| Patent | Date |
|---|
Method for manufacturing a mask blank substrate, method for manufacturing a mask blank, method for manufacturing a transfer mask, method for manufacturing a semiconductor device, a mask blank substrate, a mask blank, and a transfer mask
Grant 10,983,427 - Tanabe April 20, 2 | 2021-04-20 |
Mask blank substrate, multi-layer reflective film coated substrate, and mask blank
Grant 10,578,961 - Ikebe , et al. | 2020-03-03 |
Method For Manufacturing A Mask Blank Substrate, Method For Manufacturing A Mask Blank, Method For Manufacturing A Transfer Mask
App 20190227428 - TANABE; Masaru | 2019-07-25 |
Mask blank substrate, mask blank, transfer mask, and method of manufacturing semiconductor device
Grant 10,168,613 - Tanabe J | 2019-01-01 |
Mask Blank Substrate, Multi-layer Reflective Film Coated Substrate, And Mask Blank
App 20180157166 - IKEBE; Yohei ; et al. | 2018-06-07 |
Mask Blank Substrate, Mask Blank, And Methods For Manufacturing Them, Method For Manufacturing Transfer Mask, And Method For Manufacturing Semiconductor Device
App 20170363952 - IKEBE; Yohei ; et al. | 2017-12-21 |
Mask Blank Substrate, Mask Blank, Transfer Mask, And Method Of Manufacturing Semiconductor Device
App 20170248841 - TANABE; Masaru | 2017-08-31 |
Mask blank substrate, mask blank, transfer mask, and method of manufacturing semiconductor device
Grant 9,690,189 - Tanabe June 27, 2 | 2017-06-27 |
Mask Blank Substrate, Mask Blank, Transfer Mask, And Method Of Manufacturing Semiconductor Device
App 20160109797 - TANABE; Masaru | 2016-04-21 |
Solar Battery-sealing Sheet, Solar Battery Module And Method For Manufacturing The Same
App 20150372158 - TANABE; Masaru ; et al. | 2015-12-24 |
Substrate Inspection Method, Substrate Manufacturing Method And Substrate Inspection Device
App 20150029324 - TANABE; Masaru | 2015-01-29 |
Substrate Inspection Method, Substrate Manufacturing Method And Substrate Inspection Device
App 20150030230 - TANABE; Masaru | 2015-01-29 |
Method of manufacturing a mask blank substrate, method of manufacturing a mask blank, method of manufacturing a transfer mask, and method of manufacturing a semiconductor device
Grant 8,785,085 - Tanabe July 22, 2 | 2014-07-22 |
Photomask blank, photomask blank manufacturing method, and photomask manufacturing method
Grant 8,709,683 - Tanabe April 29, 2 | 2014-04-29 |
Thin film evaluation method, mask blank, and transfer mask
Grant 8,609,307 - Sakai , et al. December 17, 2 | 2013-12-17 |
Method of manufacturing a transfer mask and method of manufacturing a semiconductor device
Grant 8,609,304 - Tanabe , et al. December 17, 2 | 2013-12-17 |
Methods of manufacturing a mask blank substrate, a mask blank, a photomask, and a semiconductor device
Grant 8,592,106 - Tanabe November 26, 2 | 2013-11-26 |
Thin Film Evaluation Method, Mask Blank, And Transfer Mask
App 20130236819 - SAKAI; Kazuya ; et al. | 2013-09-12 |
Method of manufacturing a substrate for a mask blank, method of manufacturing a mask blank, method of manufacturing a transfer mask, and method of manufacturing a semiconductor device
Grant 8,455,158 - Tanabe June 4, 2 | 2013-06-04 |
Thin film evaluation method, mask blank, and transfer mask
Grant 8,450,030 - Sakai , et al. May 28, 2 | 2013-05-28 |
Mask blank substrate, mask blank, photomask, and methods of manufacturing the same
Grant 8,440,373 - Tanabe May 14, 2 | 2013-05-14 |
Method Of Manufacturing A Mask Blank Substrate, Method Of Manufacturing A Mask Blank, Method Of Manufacturing A Transfer Mask, And Method Of Manufacturing A Semiconductor Device
App 20130022900 - Tanabe; Masaru | 2013-01-24 |
Mask blank substrate set and mask blank set
Grant 8,318,387 - Tanabe November 27, 2 | 2012-11-27 |
Mask blank providing system, mask blank providing method, mask blank transparent substrate manufacturing method, mask blank manufacturing method, and mask manufacturing method
Grant 8,318,388 - Suzuki , et al. November 27, 2 | 2012-11-27 |
Method Of Manufacturing A Transfer Mask And Method Of Manufacturing A Semiconductor Device
App 20120251928 - TANABE; Masaru ; et al. | 2012-10-04 |
