Tan; Samantha

Patent Applications and Registrations

Patent applications and USPTO patent grants for Tan; Samantha.The latest application filed is for "atomic layer etching of tungsten for enhanced tungsten deposition fill".

Company Profile

23.36.48

Tan; Samantha - Fremont CA
Tan; Samantha - Union City CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Atomic layer etching and smoothing of refractory metals and other high surface binding energy materials Grant 11,450,513 - Yang , et al. September 20, 2	2022-09-20
Eliminating yield impact of stochastics in lithography Grant 11,257,674 - Shamma , et al. February 22, 2	2022-02-22
Atomic Layer Etching Of Tungsten For Enhanced Tungsten Deposition Fill App 20210305059 - Lai; Chiukin Steven ; et al.	2021-09-30
Atomic layer etch of tungsten for enhanced tungsten deposition fill Grant 11,069,535 - Lai , et al. July 20, 2	2021-07-20
Metal doped carbon based hard mask removal in semiconductor fabrication Grant 11,062,897 - Yu , et al. July 13, 2	2021-07-13
Capped ALD films for doping fin-shaped channel regions of 3-D IC transistors Grant 11,011,379 - Arghavani , et al. May 18, 2	2021-05-18
Selective Processing With Etch Residue-based Inhibitors App 20210098257 - Sharma; Kashish ; et al.	2021-04-01
Atomic Layer Etching And Smoothing Of Refractory Metals And Other High Surface Binding Energy Materials App 20210005425 - Yang; Wenbing ; et al.	2021-01-07
Eliminating Yield Impact Of Stochastics In Lithography App 20200402801 - Shamma; Nader ; et al.	2020-12-24
Directional deposition on patterned structures Grant 10,825,680 - Kabansky , et al. November 3, 2	2020-11-03
Eliminating yield impact of stochastics in lithography Grant 10,796,912 - Shamma , et al. October 6, 2	2020-10-06
Atomic Layer Etch Of Tungsten For Enhanced Tungsten Deposition Fill App 20200286743 - Lai; Chiukin Steven ; et al.	2020-09-10
High energy atomic layer etching Grant 10,763,083 - Yang , et al. Sep	2020-09-01
Dry plasma etch method to pattern MRAM stack Grant 10,749,103 - Tan , et al. A	2020-08-18
Selective self-aligned patterning of silicon germanium, germanium and type III/V materials using a sulfur-containing mask Grant 10,741,405 - Peter , et al. A	2020-08-11
Atomic layer etching 3D structures: Si and SiGe and Ge smoothness on horizontal and vertical surfaces Grant 10,727,073 - Tan , et al.	2020-07-28
Etching substrates using ALE and selective deposition Grant 10,685,836 - Tan , et al.	2020-06-16
Integrating Atomic Scale Processes: Ald (atomic Layer Deposition) And Ale (atomic Layer Etch) App 20200161139 - Kanarik; Keren Jacobs ; et al.	2020-05-21
Capped ALD films for doping fin-shaped channel regions of 3-D IC transistors Grant 10,559,468 - Arghavani , et al. Feb	2020-02-11
Tin oxide films in semiconductor device manufacturing Grant 10,546,748 - Yu , et al. Ja	2020-01-28
Capped Ald Films For Doping Fin-shaped Channel Regions Of 3-d Ic Transistors App 20190385850 - Arghavani; Reza ; et al.	2019-12-19
Dry Plasma Etch Method To Pattern Mram Stack App 20190312194 - Tan; Samantha ; et al.	2019-10-10
Etching Substrates Using Ale And Selective Deposition App 20190244805 - Tan; Samantha ; et al.	2019-08-08
Dry plasma etch method to pattern MRAM stack Grant 10,374,144 - Tan , et al.	2019-08-06
Ale smoothness: in and outside semiconductor industry Grant 10,304,659 - Kanarik , et al.	2019-05-28
Etching substrates using ale and selective deposition Grant 10,269,566 - Tan , et al.	2019-04-23
High Energy Atomic Layer Etching App 20190108982 - Yang; Wenbing ; et al.	2019-04-11
