charged particle microscope apparatus Grant 9,859,093 - Nakahira , et al. January 2, 2	2018-01-02
Scanning electron microscope system, pattern measurement method using same, and scanning electron microscope Grant 9,852,881 - Shishido , et al. December 26, 2	2017-12-26
Electron microscope device and imaging method using same Grant 9,824,853 - Kobayashi , et al. November 21, 2	2017-11-21
Scanning Electron Microscope App 20170301513 - OSAKI; Mayuka ; et al.	2017-10-19
Image Processing Device, Image Processing Method And Image Processing System App 20170243391 - YOSHIDA; Hanae ; et al.	2017-08-24
Charged-particle-beam device, specimen-image acquisition method, and program recording medium Grant 9,741,530 - Ominami , et al. August 22, 2	2017-08-22
Electron Microscope Device And Imaging Method Using Same App 20170169992 - KOBAYASHI; Mitsutoshi ; et al.	2017-06-15
Pattern dimension measurement method using electron microscope, pattern dimension measurement system, and method for monitoring changes in electron microscope equipment over time Grant 9,671,223 - Shishido , et al. June 6, 2	2017-06-06
Touch Sensor Substrate, Touch Panel, Display Device, And Method For Producing Touch Sensor Substrate App 20170102808 - GOTO; Hiroki ; et al.	2017-04-13
Scanning Electron Microscope System, Pattern Measurement Method Using Same, and Scanning Electron Microscope App 20160379798 - SHISHIDO; Chie ; et al.	2016-12-29
Method of Improving Quality of Scanning Charged Particle Microscope Image, and Scanning Charged Particle Microscope Apparatus App 20160343540 - NAKAHIRA; Kenji ; et al.	2016-11-24
Charged-Particle-Beam Device, Specimen-Image Acquisition Method, and Program Recording Medium App 20160336145 - OMINAMI; Yusuke ; et al.	2016-11-17
Shape measurement method, and system therefor Grant 9,354,049 - Shishido , et al. May 31, 2	2016-05-31
Charged particle microscope apparatus and image acquisition method of charged particle microscope apparatus utilizing image correction based on estimated diffusion of charged particles Grant 9,190,240 - Tanaka November 17, 2	2015-11-17
Pattern measuring apparatus and computer program Grant 9,000,365 - Mochizuki , et al. April 7, 2	2015-04-07
Charged Particle Microscope Apparatus And Image Acquisition Method Of Charged Particle Microscope Apparatus App 20140319341 - Tanaka; Maki	2014-10-30
Estimating shape based on comparison between actual waveform and library in lithography process Grant 8,671,366 - Tanaka , et al. March 11, 2	2014-03-11
Method of inspecting a semiconductor device and an apparatus thereof Grant 8,559,000 - Hamamatsu , et al. October 15, 2	2013-10-15
Shape Measurement Method, And System Therefor App 20130262027 - Shishido; Chie ; et al.	2013-10-03
Electron microscope system and method for evaluating film thickness reduction of resist patterns Grant 8,502,145 - Iwasaki , et al. August 6, 2	2013-08-06
Scanning electron microscope system and method for measuring dimensions of patterns formed on semiconductor device by using the system Grant 8,481,936 - Shishido , et al. July 9, 2	2013-07-09
Pattern Dimension Measurement Method Using Electron Microscope, Pattern Dimension Measurement System, and Method for Monitoring Changes in Electron Microscope Equipment Over Time App 20130166240 - Shishido; Chie ; et al.	2013-06-27
Method Of Inspecting A Semiconductor Device And An Apparatus Thereof App 20120312104 - HAMAMATSU; Akira ; et al.	2012-12-13
Electron Microscope System And Method For Evaluating Film Thickness Reduction Of Resist Patterns App 20120267529 - Iwasaki; Mayuka ; et al.	2012-10-25
Method of inspecting a semiconductor device and an apparatus thereof Grant 8,274,651 - Hamamatsu , et al. September 25, 2	2012-09-25
Electron microscope system and method for evaluating film thickness reduction of resist patterns Grant 8,217,348 - Iwasaki , et al. July 10, 2	2012-07-10
