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Production method for anneal wafer and anneal wafer App 20040192071 - Kobayashi, Norihiro ;   et al. | 2004-09-30 |
Method for manufacturing silicon wafer App 20040023518 - Kobayashi, Norihiro ;   et al. | 2004-02-05 |
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Method of producing silicon wafer and silicon wafer App 20040003769 - Tamatsuka, Masaro ;   et al. | 2004-01-08 |
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Silicon boat with protective film, method of manufacture thereof, and silicon wafer heat-treated using silicon boat App 20030196588 - Kobayashi, Norihiro ;   et al. | 2003-10-23 |
Silicon wafer for epitaxial wafer, epitaxial wafer, and method of manufacture thereof Grant 6,626,994 - Kimura , et al. September 30, 2 | 2003-09-30 |
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