Tanaka; Chikai
Patent Applications and Registrations
Patent applications and USPTO patent grants for Tanaka; Chikai.The latest application filed is for "local etching method".
- Tanaka; Chikai - Atsugi JP
- Tanaka, Chikai - Ayase-city JP
- Tanaka, Chikai - Atsugi-city JP
- Tanaka, Chikai - Ayase-Shi JP
| Patent | Date |
|---|---|
| Wafer table for local dry etching apparatus Grant 7,005,032 - Yanagisawa , et al. February 28, 2 | 2006-02-28 |
| Local etching method App 20020144781 - Yanagisawa, Michihiko ; et al. | 2002-10-10 |
| Wafer table for local dry etching apparatus App 20020139482 - Yanagisawa, Michihiko ; et al. | 2002-10-03 |
| Local etching apparatus and local etching method App 20020008082 - Tanaka, Chikai ; et al. | 2002-01-24 |
| Local etching apparatus and local etching method App 20010036741 - Tanaka, Chikai ; et al. | 2001-11-01 |
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