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Plasma Processing Apparatus App 20220139678 - Ishiguro; Masaki ;   et al. | 2022-05-05 |
Plasma processing apparatus and plasma processing method Grant 11,315,792 - Ishiguro , et al. April 26, 2 | 2022-04-26 |
Plasma processing apparatus Grant 11,257,661 - Ishiguro , et al. February 22, 2 | 2022-02-22 |
Method For Releasing Sample And Plasma Processing Apparatus Using Same App 20210358758 - ISHIGURO; Masaki ;   et al. | 2021-11-18 |
Method for releasing sample and plasma processing apparatus using same Grant 11,107,694 - Ishiguro , et al. August 31, 2 | 2021-08-31 |
Plasma Processing Apparatus And Inner Component Of Plasma Processing Apparatus And Manufacturing Method Of Inner Component Of Plasma Processing Apparatus App 20210241998 - TAMURA; Tomoyuki ;   et al. | 2021-08-05 |
Method For Releasing Sample And Plasma Processing Apparatus Using Same App 20200058511 - ISHIGURO; Masaki ;   et al. | 2020-02-20 |
Method for releasing sample and plasma processing apparatus using same Grant 10,490,412 - Ishiguro , et al. Nov | 2019-11-26 |
Plasma Processing Apparatus And Plasma Processing Method App 20190333772 - ISHIGURO; Masaki ;   et al. | 2019-10-31 |
Plasma Processing Apparatus And Member Of Plasma Processing Chamber App 20190326101 - UEDA; Kazuhiro ;   et al. | 2019-10-24 |
Plasma processing apparatus and plasma processing method Grant 10,395,935 - Ishiguro , et al. A | 2019-08-27 |
Plasma Processing Apparatus And Plasma Processing Method App 20180190502 - ISHIGURO; Masaki ;   et al. | 2018-07-05 |
Plasma processing apparatus and plasma processing method Grant 9,941,133 - Ishiguro , et al. April 10, 2 | 2018-04-10 |
Method For Releasing Sample And Plasma Processing Apparatus Using Same App 20170194157 - ISHIGURO; Masaki ;   et al. | 2017-07-06 |
Plasma processing apparatus Grant 9,607,874 - Kobayashi , et al. March 28, 2 | 2017-03-28 |
Plasma Processing Apparatus And Plasma Processing Method App 20160336185 - ISHIGURO; Masaki ;   et al. | 2016-11-17 |
Method of manufacturing imaging device Grant 9,437,651 - Naruse , et al. September 6, 2 | 2016-09-06 |
Plasma Processing Apparatus App 20160079043 - KOBAYASHI; Hiroyuki ;   et al. | 2016-03-17 |
Plasma Processing Apparatus App 20160027615 - ISHIGURO; Masaki ;   et al. | 2016-01-28 |
Method Of Manufacturing Imaging Device App 20150155329 - Naruse; Hiroaki ;   et al. | 2015-06-04 |
Plasma processing apparatus and plasma processing method Grant 8,569,177 - Ohashi , et al. October 29, 2 | 2013-10-29 |
Light emitting substrate having photonic crystal structure and image display apparatus including the same Grant 8,564,191 - Ikegami , et al. October 22, 2 | 2013-10-22 |
Plasma Processing Apparatus And Plasma Processing Method App 20130189800 - OHASHI; Tomohiro ;   et al. | 2013-07-25 |
Rectifier and process for producing the rectifier Grant 8,487,415 - Shima , et al. July 16, 2 | 2013-07-16 |
Extrusion Molding Die, Extrusion Molding Apparatus, Medical Tube, And Method For Producing Medical Tube App 20120187595 - Ohigawa; Atsushi ;   et al. | 2012-07-26 |
Plasma processing apparatus Grant 8,186,300 - Ichino , et al. May 29, 2 | 2012-05-29 |
Plasma processing method and plasma processing device Grant 8,163,652 - Maeda , et al. April 24, 2 | 2012-04-24 |
Light Emitting Substrate And Image Display Apparatus Including The Same App 20110304265 - Ikegami; Tomoyuki ;   et al. | 2011-12-15 |
Method For Adhering Light-transmissive Substrates And Method For Producing Display App 20110130065 - Andoh; Tomokazu ;   et al. | 2011-06-02 |
Plasma Processing Apparatus And Plasma Processing Method App 20100326957 - Maeda; Kenji ;   et al. | 2010-12-30 |
Plasma Processing Apparatus App 20100319854 - YOKOGAWA; Kenetsu ;   et al. | 2010-12-23 |
Rectifier and Process for Producing the Rectifier App 20100276684 - Shima; Hisashi ;   et al. | 2010-11-04 |
Light-emitting device comprising protective layer with irregular surface Grant 7,791,272 - Tamura , et al. September 7, 2 | 2010-09-07 |
Plasma processing apparatus Grant 7,767,054 - Kobayashi , et al. August 3, 2 | 2010-08-03 |
Plasma Processing Apparatus App 20100163184 - ICHINO; Takamasa ;   et al. | 2010-07-01 |
Plasma Processing Apparatus And Control Method For Plasma Processing Apparatus App 20090283502 - OBAMA; Shinji ;   et al. | 2009-11-19 |
Radiation detecting apparatus, manufacturing method thereof, scintillator panel and radiation detecting system Grant 7,595,493 - Okada , et al. September 29, 2 | 2009-09-29 |
