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Patent applications and USPTO patent grants for Tamar Technology, Inc..The latest application filed is for "trench measurement system employing a chromatic confocal height sensor and a microscope".
Patent | Date |
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Wafer measurement system and apparatus Grant 7,738,113 - Marx , et al. June 15, 2 | 2010-06-15 |
Trench measurement system employing a chromatic confocal height sensor and a microscope Grant 7,477,401 - Marx , et al. January 13, 2 | 2009-01-13 |
Trench measurement system employing a chromatic confocal height sensor and a microscope App 20060109483 - Marx; David S. ;   et al. | 2006-05-25 |
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