TAM; Norman L.
Patent Applications and Registrations
Patent applications and USPTO patent grants for TAM; Norman L..The latest application filed is for "apparatus, methods, and systems of using hydrogen radicals for thermal annealing".
- TAM; Norman L. - Cupertino CA
- Tam; Norman L. - San Jose CA
| Patent | Date |
|---|---|
| Apparatus, Methods, And Systems Of Using Hydrogen Radicals For Thermal Annealing App 20220251708 - ZHANG; Xinming ; et al. | 2022-08-11 |
| Plasma-enhanced anneal chamber for wafer outgassing Grant 11,348,769 - Hawrylchak , et al. May 31, 2 | 2022-05-31 |
| Treatment methods for titanium nitride films App 20220108914 - ZHANG; Xinming ; et al. | 2022-04-07 |
| System And Method For Radical And Thermal Processing Of Substrates App 20210280418 - ZHANG; Xinming ; et al. | 2021-09-09 |
| System And Method For Radical And Thermal Processing Of Substrates App 20210280428 - ZHANG; Xinming ; et al. | 2021-09-09 |
| Thermal processing chamber with low temperature control Grant 10,948,353 - Hawrylchak , et al. March 16, 2 | 2021-03-16 |
| Plasma-enhanced Anneal Chamber For Wafer Outgassing App 20200402780 - HAWRYLCHAK; Lara ; et al. | 2020-12-24 |
| Plasma-enhanced anneal chamber for wafer outgassing Grant 10,770,272 - Hawrylchak , et al. Sep | 2020-09-08 |
| Thermal Processing Chamber With Low Temperature Control App 20200149968 - HAWRYLCHAK; Lara ; et al. | 2020-05-14 |
| Thermal cooling member with low temperature control Grant 10,571,337 - Hawrylchak , et al. Feb | 2020-02-25 |
| Support ring with masked edge Grant 10,373,859 - Behdjat , et al. | 2019-08-06 |
| Thermal Processing Chamber With Low Temperature Control App 20180340832 - HAWRYLCHAK; Lara ; et al. | 2018-11-29 |
| Thermal Chamber With Improved Thermal Uniformity App 20180337075 - IU; Dongming ; et al. | 2018-11-22 |
| Support Ring With Masked Edge App 20180315639 - BEHDJAT; Mehran ; et al. | 2018-11-01 |
| Visual feedback for process control in RTP chambers Grant 10,109,514 - Vellore , et al. October 23, 2 | 2018-10-23 |
| Support ring with masked edge Grant 10,056,286 - Behdjat , et al. August 21, 2 | 2018-08-21 |
| Support Ring With Masked Edge App 20180102274 - BEHDJAT; Mehran ; et al. | 2018-04-12 |
| Support ring with masked edge Grant 9,842,759 - Behdjat , et al. December 12, 2 | 2017-12-12 |
| Visual Feedback For Process Control In Rtp Chambers App 20170345693 - VELLORE; Kim ; et al. | 2017-11-30 |
| Plasma-enhanced Anneal Chamber For Wafer Outgassing App 20170294292 - HAWRYLCHAK; Lara ; et al. | 2017-10-12 |
| Visual feedback for process control in RTP chambers Grant 9,735,034 - Vellore , et al. August 15, 2 | 2017-08-15 |
| Apparatus and method for improved control of heating and cooling of substrates Grant 9,552,989 - Koelmel , et al. January 24, 2 | 2017-01-24 |
| Apparatus For Decreasing Substrate Temperature Non-uniformity App 20160358789 - MILLER; Aaron ; et al. | 2016-12-08 |
| Apparatus for reducing the effect of contamination on a rapid thermal process Grant 9,514,969 - Miller , et al. December 6, 2 | 2016-12-06 |
| Support Ring With Masked Edge App 20160247708 - BEHDJAT; Mehran ; et al. | 2016-08-25 |
| Support ring with masked edge Grant 9,330,955 - Behdjat , et al. May 3, 2 | 2016-05-03 |
| Method of improving oxide growth rate of selective oxidation processes Grant 9,117,661 - Yokota , et al. August 25, 2 | 2015-08-25 |
| Support Ring With Masked Edge App 20150187630 - BEHDJAT; Mehran ; et al. | 2015-07-02 |
| Apparatus For Reducing The Effect Of Contamination On A Rapid Thermal Process App 20150155190 - MILLER; Aaron ; et al. | 2015-06-04 |
| Low Temperature Rtp Control Using Ir Camera App 20150131698 - VELLORE; Kim ; et al. | 2015-05-14 |
| Visual Feedback For Process Control In Rtp Chambers App 20150041453 - VELLORE; Kim ; et al. | 2015-02-12 |
| Thermal reactor with improved gas flow distribution Grant 8,888,916 - Tseng , et al. November 18, 2 | 2014-11-18 |
| Thermal Reactor With Improved Gas Flow Distribution App 20140079376 - TSENG; Ming-Kuei (Michael) ; et al. | 2014-03-20 |
| Method Of Improving Oxide Growth Rate Of Selective Oxidation Processes App 20140057455 - YOKOTA; Yoshitaka ; et al. | 2014-02-27 |
| Apparatus and Method for Improved Control of Heating and Cooling of Substrates App 20140004716 - Koelmel; Blake R. ; et al. | 2014-01-02 |
| Apparatus and method for improved control of heating and cooling of substrates Grant 8,548,311 - Koelmel , et al. October 1, 2 | 2013-10-01 |
| Apparatus and Method for Improved Control of Heating and Cooling of Substrates App 20100074604 - Koelmel; Blake R. ; et al. | 2010-03-25 |
uspto.report is an independent third-party trademark research tool that is not affiliated, endorsed, or sponsored by the United States Patent and Trademark Office (USPTO) or any other governmental organization. The information provided by uspto.report is based on publicly available data at the time of writing and is intended for informational purposes only.
While we strive to provide accurate and up-to-date information, we do not guarantee the accuracy, completeness, reliability, or suitability of the information displayed on this site. The use of this site is at your own risk. Any reliance you place on such information is therefore strictly at your own risk.
All official trademark data, including owner information, should be verified by visiting the official USPTO website at www.uspto.gov. This site is not intended to replace professional legal advice and should not be used as a substitute for consulting with a legal professional who is knowledgeable about trademark law.
| 