Integrating atomic scale processes: ALD (atomic layer deposition) and ale (atomic layer etch) Grant 10,186,426 - Kanarik , et al. Ja	2019-01-22
Metal Doped Carbon Based Hard Mask Removal In Semiconductor Fabrication App 20180358220 - Yu; Yongsik ; et al.	2018-12-13
Selective Self-aligned Patterning Of Silicon Germanium, Germanium And Type Iii/v Materials Using A Sulfur-containing Mask App 20180342399 - Peter; Daniel ; et al.	2018-11-29
Eliminating Yield Impact Of Stochastics In Lithography App 20180337046 - Shamma; Nader ; et al.	2018-11-22
Methods for wet metal seed deposition for bottom up gapfill of features Grant 10,103,056 - Tan , et al. October 16, 2	2018-10-16
Atomic layer etching of tungsten and other metals Grant 10,096,487 - Yang , et al. October 9, 2	2018-10-09
Capped Ald Films For Doping Fin-shaped Channel Regions Of 3-d Ic Transistors App 20180269061 - Arghavani; Reza ; et al.	2018-09-20
Methods For Wet Metal Seed Deposition For Bottom Up Gapfill Of Features App 20180261502 - Tan; Samantha ; et al.	2018-09-13
Atomic Layer Etch Of Tungsten For Enhanced Tungsten Deposition Fill App 20180240682 - Lai; Chiukin Steven ; et al.	2018-08-23
Tin Oxide Films In Semiconductor Device Manufacturing App 20180240667 - Yu; Jengyi ; et al.	2018-08-23
Atomic layer etching of GaN and other III-V materials Grant 10,056,264 - Yang , et al. August 21, 2	2018-08-21
Directional Deposition On Patterned Structures App 20180233357 - Kabansky; Alexander ; et al.	2018-08-16
Ale Smoothness: In And Outside Semiconductor Industry App 20180233325 - Kanarik; Keren Jacobs ; et al.	2018-08-16
Selective self-aligned patterning of silicon germanium, germanium and type III/V materials using a sulfur-containing mask Grant 10,043,672 - Peter , et al. August 7, 2	2018-08-07
Capped ALD films for doping fin-shaped channel regions of 3-D IC transistors Grant 9,997,357 - Arghavani , et al. June 12, 2	2018-06-12
ALE smoothness: in and outside semiconductor industry Grant 9,984,858 - Kanarik , et al. May 29, 2	2018-05-29
Atomic layer etching of tungsten for enhanced tungsten deposition fill Grant 9,972,504 - Lai , et al. May 15, 2	2018-05-15
Integrating Atomic Scale Processes: Ald (atomic Layer Deposition) And Ale (atomic Layer Etch) App 20180033635 - Kanarik; Keren Jacobs ; et al.	2018-02-01
Dry Plasma Etch Method To Pattern Mram Stack App 20180019387 - Tan; Samantha ; et al.	2018-01-18
Atomic layer etching for enhanced bottom-up feature fill Grant 9,837,312 - Tan , et al. December 5, 2	2017-12-05
Etching Substrates Using Ale And Selective Deposition App 20170316935 - Tan; Samantha ; et al.	2017-11-02
Integrating atomic scale processes: ALD (atomic layer deposition) and ALE (atomic layer etch) Grant 9,805,941 - Kanarik , et al. October 31, 2	2017-10-31
Dry plasma etch method to pattern MRAM stack Grant 9,806,252 - Tan , et al. October 31, 2	2017-10-31
Selective Self-aligned Patterning Of Silicon Germanium, Germanium And Type Iii/v Materials Using A Sulfur-containing Mask App 20170287724 - Peter; Daniel ; et al.	2017-10-05
System and Method for Cleaning Semiconductor Fabrication Equipment Parts App 20170232784 - Tan; Samantha	2017-08-17
Atomic Layer Etching 3d Structures: Si And Sige And Ge Smoothness On Horizontal And Vertical Surfaces App 20170229314 - Tan; Samantha ; et al.	2017-08-10
Directional Deposition On Patterned Structures App 20170178899 - Kabansky; Alexander ; et al.	2017-06-22