Method and its system for calibrating measured data between different measuring tools Grant 8,214,166 - Tanaka , et al. July 3, 2	2012-07-03
Electron beam exposure or system inspection or measurement apparatus and its method and height detection apparatus Grant 8,212,227 - Watanabe , et al. July 3, 2	2012-07-03
Pattern Shape Estimation Method and Pattern Measuring Device App 20120151428 - Tanaka; Maki ; et al.	2012-06-14
Pattern Shape Selection Method And Pattern Measuring Device App 20120126116 - Tanaka; Maki ; et al.	2012-05-24
Scanning Electron Microscope System And Method For Measuring Dimensions Of Patterns Formed On Semiconductor Device By Using The System App 20120112067 - Shishido; Chie ; et al.	2012-05-10
Pattern Measuring Apparatus And Computer Program App 20120037801 - Mochizuki; Yuzuru ; et al.	2012-02-16
Scanning electron microscope system and method for measuring dimensions of patterns formed on semiconductor device by using the system Grant 8,110,800 - Shishido , et al. February 7, 2	2012-02-07
Method Of Inspecting A Semiconductor Device And An Apparatus Thereof App 20120006131 - Hamamatsu; Akira ; et al.	2012-01-12
Method of inspecting a semiconductor device and an apparatus thereof Grant 8,040,503 - Hamamatsu , et al. October 18, 2	2011-10-18
Sample and method for evaluating resolution of scanning electron microscope, and electron scanning microscope Grant 8,022,356 - Oosaki , et al. September 20, 2	2011-09-20
Pattern inspection method and apparatus Grant 7,957,579 - Hiroi , et al. June 7, 2	2011-06-07
Method and apparatus for inspecting integrated circuit pattern Grant 7,952,074 - Shinada , et al. May 31, 2	2011-05-31
Method and apparatus for observing a specimen Grant 7,935,927 - Miyamoto , et al. May 3, 2	2011-05-03
Pattern inspection method and apparatus Grant 7,894,658 - Hiroi , et al. February 22, 2	2011-02-22
Method and apparatus for measuring shape of a specimen Grant 7,889,908 - Miyamoto , et al. February 15, 2	2011-02-15
Pattern Inspection Method And Apparatus App 20100246933 - Hiroi; Takashi ; et al.	2010-09-30
Electron Beam Exposure Or System Inspection Or Measurement Apparatus And Its Method And Height Detection Apparatus App 20100193686 - Watanabe; Masahiro ; et al.	2010-08-05
Method Of Inspecting A Semiconductor Device And An Apparatus Thereof App 20100140474 - HAMAMATSU; Akira ; et al.	2010-06-10
Method for measuring a pattern dimension using a scanning electron microscope Grant 7,732,761 - Tanaka , et al. June 8, 2	2010-06-08
Sample and method for evaluating resolution of scanning electron microscope, and electron scanning microscope App 20100133426 - Oosaki; Mayuka ; et al.	2010-06-03
Electron beam exposure or system inspection or measurement apparatus and its method and height detection apparatus Grant 7,692,144 - Watanabe , et al. April 6, 2	2010-04-06
Method of inspecting a semiconductor device and an apparatus thereof Grant 7,643,138 - Hamamatsu , et al. January 5, 2	2010-01-05
Method and apparatus for measuring pattern dimensions Grant 7,633,061 - Tanaka , et al. December 15, 2	2009-12-15
Sample and method for evaluating resolution of scanning electron microscope, and electron scanning microscope Grant 7,605,364 - Oosaki , et al. October 20, 2	2009-10-20
Electron Microscope System and Method for Evaluating Film Thickness Reduction of Resist Patterns App 20090212211 - IWASAKI; Mayuka ; et al.	2009-08-27
Scanning Electron Microscope And Method Of Measuring Pattern Dimension Using The Same App 20090212215 - Nagatomo; Wataru ; et al.	2009-08-27
Scanning Electron Microscope system and Method for Measuring Dimensions of Patterns Formed on Semiconductor Device By Using the System App 20090212212 - Shishido; Chie ; et al.	2009-08-27
Method For Measuring A Pattern Dimension App 20090214103 - Tanaka; Maki ; et al.	2009-08-27