Photomask Blank, Photomask Blank Manufacturing Method, And Photomask Manufacturing Method
App 20120214093 - TANABE; Masaru | 2012-08-23 |
Methods Of Manufacturing A Mask Blank Substrate, A Mask Blank, A Photomask, And A Semiconductor Device
App 20120208112 - TANABE; Masaru | 2012-08-16 |
Photomask blank, photomask blank manufacturing method, and photomask manufacturing method
Grant 8,197,992 - Tanabe June 12, 2 | 2012-06-12 |
Methods of manufacturing a mask blank substrate, a mask blank, a photomask, and a semiconductor device
Grant 8,142,963 - Tanabe March 27, 2 | 2012-03-27 |
Transparent article
Grant 8,107,063 - Tanabe January 31, 2 | 2012-01-31 |
Mask Blank Substrate, Mask Blank, Photomask, And Methods Of Manufacturing The Same
App 20120015286 - TANABE; Masaru | 2012-01-19 |
Thin Film Evaluation Method, Mask Blank, And Transfer Mask
App 20110287347 - SAKAI; Kazuya ; et al. | 2011-11-24 |
Mask blank substrate, mask blank, photomask, and methods of manufacturing the same
Grant 8,048,593 - Tanabe November 1, 2 | 2011-11-01 |
Mask Blank Providing System, Mask Blank Providing Method, Mask Blank Transparent Substrate Manufacturing Method, Mask Blank Manufacturing Method, And Mask Manufacturing Method
App 20110262847 - SUZUKI; Osamu ; et al. | 2011-10-27 |
Methods Of Manufacturing A Mask Blank Substrate, A Mask Blank, A Photomask, And A Semiconductor Device
App 20110262846 - Tanabe; Masaru | 2011-10-27 |
Mask Blank Substrate Set And Mask Blank Set
App 20110256473 - Tanabe; Masaru | 2011-10-20 |
Manufacturing method of transparent substrate for mask blanks, manufacturing method of mask blanks, manufacturing method of exposure masks, manufacturing method of semiconductor devices, manufacturing method of liquid crystal display devices, and defect correction method of exposure masks
Grant 8,039,178 - Tanabe , et al. October 18, 2 | 2011-10-18 |
Mask blank transparent substrate manufacturing method, mask blank manufacturing method, and exposure mask manufacturing method
Grant 8,026,025 - Tanabe September 27, 2 | 2011-09-27 |
Mask blank substrate set and mask blank set
Grant 8,007,961 - Tanabe August 30, 2 | 2011-08-30 |
Mask blank providing system, mask blank providing method, mask blank transparent substrate manufacturing method, mask blank manufacturing method, and mask manufacturing method
Grant 7,998,644 - Suzuki , et al. August 16, 2 | 2011-08-16 |
Method Of Manufacturing A Substrate For A Mask Blank, Method Of Manufacturing A Mask Blank, Method Of Manufacturing A Transfer Mask , And Method Of Manufacturing A Semiconductor Device
App 20110189595 - TANABE; Masaru | 2011-08-04 |
Defect inspection method for a glass substrate for a mask blank, glass substrate for a mask blank, mask blank, exposure mask, method of producing a glass substrate for a mask blank, method of producing a mask blank, and method of producing an exposure mask
Grant 7,972,702 - Tanabe July 5, 2 | 2011-07-05 |
Manufacturing Method Of Transparent Substrate For Mask Blanks, Manufacturing Method Of Mask Blanks, Manufacturing Method Of Exposure Masks, Manufacturing Method Of Semiconductor Devices, Manufacturing Method Of Liquid Crystal Display Devices, And Defect Correction Method Of Exposure Masks
App 20110123912 - TANABE; Masaru ; et al. | 2011-05-26 |
Transparent Article
App 20110097652 - TANABE; Masaru | 2011-04-28 |
Mask blank transparent substrate manufacturing method, mask blank manufacturing method, and exposure mask manufacturing method
Grant 7,901,840 - Tanabe March 8, 2 | 2011-03-08 |
Inspection method for transparent article
Grant 7,898,650 - Tanabe March 1, 2 | 2011-03-01 |
Mask blank substrate, mask blank, exposure mask, mask blank substrate manufacturing method, and semiconductor manufacturing method
Grant 7,892,708 - Tanabe , et al. February 22, 2 | 2011-02-22 |
Mask Blank Transparent Substrate Manufacturing Method, Mask Blank Manufacturing Method, And Exposure Mask Manufacturing Method
App 20110027701 - TANABE; Masaru | 2011-02-03 |
