Tan; Zhengquan

Patent Applications and Registrations

Patent applications and USPTO patent grants for Tan; Zhengquan.The latest application filed is for "scatterometry based methods and systems for measurement of strain in semiconductor structures".

Company Profile

4.17.18

Tan; Zhengquan - Milpitas CA
Tan; Zhengquan - Cupertino CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Bandgap measurements of patterned film stacks using spectroscopic metrology Grant 11,378,451 - Wang , et al. July 5, 2	2022-07-05
Scatterometry Based Methods And Systems For Measurement Of Strain In Semiconductor Structures App 20210293532 - Chouaib; Houssam ; et al.	2021-09-23
Scatterometry based methods and systems for measurement of strain in semiconductor structures Grant 11,060,846 - Chouaib , et al. July 13, 2	2021-07-13
Measuring Thin Films on Grating and Bandgap on Grating App 20200240768 - Chouaib; Houssam ; et al.	2020-07-30
Scatterometry Based Methods And Systems For Measurement Of Strain In Semiconductor Structures App 20200200525 - Chouaib; Houssam ; et al.	2020-06-25
Measuring thin films on grating and bandgap on grating Grant 10,663,286 - Chouaib , et al.	2020-05-26
Model based optical measurements of semiconductor structures with anisotropic dielectric permittivity Grant 10,458,912 - Chouaib , et al. Oc	2019-10-29
Measuring Thin Films on Grating and Bandgap on Grating App 20190063900 - Chouaib; Houssam ; et al.	2019-02-28
Bandgap Measurements of Patterned Film Stacks Using Spectroscopic Metrology App 20190041266 - Wang; Tianhan ; et al.	2019-02-07
Model building and analysis engine for combined X-ray and optical metrology Grant 10,013,518 - Bakeman , et al. July 3, 2	2018-07-03
Model Based Optical Measurements Of Semiconductor Structures With Anisotropic Dielectric Permittivity App 20180059019 - Chouaib; Houssam ; et al.	2018-03-01
Model Building And Analysis Engine For Combined X-ray And Optical Metrology App 20140019097 - Bakeman; Michael S. ; et al.	2014-01-16
Methods for measurement or analysis of a nitrogen concentration of a specimen Grant 7,349,079 - Zhao , et al. March 25, 2	2008-03-25
HDP-CVD deposition process for filling high aspect ratio gaps Grant 7,196,021 - Tan , et al. March 27, 2	2007-03-27
Multistep remote plasma clean process Grant 7,159,597 - Hua , et al. January 9, 2	2007-01-09
Method for high aspect ratio HDP CVD gapfill Grant 7,064,077 - Hua , et al. June 20, 2	2006-06-20
Methods for measurement or analysis of a nitrogen concentration of a specimen App 20050254049 - Zhao, Qiang ; et al.	2005-11-17
HDP-CVD deposition process for filling high aspect ratio gaps App 20050181632 - Tan, Zhengquan ; et al.	2005-08-18
Hydrogen assisted undoped silicon oxide deposition process for HDP-CVD Grant 6,929,700 - Tan , et al. August 16, 2	2005-08-16
HDP-CVD deposition process for filling high aspect ratio gaps Grant 6,914,016 - Tan , et al. July 5, 2	2005-07-05
Method for high aspect ratio HDP CVD gapfill App 20050079715 - Hua, Zhong Qiang ; et al.	2005-04-14
Method for high aspect ratio HDP CVD gapfill Grant 6,812,153 - Hua , et al. November 2, 2	2004-11-02
HDP-CVD deposition process for filling high aspect ratio gaps App 20040152341 - Tan, Zhengquan ; et al.	2004-08-05
HDP-CVD deposition process for filling high aspect ratio gaps Grant 6,740,601 - Tan , et al. May 25, 2	2004-05-25
Method and apparatus for cleaning a semiconductor wafer processing system Grant 6,715,496 - Kwan , et al. April 6, 2	2004-04-06
Substrate support with extended radio frequency electrode upper surface Grant 6,682,603 - Gondhalekar , et al. January 27, 2	2004-01-27
Substrate Support With Extended Radio Frequency Electrode Upper Surface App 20030211757 - Gondhalekar, Sudhir ; et al.	2003-11-13
Method for high aspect ratio HDP CVD gapfill App 20030203637 - Hua, Zhong Qiang ; et al.	2003-10-30
Method and apparatus for cleaning a semiconductor wafer processing system App 20030164224 - Kwan, Michael Chiu ; et al.	2003-09-04
Hydrogen assisted undoped silicon oxide deposition process for HDP-CVD App 20030159656 - Tan, Zhengquan ; et al.	2003-08-28
Hydrogen assisted undoped silicon oxide deposition process for HDP-CVD Grant 6,596,653 - Tan , et al. July 22, 2	2003-07-22
Multistep remote plasma clean process App 20030029475 - Hua, Zhong Qiang ; et al.	2003-02-13
Hydrogen assisted undoped silicon oxide deposition process for HDP-CVD App 20020187656 - Tan, Zhengquan ; et al.	2002-12-12
HDP-CVD deposition process for filling high aspect ratio gaps App 20020187655 - Tan, Zhengquan ; et al.	2002-12-12
HDP-CVD deposition of low dielectric constant amorphous carbon film Grant 6,423,384 - Khazeni , et al. July 23, 2	2002-07-23

uspto.report is an independent third-party trademark research tool that is not affiliated, endorsed, or sponsored by the United States Patent and Trademark Office (USPTO) or any other governmental organization. The information provided by uspto.report is based on publicly available data at the time of writing and is intended for informational purposes only.

While we strive to provide accurate and up-to-date information, we do not guarantee the accuracy, completeness, reliability, or suitability of the information displayed on this site. The use of this site is at your own risk. Any reliance you place on such information is therefore strictly at your own risk.

All official trademark data, including owner information, should be verified by visiting the official USPTO website at www.uspto.gov. This site is not intended to replace professional legal advice and should not be used as a substitute for consulting with a legal professional who is knowledgeable about trademark law.