Radiation detecting apparatus, scintillator panel, their manufacturing method and radiation detecting system Grant 7,514,686 - Ogawa , et al. April 7, 2 | 2009-04-07 |
Processing Method And Plasma Processing Device App 20090004871 - MAEDA; Kenji ;   et al. | 2009-01-01 |
Plasma processing method and plasma processing device Grant 7,435,687 - Maeda , et al. October 14, 2 | 2008-10-14 |
Radiation detecting apparatus, producing method therefor and radiation image pickup system Grant 7,391,029 - Takeda , et al. June 24, 2 | 2008-06-24 |
Radiation detection device, scintillator panel, method of making the same, making apparatus, and radiation image pick-up system Grant 7,315,027 - Okada , et al. January 1, 2 | 2008-01-01 |
Radiation Detecting Apparatus, Scintillator Panel, Their Manufacturing Method and Radiation Detecting System App 20070257198 - Ogawa; Yoshihiro ;   et al. | 2007-11-08 |
Radiation detecting apparatus, scintillator panel, and radiographing system Grant 7,256,404 - Inoue , et al. August 14, 2 | 2007-08-14 |
Light-emitting Device App 20070145889 - TAMURA; TOMOYUKI ;   et al. | 2007-06-28 |
Plasma processing method and plasma processing device App 20070056928 - Maeda; Kenji ;   et al. | 2007-03-15 |
Radiation detection device, scintillator panel, method of making the same, making apparatus, and radiation image pick-up system App 20070051896 - Okada; Satoshi ;   et al. | 2007-03-08 |
Plasma etching apparatus and particle removal method App 20070020941 - Tamura; Tomoyuki ;   et al. | 2007-01-25 |
Plasma processing apparatus App 20060254717 - Kobayashi; Hiroyuki ;   et al. | 2006-11-16 |
Radiation detecting device and method of manufacturing the same Grant 7,105,830 - Nagano , et al. September 12, 2 | 2006-09-12 |
Semiconductor manufacturing apparatus capable of preventing adhesion of particles App 20060169207 - Kobayashi; Hiroyuki ;   et al. | 2006-08-03 |
Plasma processing apparatus, protecting layer therefor and installation of protecting layer Grant 7,052,731 - Koroyasu , et al. May 30, 2 | 2006-05-30 |
Radiation detecting apparatus, producing method therefor and radiation image pickup system App 20060033031 - Takeda; Shinichi ;   et al. | 2006-02-16 |
Radiation detecting apparatus, manufacturing method thereof, scintillator panel and radiation detecting system App 20060033040 - Okada; Satoshi ;   et al. | 2006-02-16 |
Radiation detecting apparatus, scintillator panel, and radiographing system App 20060033032 - Inoue; Masato ;   et al. | 2006-02-16 |
Plasma etching method Grant 6,914,005 - Furuse , et al. July 5, 2 | 2005-07-05 |
Plasma processing method App 20050126712 - Sumiya, Masahiro ;   et al. | 2005-06-16 |
Plasma processing apparatus, protecting layer therefor and installation of protecting layer App 20050045107 - Koroyasu, Kunihiko ;   et al. | 2005-03-03 |
Radiation detecting device and method of manufacturing the same App 20040178350 - Nagano, Kazumi ;   et al. | 2004-09-16 |
Plasma processing apparatus and plasma processing method App 20040050495 - Sumiya, Masahiro ;   et al. | 2004-03-18 |
Plasma etching method App 20030166343 - Furuse, Muneo ;   et al. | 2003-09-04 |
Plasma processing apparatus, protecting layer therefor and installation of protecting layer App 20030159778 - Koroyasu, Kunihiko ;   et al. | 2003-08-28 |
Plasma processing apparatus and plasma processing method Grant 6,506,686 - Masuda , et al. January 14, 2 | 2003-01-14 |
Method of plasma etching App 20020011464 - Nawata, Makoto ;   et al. | 2002-01-31 |
Plasma etching system App 20010050147 - Nawata, Makoto ;   et al. | 2001-12-13 |
Plasma processing apparatus and plasma processing method App 20010018951 - Masuda, Toshio ;   et al. | 2001-09-06 |
Optical recording medium and process for production thereof Grant 5,978,348 - Tamura November 2, 1 | 1999-11-02 |
Mold for molding of substrate for information recording medium Grant 5,344,304 - Tamura , et al. September 6, 1 | 1994-09-06 |
Cast molding die and process for producing information recording medium using the same Grant 5,234,633 - Imataki , et al. August 10, 1 | 1993-08-10 |
Method for molding of substrate for information recording medium and method for preparing substrate for information recording medium Grant 5,174,937 - Tamura , et al. December 29, 1 | 1992-12-29 |
Molding processing using a reproducible molding die Grant 4,876,042 - Imataki , et al. October 24, 1 | 1989-10-24 |