Tamagawa; Koki
Patent Applications and Registrations
Patent applications and USPTO patent grants for Tamagawa; Koki.The latest application filed is for "tray and wafer holding apparatus".
- Tamagawa; Koki - Nagano JP
- Tamagawa; Koki - Nagano-shi JP
- Tamagawa; Koki - Aizuwakamatsu JP
| Patent | Date |
|---|---|
| Tray and wafer holding apparatus Grant 9,837,297 - Tamagawa , et al. December 5, 2 | 2017-12-05 |
| Electrostatic chuck apparatus Grant 9,252,039 - Shiraiwa , et al. February 2, 2 | 2016-02-02 |
| Tray And Wafer Holding Apparatus App 20150371885 - TAMAGAWA; Koki ; et al. | 2015-12-24 |
| Dielectric layer for electrostatic chuck and electrostatic chuck Grant 9,120,704 - Tsutsumi , et al. September 1, 2 | 2015-09-01 |
| Electrostatic Chuck Apparatus App 20140254061 - SHIRAIWA; Norio ; et al. | 2014-09-11 |
| Dielectric Layer For Electrostatic Chuck And Electrostatic Chuck App 20140103612 - Tsutsumi; Kouta ; et al. | 2014-04-17 |
| Substrate, substrate holding apparatus, analysis apparatus, program, detection system, semiconductor device, display apparatus, and semiconductor manufacturing apparatus Grant 8,686,743 - Furumura , et al. April 1, 2 | 2014-04-01 |
| Substrate temperature regulation fixed apparatus Grant 8,641,825 - Yonekura , et al. February 4, 2 | 2014-02-04 |
| Substrate temperature control fixing apparatus Grant 8,505,928 - Saito , et al. August 13, 2 | 2013-08-13 |
| Substrate for electrostatic chuck and electrostatic chuck Grant 8,441,772 - Yoshikawa , et al. May 14, 2 | 2013-05-14 |
| Electrostatic chuck and substrate temperature adjusting-fixing device Grant 8,199,454 - Koyama , et al. June 12, 2 | 2012-06-12 |
| Electrostatic chuck and substrate temperature control fixing apparatus Grant 8,068,326 - Koyama , et al. November 29, 2 | 2011-11-29 |
| Electrostatic chuck Grant 8,023,248 - Yonekura , et al. September 20, 2 | 2011-09-20 |
| Substrate For Electrostatic Chuck And Electrostatic Chuck App 20110096461 - YOSHIKAWA; Tadayoshi ; et al. | 2011-04-28 |
| Electrostatic Chuck App 20100220425 - Yonekura; Hiroshi ; et al. | 2010-09-02 |
| Substrate Temperature Control Fixing Apparatus App 20100156055 - Saito; Miki ; et al. | 2010-06-24 |
| Substrate, substrate holding apparatus, analysis apparatus, program, detection system, semiconductor device, display apparatus, and semiconductor manufacturing apparatus App 20100134122 - Furumura; Yuji ; et al. | 2010-06-03 |
| Substrate Temperature Regulation Fixed Apparatus App 20090308538 - YONEKURA; Hiroshi ; et al. | 2009-12-17 |
| Electrostatic Chuck And Substrate Temperature Control Fixing Apparatus App 20090310274 - Koyama; Tomoaki ; et al. | 2009-12-17 |
| Electrostatic Chuck And Substrate Temperature Adjusting-fixing Device App 20090168291 - Koyama; Tomoaki ; et al. | 2009-07-02 |
| Substrate Temperature Adjusting-fixing Devices App 20090159590 - Yonekura; Hiroshi ; et al. | 2009-06-25 |
| Substrate heating device App 20080110874 - Hayashi; Naoto ; et al. | 2008-05-15 |
| Electrostatic chuck App 20080037196 - Yonekura; Hiroshi ; et al. | 2008-02-14 |
| Electrostatic chuck and method of attracting wafer Grant 5,777,838 - Tamagawa , et al. July 7, 1 | 1998-07-07 |
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