Tam; Norman
Patent Applications and Registrations
Patent applications and USPTO patent grants for Tam; Norman.The latest application filed is for "enhanced oxidation with hydrogen radical pretreatment".
- Tam; Norman - Cupertino CA
- Tam; Norman - San Jose CA US
- Tam; Norman - US
- Tam; Norman - Sunnyvale CA
| Patent | Date |
|---|---|
| Enhanced Oxidation With Hydrogen Radical Pretreatment App 20220298620 - Spuller; Matthew ; et al. | 2022-09-22 |
| Support cylinder for thermal processing chamber Grant 10,128,144 - Behdjat , et al. November 13, 2 | 2018-11-13 |
| Support Cylinder For Thermal Processing Cylinder App 20170263493 - BEHDJAT; Mehran ; et al. | 2017-09-14 |
| Support cylinder for thermal processing chamber Grant 9,659,809 - Behdjat , et al. May 23, 2 | 2017-05-23 |
| Support Cylinder For Thermal Processing Chamber App 20160300752 - BEHDJAT; Mehran ; et al. | 2016-10-13 |
| Support cylinder for thermal processing chamber Grant 9,385,004 - Behdjat , et al. July 5, 2 | 2016-07-05 |
| Support Cylinder For Thermal Processing Chamber App 20150050819 - BEHDJAT; Mehran ; et al. | 2015-02-19 |
| Thermal reactor with improved gas flow distribution Grant 8,608,853 - Tseng , et al. December 17, 2 | 2013-12-17 |
| Method of improving oxide growth rate of selective oxidation processes Grant 8,546,271 - Yokota , et al. October 1, 2 | 2013-10-01 |
| Methods for oxidation of a semiconductor device Grant 8,207,044 - Mani , et al. June 26, 2 | 2012-06-26 |
| Thermal Reactor With Improved Gas Flow Distribution App 20120058648 - Tseng; Ming-Kuei (Michael) ; et al. | 2012-03-08 |
| Thermal reactor with improved gas flow distribution Grant 8,056,500 - Tseng , et al. November 15, 2 | 2011-11-15 |
| Method Of Improving Oxide Growth Rate Of Selective Oxidation Processes App 20110230060 - Yokota; Yoshitaka ; et al. | 2011-09-22 |
| Methods For Oxidation Of A Semiconductor Device App 20110217850 - MANI; RAJESH ; et al. | 2011-09-08 |
| Method of improving oxide growth rate of selective oxidation processes Grant 7,951,728 - Yokota , et al. May 31, 2 | 2011-05-31 |
| Methods for oxidation of a semiconductor device Grant 7,947,561 - Mani , et al. May 24, 2 | 2011-05-24 |
| Methods For Oxidation Of A Semiconductor Device App 20090233453 - MANI; RAJESH ; et al. | 2009-09-17 |
| Thermal Reactor With Improved Gas Flow Distribution App 20090163042 - Tseng; Ming-Kuei (Michael) ; et al. | 2009-06-25 |
| Method Of Improving Oxide Growth Rate Of Selective Oxidation Processes App 20090081884 - YOKOTA; YOSHITAKA ; et al. | 2009-03-26 |
| Lamp array for thermal processing exhibiting improved radial uniformity Grant 7,509,035 - Ranish , et al. March 24, 2 | 2009-03-24 |
| Lamp array for thermal processing exhibiting improved radial uniformity App 20060066193 - Ranish; Joseph M. ; et al. | 2006-03-30 |
| RTP process chamber pressure control Grant 6,828,234 - Tam , et al. December 7, 2 | 2004-12-07 |
| RTP process chamber pressure control App 20030186554 - Tam, Norman ; et al. | 2003-10-02 |
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