Three-dimensional shape measuring unit, processing unit, and semiconductor device manufacturing method Grant 7,511,828 - Watanabe , et al. March 31, 2	2009-03-31
Method for measuring three dimensional shape of a fine pattern Grant 7,483,560 - Shishido , et al. January 27, 2	2009-01-27
Method and Its System for Calibrating Measured Data Between Different Measuring Tools App 20080319696 - Tanaka; Maki ; et al.	2008-12-25
Method And Apparatus For Inspecting Integrated Circuit Pattern App 20080302964 - Shinada; Hiroyuki ; et al.	2008-12-11
Method and apparatus of measuring pattern dimension and controlling semiconductor device process having an error revising unit Grant 7,459,712 - Tanaka , et al. December 2, 2	2008-12-02
Method Of Inspecting A Semiconductor Device And An Apparatus Thereof App 20080291437 - Hamamatsu; Akira ; et al.	2008-11-27
Pattern inspection method and apparatus Grant 7,457,453 - Hiroi , et al. November 25, 2	2008-11-25
Method And Apparatus For Observing A Specimen App 20080237456 - MIYAMOTO; Atsushi ; et al.	2008-10-02
Method and apparatus for inspecting integrated circuit pattern Grant 7,417,444 - Shinada , et al. August 26, 2	2008-08-26
Method of inspecting a semiconductor device and an apparatus thereof Grant 7,417,723 - Hamamatsu , et al. August 26, 2	2008-08-26
Method And Apparatus For Measuring Pattern Dimensions App 20080197280 - Tanaka; Maki ; et al.	2008-08-21
Charged particle beam adjustment method and apparatus Grant 7,381,951 - Doi , et al. June 3, 2	2008-06-03
Method and apparatus for observing a specimen Grant 7,365,325 - Miyamoto , et al. April 29, 2	2008-04-29
Electron Beam Exposure or System Inspection Or Measurement Apparatus And Its Method And Height Detection Apparatus App 20080078933 - WATANABE; Masahiro ; et al.	2008-04-03
Sample And Method For Evaluating Resolution Of Scanning Electron Microscope, And Electron Scanning Microscope App 20080067337 - Oosaki; Mayuka ; et al.	2008-03-20
Pattern Inspection Method And Apparatus App 20080063257 - HIROI; Takashi ; et al.	2008-03-13
Pattern Inspection Method And Apparatus App 20080056559 - Hiroi; Takashi ; et al.	2008-03-06
Method of measuring dimensions of pattern Grant 7,335,881 - Tanaka , et al. February 26, 2	2008-02-26
Electron beam apparatus and method with surface height calculator and a dual projection optical unit Grant 7,329,889 - Watanabe , et al. February 12, 2	2008-02-12
Method And Its Apparatus For Inspecting A Pattern App 20080002876 - Hiroi; Takashi ; et al.	2008-01-03
Pattern Inspection Method And Apparatus App 20070269101 - HIROI; Takashi ; et al.	2007-11-22
Three-Dimensional Shape Measuring Unit, Processing Unit, and Semiconductor Device Manufacturing Method App 20070253001 - Watanabe; Masahiro ; et al.	2007-11-01
Method and its apparatus for inspecting a pattern Grant 7,269,280 - Hiroi , et al. September 11, 2	2007-09-11
Pattern inspection method and apparatus Grant 7,266,235 - Hiroi , et al. September 4, 2	2007-09-04
Method and system for inspecting a pattern Grant 7,260,256 - Hiroi , et al. August 21, 2	2007-08-21
Method For Measuring A Pattern Dimension Using A Scanning Electron Microscope App 20070187595 - Tanaka; Maki ; et al.	2007-08-16
Pattern inspection method and system therefor App 20070131877 - Hiroi; Takashi ; et al.	2007-06-14
Apparatus for inspecting three dimensional shape of a specimen and method of watching an etching process using the same Grant 7,230,239 - Tanaka , et al. June 12, 2	2007-06-12
Method and apparatus for measuring three-dimensional shape of specimen by using SEM Grant 7,230,243 - Tanaka , et al. June 12, 2	2007-06-12
Method of measuring pattern dimension and method of controlling semiconductor device process App 20070120078 - Tanaka; Maki ; et al.	2007-05-31
Method and apparatus for observing a specimen App 20070114398 - Miyamoto; Atsushi ; et al.	2007-05-24
