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Patent applications and USPTO patent grants for Tan; Leng Seow.The latest application filed is for "dual step source/drain extension junction anneal to reduce the junction depth: multiple-pulse low energy laser anneal coupled with rapid thermal anneal".
Patent | Date |
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Dual step source/drain extension junction anneal to reduce the junction depth: multiple-pulse low energy laser anneal coupled with rapid thermal anneal Grant 7,112,499 - Poon , et al. September 26, 2 | 2006-09-26 |
Dual step source/drain extension junction anneal to reduce the junction depth: multiple-pulse low energy laser anneal coupled with rapid thermal anneal App 20050158956 - Poon, Chyiu Hyia ;   et al. | 2005-07-21 |
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