Patent | Date |
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Atomic layer etching and smoothing of refractory metals and other high surface binding energy materials Grant 11,450,513 - Yang , et al. September 20, 2 | 2022-09-20 |
Eliminating yield impact of stochastics in lithography Grant 11,257,674 - Shamma , et al. February 22, 2 | 2022-02-22 |
Atomic Layer Etching Of Tungsten For Enhanced Tungsten Deposition Fill App 20210305059 - Lai; Chiukin Steven ;   et al. | 2021-09-30 |
Atomic layer etch of tungsten for enhanced tungsten deposition fill Grant 11,069,535 - Lai , et al. July 20, 2 | 2021-07-20 |
Metal doped carbon based hard mask removal in semiconductor fabrication Grant 11,062,897 - Yu , et al. July 13, 2 | 2021-07-13 |
Capped ALD films for doping fin-shaped channel regions of 3-D IC transistors Grant 11,011,379 - Arghavani , et al. May 18, 2 | 2021-05-18 |
Selective Processing With Etch Residue-based Inhibitors App 20210098257 - Sharma; Kashish ;   et al. | 2021-04-01 |
Atomic Layer Etching And Smoothing Of Refractory Metals And Other High Surface Binding Energy Materials App 20210005425 - Yang; Wenbing ;   et al. | 2021-01-07 |
Eliminating Yield Impact Of Stochastics In Lithography App 20200402801 - Shamma; Nader ;   et al. | 2020-12-24 |
Directional deposition on patterned structures Grant 10,825,680 - Kabansky , et al. November 3, 2 | 2020-11-03 |
Eliminating yield impact of stochastics in lithography Grant 10,796,912 - Shamma , et al. October 6, 2 | 2020-10-06 |
Atomic Layer Etch Of Tungsten For Enhanced Tungsten Deposition Fill App 20200286743 - Lai; Chiukin Steven ;   et al. | 2020-09-10 |
High energy atomic layer etching Grant 10,763,083 - Yang , et al. Sep | 2020-09-01 |
Dry plasma etch method to pattern MRAM stack Grant 10,749,103 - Tan , et al. A | 2020-08-18 |
Selective self-aligned patterning of silicon germanium, germanium and type III/V materials using a sulfur-containing mask Grant 10,741,405 - Peter , et al. A | 2020-08-11 |
Atomic layer etching 3D structures: Si and SiGe and Ge smoothness on horizontal and vertical surfaces Grant 10,727,073 - Tan , et al. | 2020-07-28 |
Etching substrates using ALE and selective deposition Grant 10,685,836 - Tan , et al. | 2020-06-16 |
Integrating Atomic Scale Processes: Ald (atomic Layer Deposition) And Ale (atomic Layer Etch) App 20200161139 - Kanarik; Keren Jacobs ;   et al. | 2020-05-21 |
Capped ALD films for doping fin-shaped channel regions of 3-D IC transistors Grant 10,559,468 - Arghavani , et al. Feb | 2020-02-11 |
Tin oxide films in semiconductor device manufacturing Grant 10,546,748 - Yu , et al. Ja | 2020-01-28 |
Capped Ald Films For Doping Fin-shaped Channel Regions Of 3-d Ic Transistors App 20190385850 - Arghavani; Reza ;   et al. | 2019-12-19 |
Dry Plasma Etch Method To Pattern Mram Stack App 20190312194 - Tan; Samantha ;   et al. | 2019-10-10 |
Etching Substrates Using Ale And Selective Deposition App 20190244805 - Tan; Samantha ;   et al. | 2019-08-08 |
Dry plasma etch method to pattern MRAM stack Grant 10,374,144 - Tan , et al. | 2019-08-06 |
Ale smoothness: in and outside semiconductor industry Grant 10,304,659 - Kanarik , et al. | 2019-05-28 |
Etching substrates using ale and selective deposition Grant 10,269,566 - Tan , et al. | 2019-04-23 |
High Energy Atomic Layer Etching App 20190108982 - Yang; Wenbing ;   et al. | 2019-04-11 |
Integrating atomic scale processes: ALD (atomic layer deposition) and ale (atomic layer etch) Grant 10,186,426 - Kanarik , et al. Ja | 2019-01-22 |