System and method for evaluating a semiconductor device pattern, method for controlling process of forming a semiconductor device pattern and method for monitoring a semiconductor device manufacturing process Grant 7,216,311 - Tanaka , et al. May 8, 2	2007-05-08
Method of measuring pattern dimension and method of controlling semiconductor device process Grant 7,173,268 - Tanaka , et al. February 6, 2	2007-02-06
Apparatus for measuring a three-dimensional shape Grant 7,166,839 - Tanaka , et al. January 23, 2	2007-01-23
Method and apparatus for observing a specimen Grant 7,164,128 - Miyamoto , et al. January 16, 2	2007-01-16
Pattern inspection method and apparatus Grant 7,133,550 - Hiroi , et al. November 7, 2	2006-11-07
Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same Grant 7,122,796 - Hiroi , et al. October 17, 2	2006-10-17
Method and apparatus for inspecting a semiconductor device Grant 7,116,817 - Tanaka , et al. October 3, 2	2006-10-03
Method of inspecting a pattern and an apparatus thereof and a method of processing a specimen Grant 7,116,816 - Tanaka , et al. October 3, 2	2006-10-03
Method of inspecting a semiconductor device and an apparatus thereof App 20060215153 - Hamamatsu; Akira ; et al.	2006-09-28
Method and apparatus for measuring shape of a specimen App 20060210143 - Miyamoto; Atsushi ; et al.	2006-09-21
Method of inspecting a semiconductor device and an apparatus thereof Grant 7,061,602 - Hamamatsu , et al. June 13, 2	2006-06-13
Apparatus for measuring a three-dimensional shape App 20060108526 - Tanaka; Maki ; et al.	2006-05-25
Apparatus for inspecting a specimen Grant 7,049,587 - Hiroi , et al. May 23, 2	2006-05-23
Method and apparatus for inspecting integrated circuit pattern Grant 7,026,830 - Shinada , et al. April 11, 2	2006-04-11
Method and apparatus for inspecting integrated circuit pattern App 20060043982 - Shinada; Hiroyuki ; et al.	2006-03-02
Charged particle beam adjustment method and apparatus App 20060043293 - Doi; Takashi ; et al.	2006-03-02
Method and apparatus for inspecting a semiconductor device App 20060018532 - Tanaka; Maki ; et al.	2006-01-26
Method for determining etching process conditions and controlling etching process Grant 6,984,589 - Tanaka , et al. January 10, 2	2006-01-10
Method and apparatus for measuring three-dimensional shape of specimen by using SEM App 20050285034 - Tanaka, Maki ; et al.	2005-12-29
Circuit pattern inspection method and apparatus Grant 6,975,754 - Hiroi , et al. December 13, 2	2005-12-13
Electron beam exposure or system inspection or measurement apparatus and its method and height detection apparatus App 20050242286 - Watanabe, Masahiro ; et al.	2005-11-03
Method and apparatus for inspecting a semiconductor device Grant 6,952,492 - Tanaka , et al. October 4, 2	2005-10-04
Method of inspecting a semiconductor device and an apparatus thereof App 20050196033 - Hamamatsu, Akira ; et al.	2005-09-08
Method of monitoring an exposure process Grant 6,929,892 - Shishido , et al. August 16, 2	2005-08-16
Method of measuring dimensions of pattern App 20050173633 - Tanaka, Maki ; et al.	2005-08-11
Electron beam exposure or system inspection or measurement apparatus and its method and height detection apparatus Grant 6,919,577 - Watanabe , et al. July 19, 2	2005-07-19
Method of observing exposure condition for exposing semiconductor device and its apparatus and method of manufacturing semiconductor device Grant 6,913,861 - Shishido , et al. July 5, 2	2005-07-05
Method and apparatus for observing a specimen App 20050133718 - Miyamoto, Atsushi ; et al.	2005-06-23
Method and system for monitoring a semiconductor device manufacturing process Grant 6,909,930 - Shishido , et al. June 21, 2	2005-06-21
Method of measuring pattern dimension and method of controlling semiconductor device process App 20050116182 - Tanaka, Maki ; et al.	2005-06-02
Circuit pattern inspection method and apparatus Grant 6,898,305 - Hiroi , et al. May 24, 2	2005-05-24
