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High Density, Modulus, And Hardness Amorphous Carbon Films At Low Pressure App 20220282366 - Weimer; Matthew Scott ;   et al. | 2022-09-08 |
Tin Oxide Films In Semiconductor Device Manufacturing App 20220270877 - Yu; Jengyi ;   et al. | 2022-08-25 |
Atomic Layer Etch And Selective Deposition Process For Extreme Ultraviolet Lithography Resist Improvement App 20220216050 - Yu; Jengyi ;   et al. | 2022-07-07 |
Alternating Etch And Passivation Process App 20220208551 - Heo; Seongjun ;   et al. | 2022-06-30 |
Tin Oxide Films In Semiconductor Device Manufacturing App 20220165571 - Yu; Jengyi ;   et al. | 2022-05-26 |
Tin oxide films in semiconductor device manufacturing Grant 11,322,351 - Yu , et al. May 3, 2 | 2022-05-03 |
Underlayer for photoresist adhesion and dose reduction Grant 11,314,168 - Tan , et al. April 26, 2 | 2022-04-26 |
Eliminating Yield Impact Of Stochastics In Lithography App 20220122846 - Shamma; Nader ;   et al. | 2022-04-21 |
Atomic Layer Etching Of Tungsten For Enhanced Tungsten Deposition Fill App 20220115244 - LAI; Chiukin Steven ;   et al. | 2022-04-14 |
Underlayer For Photoresist Adhesion And Dose Reduction App 20220043334 - Tan; Samantha S.H. ;   et al. | 2022-02-10 |
Underlayer For Photoresist Adhesion And Dose Reduction App 20220035247 - Tan; Samantha S.H. ;   et al. | 2022-02-03 |
Tin Oxide Films In Semiconductor Device Manufacturing App 20210265163 - Yu; Jengyi ;   et al. | 2021-08-26 |
Tin Oxide Mandrels In Patterning App 20210265173 - Yu; Jengyi ;   et al. | 2021-08-26 |
High Energy Atomic Layer Etching App 20200402770 - Yang; Wenbing ;   et al. | 2020-12-24 |
Tin Oxide Films In Semiconductor Device Manufacturing App 20200083044 - Yu; Jengyi ;   et al. | 2020-03-12 |
Method to etch non-volatile metal materials Grant 9,391,267 - Shen , et al. July 12, 2 | 2016-07-12 |
Method to etch non-volatile metal materials Grant 9,257,638 - Tan , et al. February 9, 2 | 2016-02-09 |
Method To Etch Non-volatile Metal Materials App 20150340603 - SHEN; Meihua ;   et al. | 2015-11-26 |
Method To Etch Non-volatile Metal Materials App 20150280113 - TAN; Samantha S.H. ;   et al. | 2015-10-01 |
Method To Etch Non-volatile Metal Materials App 20150280114 - SHEN; Meihua ;   et al. | 2015-10-01 |
Method to etch non-volatile metal materials Grant 9,130,158 - Shen , et al. September 8, 2 | 2015-09-08 |
Method And Solution For Cleaning Metal Residue App 20150079786 - Tan; Samantha S.H. ;   et al. | 2015-03-19 |
Methods and apparatus for cleaning deposition chamber parts using selective spray etch Grant 8,691,023 - Bao , et al. April 8, 2 | 2014-04-08 |
Non destructive selective deposition removal of non-metallic deposits from aluminum containing substrates Grant 8,398,779 - Bao , et al. March 19, 2 | 2013-03-19 |
Methods for cleaning process kits and chambers, and for ruthenium recovery Grant 8,097,089 - Tan , et al. January 17, 2 | 2012-01-17 |
Methods and apparatus for cleaning chamber components Grant 7,789,969 - Rabinovich , et al. September 7, 2 | 2010-09-07 |
Non Destructive Selective Deposition Removal Of Non-metallic Deposits From Aluminum Containing Substrates App 20100218788 - Bao; Liyuan ;   et al. | 2010-09-02 |
Cleaning processes for silicon carbide materials Grant 7,754,609 - Tan July 13, 2 | 2010-07-13 |
Methods For Cleaning Process Kits And Chambers, And For Ruthenium Recovery App 20090197004 - Tan; Samantha S. H. ;   et al. | 2009-08-06 |
Methods And Apparatus For Cleaning Deposition Chamber Parts Using Selective Spray Etch App 20090000641 - Bao; Liyuan ;   et al. | 2009-01-01 |
Cleaning process and apparatus for silicate materials Grant 7,452,475 - Tan , et al. November 18, 2 | 2008-11-18 |
Methods And Apparatus For Cleaning Chamber Components App 20080099054 - RABINOVICH; FELIX ;   et al. | 2008-05-01 |
Cleaning process and apparatus for silicate materials Grant 7,045,072 - Tan , et al. May 16, 2 | 2006-05-16 |
Cleaning process and apparatus for silicate materials App 20050167393 - Tan, Samantha S. H. ;   et al. | 2005-08-04 |
Cleaning masks App 20050016565 - Tan, Samantha S.H. ;   et al. | 2005-01-27 |
Cleaning process and apparatus for silicate materials App 20050016958 - Tan, Samantha S. H. ;   et al. | 2005-01-27 |
Apparatus for obtaining, storing and transporting liquid samples and methods for making and using same Grant 5,804,744 - Tan , et al. September 8, 1 | 1998-09-08 |