Metal Doped Carbon Based Hard Mask Removal In Semiconductor Fabrication App 20180358220 - Yu; Yongsik ;   et al. | 2018-12-13 |
Selective Self-aligned Patterning Of Silicon Germanium, Germanium And Type Iii/v Materials Using A Sulfur-containing Mask App 20180342399 - Peter; Daniel ;   et al. | 2018-11-29 |
Eliminating Yield Impact Of Stochastics In Lithography App 20180337046 - Shamma; Nader ;   et al. | 2018-11-22 |
Methods for wet metal seed deposition for bottom up gapfill of features Grant 10,103,056 - Tan , et al. October 16, 2 | 2018-10-16 |
Atomic layer etching of tungsten and other metals Grant 10,096,487 - Yang , et al. October 9, 2 | 2018-10-09 |
Capped Ald Films For Doping Fin-shaped Channel Regions Of 3-d Ic Transistors App 20180269061 - Arghavani; Reza ;   et al. | 2018-09-20 |
Methods For Wet Metal Seed Deposition For Bottom Up Gapfill Of Features App 20180261502 - Tan; Samantha ;   et al. | 2018-09-13 |
Tin Oxide Films In Semiconductor Device Manufacturing App 20180240667 - Yu; Jengyi ;   et al. | 2018-08-23 |
Atomic Layer Etch Of Tungsten For Enhanced Tungsten Deposition Fill App 20180240682 - Lai; Chiukin Steven ;   et al. | 2018-08-23 |
Atomic layer etching of GaN and other III-V materials Grant 10,056,264 - Yang , et al. August 21, 2 | 2018-08-21 |
Directional Deposition On Patterned Structures App 20180233357 - Kabansky; Alexander ;   et al. | 2018-08-16 |
Ale Smoothness: In And Outside Semiconductor Industry App 20180233325 - Kanarik; Keren Jacobs ;   et al. | 2018-08-16 |
Selective self-aligned patterning of silicon germanium, germanium and type III/V materials using a sulfur-containing mask Grant 10,043,672 - Peter , et al. August 7, 2 | 2018-08-07 |
Capped ALD films for doping fin-shaped channel regions of 3-D IC transistors Grant 9,997,357 - Arghavani , et al. June 12, 2 | 2018-06-12 |
ALE smoothness: in and outside semiconductor industry Grant 9,984,858 - Kanarik , et al. May 29, 2 | 2018-05-29 |
Atomic layer etching of tungsten for enhanced tungsten deposition fill Grant 9,972,504 - Lai , et al. May 15, 2 | 2018-05-15 |
Integrating Atomic Scale Processes: Ald (atomic Layer Deposition) And Ale (atomic Layer Etch) App 20180033635 - Kanarik; Keren Jacobs ;   et al. | 2018-02-01 |
Dry Plasma Etch Method To Pattern Mram Stack App 20180019387 - Tan; Samantha ;   et al. | 2018-01-18 |
Atomic layer etching for enhanced bottom-up feature fill Grant 9,837,312 - Tan , et al. December 5, 2 | 2017-12-05 |
Etching Substrates Using Ale And Selective Deposition App 20170316935 - Tan; Samantha ;   et al. | 2017-11-02 |
Integrating atomic scale processes: ALD (atomic layer deposition) and ALE (atomic layer etch) Grant 9,805,941 - Kanarik , et al. October 31, 2 | 2017-10-31 |
Dry plasma etch method to pattern MRAM stack Grant 9,806,252 - Tan , et al. October 31, 2 | 2017-10-31 |
Selective Self-aligned Patterning Of Silicon Germanium, Germanium And Type Iii/v Materials Using A Sulfur-containing Mask App 20170287724 - Peter; Daniel ;   et al. | 2017-10-05 |
System and Method for Cleaning Semiconductor Fabrication Equipment Parts App 20170232784 - Tan; Samantha | 2017-08-17 |
Atomic Layer Etching 3d Structures: Si And Sige And Ge Smoothness On Horizontal And Vertical Surfaces App 20170229314 - Tan; Samantha ;   et al. | 2017-08-10 |
Directional Deposition On Patterned Structures App 20170178899 - Kabansky; Alexander ;   et al. | 2017-06-22 |
Integrating Atomic Scale Processes: Ald (atomic Layer Deposition) And Ale (atomic Layer Etch) App 20170117159 - Kanarik; Keren Jacobs ;   et al. | 2017-04-27 |