Method for measuring three dimensional shape of a fine pattern App 20050100205 - Shishido, Chle ; et al.	2005-05-12
Method of inspecting a semiconductor device and an apparatus thereof Grant 6,888,959 - Hamamatsu , et al. May 3, 2	2005-05-03
Convergent charged particle beam apparatus and inspection method using same Grant 6,885,012 - Tanaka , et al. April 26, 2	2005-04-26
Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same App 20050082476 - Hiroi, Takashi ; et al.	2005-04-21
Apparatus for inspecting three dimensional shape of a specimen and method of watching an etching process using the same App 20050048780 - Tanaka, Maki ; et al.	2005-03-03
Method of monitoring an exposure process App 20050037271 - Shishido, Chie ; et al.	2005-02-17
Method of setting etching parameters and system therefor App 20050016682 - Nagatomo, Wataru ; et al.	2005-01-27
Method for manufacturing semiconductor devices and method and its apparatus for processing detected defect data Grant 6,841,403 - Tanaka , et al. January 11, 2	2005-01-11
Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same Grant 6,828,554 - Hiroi , et al. December 7, 2	2004-12-07
Electron beam exposure or system inspection or measurement apparatus and its method and height detection apparatus App 20040217287 - Watanabe, Masahiro ; et al.	2004-11-04
Convergent charged particle beam apparatus and inspection method using same App 20040211919 - Tanaka, Maki ; et al.	2004-10-28
Method for manufacturing semiconductor devices and method and its apparatus for processing detected defect data Grant 6,797,526 - Tanaka , et al. September 28, 2	2004-09-28
Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same App 20040164244 - Hiroi, Takashi ; et al.	2004-08-26
System and method for evaluating a semiconductor device pattern, method for controlling process of forming a semiconductor device pattern and method for monitoring a semiconductor device manufacturing process App 20040156223 - Tanaka, Maki ; et al.	2004-08-12
Method and system for manufacturing a semiconductor device App 20040147121 - Nakagaki, Ryo ; et al.	2004-07-29
Electron beam exposure or system inspection or measurement apparatus and its method and height detection apparatus Grant 6,753,518 - Watanabe , et al. June 22, 2	2004-06-22
Convergent charged particle beam apparatus and inspection method using same Grant 6,744,057 - Tanaka , et al. June 1, 2	2004-06-01
Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same Grant 6,717,142 - Hiroi , et al. April 6, 2	2004-04-06
Method of inspecting circuit pattern and inspecting instrument Grant 6,703,850 - Nozoe , et al. March 9, 2	2004-03-09
Method for determining etching process conditions and controlling etching process App 20040040930 - Tanaka, Maki ; et al.	2004-03-04
Method of observing exposure condition for exposing semiconductor device and its apparatus and method of manufacturing semiconductor device App 20030219658 - Shishido, Chie ; et al.	2003-11-27
Method of inspecting circuit pattern and inspecting instrument App 20030206027 - Nozoe, Mari ; et al.	2003-11-06
Convergent charged particle beam apparatus and inspection method using same App 20030197130 - Tanaka, Maki ; et al.	2003-10-23
Method and apparatus for inspecting integrated circuit pattern App 20030169060 - Shinada, Hiroyuki ; et al.	2003-09-11
Method of fabricating a semiconductor device Grant 6,613,593 - Tanaka , et al. September 2, 2	2003-09-02
Method for manufacturing semiconductor devices and method and its apparatus for processing detected defect data App 20030138978 - Tanaka, Maki ; et al.	2003-07-24
Visual inspection method and apparatus therefor Grant 6,587,581 - Matsuyama , et al. July 1, 2	2003-07-01
Method of inspecting circuit pattern and inspecting instrument Grant 6,583,634 - Nozoe , et al. June 24, 2	2003-06-24
