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Patent applications and USPTO patent grants for Tanaka; Hisato.The latest application filed is for "substrate transfer processing apparatus".
Patent | Date |
---|---|
Substrate transfer processing apparatus Grant 8,827,254 - Inoue , et al. September 9, 2 | 2014-09-09 |
Stage Grant 8,783,674 - Inoue , et al. July 22, 2 | 2014-07-22 |
Movable table and processing stage Grant 8,485,507 - Inoue , et al. July 16, 2 | 2013-07-16 |
Substrate Transfer Processing Apparatus App 20110048319 - Inoue; Yuya ;   et al. | 2011-03-03 |
Stage App 20110042876 - INOUE; Yuya ;   et al. | 2011-02-24 |
Movable Table And Processing Stage App 20100276858 - Inoue; Yuya ;   et al. | 2010-11-04 |
Intake/exhaust valve and its seal for internal combustion engine Grant 7,779,807 - Tanaka , et al. August 24, 2 | 2010-08-24 |
Method of maintaining and automatically inspecting processing apparatus Grant 7,555,406 - Tanaka , et al. June 30, 2 | 2009-06-30 |
Methods of self-diagnosing software for driving processing apparatus Grant 7,386,423 - Tanaka , et al. June 10, 2 | 2008-06-10 |
Method of automatically resetting processing apparatus Grant 6,954,716 - Tanaka , et al. October 11, 2 | 2005-10-11 |
Intake/exhaust valve and its seal for internal combustion engine App 20050098137 - Tanaka, Hisato ;   et al. | 2005-05-12 |
Method of maintaining and automatically inspecting processing apparatus App 20050090927 - Tanaka, Hisato ;   et al. | 2005-04-28 |
Methods of self-diagnosing software for driving processing apparatus App 20050090926 - Tanaka, Hisato ;   et al. | 2005-04-28 |
Method for maintaining processor, method of automatically inspecting processor and method of automatically resetting processor, method for self-diagnosing software for driving processor App 20030182084 - Tanaka, Hisato ;   et al. | 2003-09-25 |
Ion implantation system using optimum magnetic field for concentrating ions Grant 5,306,921 - Tanaka , et al. April 26, 1 | 1994-04-26 |
Ion source device Grant 5,296,713 - Tanaka March 22, 1 | 1994-03-22 |
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