Integrating Atomic Scale Processes: Ald (atomic Layer Deposition) And Ale (atomic Layer Etch) App 20170117159 - Kanarik; Keren Jacobs ; et al.	2017-04-27
Ale Smoothness: In And Outside Semiconductor Industry App 20170069462 - Kanarik; Keren Jacobs ; et al.	2017-03-09
Atomic Layer Etching Of Tungsten And Other Metals App 20170053810 - Yang; Wenbing ; et al.	2017-02-23
Integrating atomic scale processes: ALD (atomic layer deposition) and ALE (atomic layer etch) Grant 9,576,811 - Kanarik , et al. February 21, 2	2017-02-21
Atomic Layer Etching Of Tungsten For Enhanced Tungsten Deposition Fill App 20170040214 - Lai; Chiukin Steven ; et al.	2017-02-09
Capped Ald Films For Doping Fin-shaped Channel Regions Of 3-d Ic Transistors App 20160379826 - Arghavani; Reza ; et al.	2016-12-29
ATOMIC LAYER ETCHING OF GaN AND OTHER III-V MATERIALS App 20160358782 - Yang; Wenbing ; et al.	2016-12-08
Dry Plasma Etch Method To Pattern Mram Stack App 20160308112 - Tan; Samantha ; et al.	2016-10-20
Integrated etch/clean for dielectric etch applications Grant 9,396,961 - Arghavani , et al. July 19, 2	2016-07-19
Integrating Atomic Scale Processes: Ald (atomic Layer Deposition) And Ale (atomic Layer Etch) App 20160203995 - Kanarik; Keren Jacobs ; et al.	2016-07-14
Integrated Etch/clean For Dielectric Etch Applications App 20160181117 - Arghavani; Reza ; et al.	2016-06-23
Capped Ald Films For Doping Fin-shaped Channel Regions Of 3-d Ic Transistors App 20150249013 - Arghavani; Reza ; et al.	2015-09-03
System and Method for Cleaning Semiconductor Fabrication Equipment Parts App 20140190937 - Tan; Samantha	2014-07-10
Methods and Apparatus for Ex Situ Seasoning of Electronic Device Manufacturing Process Components App 20130299464 - Wang; Jiansheng ; et al.	2013-11-14
Methods and apparatus for ex situ seasoning of electronic device manufacturing process components Grant 8,492,674 - Wang , et al. July 23, 2	2013-07-23
System and Method for Cleaning Semiconductor Fabrication Equipment Parts App 20120211468 - Tan; Samantha	2012-08-23
Lavacoat Pre-clean And Pre-heat App 20100108641 - West; Brian T. ; et al.	2010-05-06
Methods And Apparatus For Ex Situ Seasoning Of Electronic Device Manufacturing Process Components App 20090043416 - Wang; Jiansheng ; et al.	2009-02-12
Ultrasonic assisted etch using corrosive liquids Grant 7,377,991 - Tan , et al. May 27, 2	2008-05-27
Ultrasonic assisted etch using corrosive liquids App 20060243390 - Tan; Samantha ; et al.	2006-11-02
System and method for cleaning semiconductor fabrication equipment parts App 20060180180 - Tan; Samantha	2006-08-17
Ultrasonic assisted etch using corrosive liquids Grant 7,091,132 - Tan , et al. August 15, 2	2006-08-15
System and method for cleaning semiconductor fabrication equipment parts App 20050085400 - Tan, Samantha	2005-04-21
System and method for cleaning semicondutor fabrication equipment parts App 20050045209 - Tan, Samantha	2005-03-03
Ultrasonic assisted etch using corrosive liquids App 20050016959 - Tan, Samantha ; et al.	2005-01-27
Method for cleaning semiconductor fabrication equipment parts Grant 6,810,887 - Tan November 2, 2	2004-11-02
System and method for cleaning semiconductor fabrication equipment parts App 20040045574 - Tan, Samantha	2004-03-11
Cleaning of semiconductor process equipment chamber parts using organic solvents Grant 6,607,605 - Tan August 19, 2	2003-08-19
Cleaning of semiconductor process equipment chamber parts using organic solvents App 20020066466 - Tan, Samantha	2002-06-06

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