Manufacturing method of transparent substrate for mask blanks, manufacturing method of mask blanks, manufacturing method of exposure masks, manufacturing method of semiconductor devices, manufacturing method of liquid crystal display devices, and defect correction method of exposure masks
Grant 7,862,960 - Tanabe , et al. January 4, 2 | 2011-01-04 |
Mask Blank Substrate, Mask Blank, Exposure Mask, Mask Blank Substrate Manufacturing Method, And Semiconductor Manufacturing Method
App 20100248092 - TANABE; Masaru ; et al. | 2010-09-30 |
Mask Blank Providing System, Mask Blank Providing Method, Mask Blank Transparent Substrate Manufacturing Method, Mask Blank Manufacturing Method, And Mask Manufacturing Method
App 20100173232 - SUZUKI; Osamu ; et al. | 2010-07-08 |
Mask blank substrate, mask blank, exposure mask, mask blank substrate manufacturing method, and semiconductor manufacturing method
Grant 7,745,074 - Tanabe , et al. June 29, 2 | 2010-06-29 |
Photomask Blank, Photomask Blank Manufacturing Method, And Photomask Manufacturing Method
App 20100124711 - TANABE; Masaru | 2010-05-20 |
Mask blank providing system, mask blank providing method, mask blank transparent substrate manufacturing method, mask blank manufacturing method, and mask manufacturing method
Grant 7,700,244 - Suzuki , et al. April 20, 2 | 2010-04-20 |
Mask Blank Substrate Set And Mask Blank Set
App 20100081067 - TANABE; Masaru | 2010-04-01 |
Mask Blank Substrate, Mask Blank, Exposure Mask, Mask Blank Substrate Manufacturing Method, And Semiconductor Manufacturing Method
App 20100035164 - TANABE; Masaru ; et al. | 2010-02-11 |
Mask Blank Substrate, Mask Blank, Photomask, And Methods Of Manufacturing The Same
App 20100035028 - TANABE; Masaru | 2010-02-11 |
Mask blank substrate, mask blank, exposure mask, mask blank substrate manufacturing method, and semiconductor manufacturing method
Grant 7,592,104 - Tanabe , et al. September 22, 2 | 2009-09-22 |
Inspection Method For Transparent Article
App 20090220864 - Tanabe; Masaru | 2009-09-03 |
Manufacturing Method of Transparent Substrate for Mask Blanks, Manufacturing Method of Mask Blanks, Manufacturing Method of Exposure Masks, Manufacturing Method of Semiconductor Devices, Manufacturing Method of Liquid Crystal Display Devices, and Defect Correction Method of Exposure Masks
App 20080107970 - Tanabe; Masaru ; et al. | 2008-05-08 |
Defect inspection method for a glass substrate for a mask blank, glass substrate for a mask blank, mask blank, exposure mask, method of producing a glass substrate for a mask blank, method of producing a mask blank, and method of producing an exposure mask
App 20070003843 - Tanabe; Masaru | 2007-01-04 |
Mask blank transparent substrate manufacturing method, mask blank manufacturing method, and exposure mask manufacturing method
App 20060194126 - Tanabe; Masaru | 2006-08-31 |
Mask blank providing system, mask blank providing method, mask blank transparent substrate manufacturing method, mask blank manufacturing method, and mask manufacturing method
App 20060159931 - Suzuki; Osamu ; et al. | 2006-07-20 |
Mask blank substrate, mask blank, exposure mask, mask blank substrate manufacturing method, and semiconductor manufacturing method
App 20060068300 - Tanabe; Masaru ; et al. | 2006-03-30 |
Method of inspecting ununiformity of transparent material, apparatus therefor, and method of selecting transparent substrate
Grant 6,861,659 - Tanabe March 1, 2 | 2005-03-01 |
Reflector, sidelight type backlighting apparatus and reflector substrate
Grant 6,683,720 - Yoshida , et al. January 27, 2 | 2004-01-27 |
Method of inspecting ununiformity of transparent material, apparatus therefor, and method of selecting transparent substrate
App 20030218145 - Tanabe, Masaru | 2003-11-27 |
Method of checking unevenness of light-transmitting substance, apparatus therefor, and method of sorting transparent substrates
Grant 6,610,994 - Tanabe August 26, 2 | 2003-08-26 |
Reflector, sidelight type backlighting apparatus and reflector substrate
App 20030137739 - Yoshida, Hirotaka ; et al. | 2003-07-24 |
Glass Substrate For An Electron Device, Photomask Blank And Photomask Using The Same
App 20010044052 - TANABE, MASARU | 2001-11-22 |
| 