loadpatents
Patent applications and USPTO patent grants for Tan; Samantha SiamHwa.The latest application filed is for "atomic layer etch and ion beam etch patterning".
Patent | Date |
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Deposition of self assembled monolayer for enabling selective deposition and etch Grant 11,450,532 - Lee , et al. September 20, 2 | 2022-09-20 |
Atomic Layer Etch And Ion Beam Etch Patterning App 20220254649 - TAN; Samantha SiamHwa ;   et al. | 2022-08-11 |
Photoresist Development With Halide Chemistries App 20220244645 - Tan; Samantha SiamHwa ;   et al. | 2022-08-04 |
Selective Carbon Deposition App 20220235464 - GUPTA; Awnish ;   et al. | 2022-07-28 |
Deposition Of Self Assembled Monolayer For Enabling Selective Deposition And Etch App 20220208555 - LEE; Younghee ;   et al. | 2022-06-30 |
Carbon Based Depositions Used For Critical Dimension Control During High Aspect Ratio Feature Etches And For Forming Protective Layers App 20220199417 - HENRI; Jon ;   et al. | 2022-06-23 |
Atomic Layer Etching For Subtractive Metal Etch App 20220199422 - YANG; Wenbing ;   et al. | 2022-06-23 |
High Etch Selectivity, Low Stress Ashable Carbon Hard Mask App 20220181147 - XUE; Jun ;   et al. | 2022-06-09 |
Tin oxide mandrels in patterning Grant 11,355,353 - Yu , et al. June 7, 2 | 2022-06-07 |
Selective Etch Using A Sacrificial Mask App 20220122848 - PETER; Daniel ;   et al. | 2022-04-21 |
Removing Metal Contamination From Surfaces Of A Processing Chamber App 20220037132 - YU; Jengyi ;   et al. | 2022-02-03 |
Dry Development Of Resists App 20220020584 - Volosskiy; Boris ;   et al. | 2022-01-20 |
Selectively Etching For Nanowires App 20210335626 - XUE; Jun ;   et al. | 2021-10-28 |
Selectively Etching For Nanowires App 20210272814 - PETER; Daniel ;   et al. | 2021-09-02 |
Metal-containing Passivation For High Aspect Ratio Etch App 20210242032 - COLINJIVADI; Karthik S. ;   et al. | 2021-08-05 |
Plasma Etching Chemistries Of High Aspect Ratio Features In Dielectrics App 20210005472 - KANARIK; Keren J. ;   et al. | 2021-01-07 |
Integrating atomic scale processes: ALD (atomic layer deposition) and ALE (atomic layer etch) Grant 10,515,816 - Kanarik , et al. Dec | 2019-12-24 |
Tin Oxide Mandrels In Patterning App 20190237341 - Yu; Jengyi ;   et al. | 2019-08-01 |
Integrating Atomic Scale Processes: Ald (atomic Layer Deposition) And Ale (atomic Layer Etch) App 20190139778 - Kanarik; Keren Jacobs ;   et al. | 2019-05-09 |
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