Convergent charged particle beam apparatus and inspection method using same Grant 6,559,459 - Tanaka , et al. May 6, 2	2003-05-06
Pattern inspection method and system therefor App 20030062487 - Hiroi, Takashi ; et al.	2003-04-03
Apparatus for inspecting a specimen App 20030063792 - Hiroi, Takashi ; et al.	2003-04-03
Method for manufacturing semiconductor devices and method and its apparatus for processing detected defect data App 20030054573 - Tanaka, Maki ; et al.	2003-03-20
Method and system for monitoring a semiconductor device manufacturing process App 20030015660 - Shishido, Chie ; et al.	2003-01-23
Method and its apparatus for inspecting a pattern App 20030007677 - Hiroi, Takashi ; et al.	2003-01-09
Method and apparatus for inspecting a semiconductor device App 20020195574 - Tanaka, Maki ; et al.	2002-12-26
Method and apparatus for inspecting a semiconductor device App 20020197750 - Tanaka, Maki ; et al.	2002-12-26
Information seal App 20020150739 - Nagashima, Takeshi ; et al.	2002-10-17
Circuit pattern inspection method and apparatus App 20020114506 - Hiroi, Takashi ; et al.	2002-08-22
Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same App 20020100872 - Hiroi, Takashi ; et al.	2002-08-01
Method and system for inspecting a pattern App 20020094120 - Hiroi, Takashi ; et al.	2002-07-18
Pattern inspection method and apparatus App 20020057831 - Hiroi, Takashi ; et al.	2002-05-16
Pattern inspection method and apparatus App 20020054703 - Hiroi, Takashi ; et al.	2002-05-09
Electron beam exposure or system inspection or measurement apparatus and its method and height detection apparatus App 20020053634 - Watanabe, Masahiro ; et al.	2002-05-09
Convergent charged particle beam apparatus and inspection method using same App 20020053643 - Tanaka, Maki ; et al.	2002-05-09
Circuit pattern inspection method and apparatus App 20020051565 - Hiroi, Takashi ; et al.	2002-05-02
Method of inspecting a pattern on a substrate Grant 6,376,854 - Shishido , et al. April 23, 2	2002-04-23
Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same Grant 6,373,054 - Hiroi , et al. April 16, 2	2002-04-16
Method and apparatus for inspecting integrated circuit pattern App 20020027440 - Shinada, Hiroyuki ; et al.	2002-03-07
Convergent charged particle beam apparatus and inspection method using same Grant 6,335,532 - Tanaka , et al. January 1, 2	2002-01-01
Electron beam exposure or system inspection of measurement apparatus and its method and height detection apparatus Grant 6,333,510 - Watanabe , et al. December 25, 2	2001-12-25
Method of inspecting a semiconductor device and an apparatus thereof App 20010048761 - Hamamatsu, Akira ; et al.	2001-12-06
Method of inspecting a pattern and an apparatus thereof and a method of processing a specimen App 20010033683 - Tanaka, Maki ; et al.	2001-10-25
Method of inspecting pattern and apparatus thereof App 20010030300 - Shishido, Chie ; et al.	2001-10-18
Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same App 20010002697 - Hiroi, Takashi ; et al.	2001-06-07
Method of inspecting pattern and apparatus thereof with a differential brightness image detection Grant 6,236,057 - Shishido , et al. May 22, 2	2001-05-22
Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same Grant 6,172,365 - Hiroi , et al. January 9, 2	2001-01-09
Method and apparatus for inspecting integrated circuit pattern Grant 6,172,363 - Shinada , et al. January 9, 2	2001-01-09
Electron beam exposure or system inspection or measurement apparatus and its method and height detection apparatus Grant 6,107,637 - Watanabe , et al. August 22, 2	2000-08-22
Method of inspecting pattern and apparatus thereof Grant 6,087,673 - Shishido , et al. July 11, 2	2000-07-11
Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same Grant 5,986,263 - Hiroi , et al. November 16, 1	1999-11-16
Method of preparing iron-fortified beverage Grant 5,008,120 - Tanaka , et al. April 16, 1	1991-04-16