Ale Smoothness: In And Outside Semiconductor Industry App 20170069462 - Kanarik; Keren Jacobs ;   et al. | 2017-03-09 |
Atomic Layer Etching Of Tungsten And Other Metals App 20170053810 - Yang; Wenbing ;   et al. | 2017-02-23 |
Integrating atomic scale processes: ALD (atomic layer deposition) and ALE (atomic layer etch) Grant 9,576,811 - Kanarik , et al. February 21, 2 | 2017-02-21 |
Atomic Layer Etching Of Tungsten For Enhanced Tungsten Deposition Fill App 20170040214 - Lai; Chiukin Steven ;   et al. | 2017-02-09 |
Capped Ald Films For Doping Fin-shaped Channel Regions Of 3-d Ic Transistors App 20160379826 - Arghavani; Reza ;   et al. | 2016-12-29 |
ATOMIC LAYER ETCHING OF GaN AND OTHER III-V MATERIALS App 20160358782 - Yang; Wenbing ;   et al. | 2016-12-08 |
Dry Plasma Etch Method To Pattern Mram Stack App 20160308112 - Tan; Samantha ;   et al. | 2016-10-20 |
Integrated etch/clean for dielectric etch applications Grant 9,396,961 - Arghavani , et al. July 19, 2 | 2016-07-19 |
Integrating Atomic Scale Processes: Ald (atomic Layer Deposition) And Ale (atomic Layer Etch) App 20160203995 - Kanarik; Keren Jacobs ;   et al. | 2016-07-14 |
Integrated Etch/clean For Dielectric Etch Applications App 20160181117 - Arghavani; Reza ;   et al. | 2016-06-23 |
Capped Ald Films For Doping Fin-shaped Channel Regions Of 3-d Ic Transistors App 20150249013 - Arghavani; Reza ;   et al. | 2015-09-03 |
System and Method for Cleaning Semiconductor Fabrication Equipment Parts App 20140190937 - Tan; Samantha | 2014-07-10 |
Methods and Apparatus for Ex Situ Seasoning of Electronic Device Manufacturing Process Components App 20130299464 - Wang; Jiansheng ;   et al. | 2013-11-14 |
Methods and apparatus for ex situ seasoning of electronic device manufacturing process components Grant 8,492,674 - Wang , et al. July 23, 2 | 2013-07-23 |
System and Method for Cleaning Semiconductor Fabrication Equipment Parts App 20120211468 - Tan; Samantha | 2012-08-23 |
Lavacoat Pre-clean And Pre-heat App 20100108641 - West; Brian T. ;   et al. | 2010-05-06 |
Methods And Apparatus For Ex Situ Seasoning Of Electronic Device Manufacturing Process Components App 20090043416 - Wang; Jiansheng ;   et al. | 2009-02-12 |
Ultrasonic assisted etch using corrosive liquids Grant 7,377,991 - Tan , et al. May 27, 2 | 2008-05-27 |
Ultrasonic assisted etch using corrosive liquids App 20060243390 - Tan; Samantha ;   et al. | 2006-11-02 |
System and method for cleaning semiconductor fabrication equipment parts App 20060180180 - Tan; Samantha | 2006-08-17 |
Ultrasonic assisted etch using corrosive liquids Grant 7,091,132 - Tan , et al. August 15, 2 | 2006-08-15 |
System and method for cleaning semiconductor fabrication equipment parts App 20050085400 - Tan, Samantha | 2005-04-21 |
System and method for cleaning semicondutor fabrication equipment parts App 20050045209 - Tan, Samantha | 2005-03-03 |
Ultrasonic assisted etch using corrosive liquids App 20050016959 - Tan, Samantha ;   et al. | 2005-01-27 |
Method for cleaning semiconductor fabrication equipment parts Grant 6,810,887 - Tan November 2, 2 | 2004-11-02 |
System and method for cleaning semiconductor fabrication equipment parts App 20040045574 - Tan, Samantha | 2004-03-11 |
Cleaning of semiconductor process equipment chamber parts using organic solvents Grant 6,607,605 - Tan August 19, 2 | 2003-08-19 |
Cleaning of semiconductor process equipment chamber parts using organic solvents App 20020066466 - Tan, Samantha | 2002-06-06 |