| Patent | Date |
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Laser thermal annealing of lightly doped silicon substrates
Grant 7,879,741 - Talwar , et al. February 1, 2 | 2011-02-01 |
Laser thermal processing with laser diode radiation
Grant 7,763,828 - Talwar , et al. July 27, 2 | 2010-07-27 |
Heated chuck for laser thermal processing
Grant 7,731,798 - Shareef , et al. June 8, 2 | 2010-06-08 |
Laser thermal processing with laser diode radiation
App 20090095724 - Talwar; Somit ; et al. | 2009-04-16 |
Laser thermal annealing of lightly doped silicon substrates
Grant 7,494,942 - Talwar , et al. February 24, 2 | 2009-02-24 |
Method of thermal processing a substrate with direct and redirected reflected radiation
Grant 7,399,945 - Talwar , et al. July 15, 2 | 2008-07-15 |
Laser thermal processing chuck with a thermal compensating heater module
Grant 7,326,877 - Shareef , et al. February 5, 2 | 2008-02-05 |
Laser scanning apparatus and methods for thermal processing
App 20070051708 - Talwar; Somit ; et al. | 2007-03-08 |
Laser thermal processing chuck with a thermal compensating heater module
App 20070004232 - Shareef; Iqbal A. ; et al. | 2007-01-04 |
Laser scanning apparatus and methods for thermal processing
Grant 7,157,660 - Talwar , et al. January 2, 2 | 2007-01-02 |
Laser scanning apparatus and methods for thermal processing
Grant 7,154,066 - Talwar , et al. December 26, 2 | 2006-12-26 |
Laser thermal annealing of lightly doped silicon substrates
Grant 7,148,159 - Talwar , et al. December 12, 2 | 2006-12-12 |
Silicon layer for uniformizing temperature during photo-annealing
Grant 7,145,104 - Talwar , et al. December 5, 2 | 2006-12-05 |
Laser thermal annealing of lightly doped silicon substrates
App 20060252282 - Talwar; Somit ; et al. | 2006-11-09 |
Laser thermal annealing of lightly doped silicon substrates
App 20060246694 - Talwar; Somit ; et al. | 2006-11-02 |
Laser thermal annealing of lightly doped silicon substrates
Grant 7,098,155 - Talwar , et al. August 29, 2 | 2006-08-29 |
Heated chuck for laser thermal processing
App 20060113290 - Shareef; Iqbal A. ; et al. | 2006-06-01 |
Laser thermal processing with laser diode radiation
App 20050189329 - Talwar, Somit ; et al. | 2005-09-01 |
Silicon layer for uniformizing temperature during photo-annealing
App 20050189340 - Talwar, Somit ; et al. | 2005-09-01 |
Laser thermal annealing of lightly doped silicon substrates
App 20050103998 - Talwar, Somit ; et al. | 2005-05-19 |
Laser thermal annealing of lightly doped silicon substrates
App 20050067384 - Talwar, Somit ; et al. | 2005-03-31 |
Laser thermal processing with laser diode radiation
App 20050045604 - Talwar, Somit ; et al. | 2005-03-03 |
Methods for annealing a substrate and article produced by such methods
Grant 6,825,101 - Hawryluk , et al. November 30, 2 | 2004-11-30 |
Laser scanning apparatus and methods for thermal processing
App 20040188396 - Talwar, Somit ; et al. | 2004-09-30 |
Laser scanning apparatus and methods for thermal processing
App 20040173585 - Talwar, Somit ; et al. | 2004-09-09 |
Method for semiconductor gate doping
Grant 6,777,317 - Seibel , et al. August 17, 2 | 2004-08-17 |
Laser scanning apparatus and methods for thermal processing
Grant 6,747,245 - Talwar , et al. June 8, 2 | 2004-06-08 |
Laser Scanning Apparatus And Methods For Thermal Processing
App 20040084427 - Talwar, Somit ; et al. | 2004-05-06 |
Selective absorption process for forming an activated doped region in a semiconductor
Grant 6,645,838 - Talwar , et al. November 11, 2 | 2003-11-11 |
Method for annealing using partial absorber layer exposed to radiant energy and article made with partial absorber layer
Grant 6,635,541 - Talwar , et al. October 21, 2 | 2003-10-21 |
Method for laser thermal processing using thermally induced reflectivity switch
Grant 6,635,588 - Hawryluk , et al. October 21, 2 | 2003-10-21 |
Illumination fluence regulation system and method for use in thermal processing employed in the fabrication of reduced-dimension integrated circuits
Grant 6,570,656 - Owens, Jr. , et al. May 27, 2 | 2003-05-27 |
Method for semiconductor gate doping
App 20030045074 - Seibel, Cindy ; et al. | 2003-03-06 |
Thermally induced reflectivity switch for laser thermal processing
Grant 6,495,390 - Hawryluk , et al. December 17, 2 | 2002-12-17 |
Thermally induced phase switch for laser thermal processing
Grant 6,479,821 - Hawryluk , et al. November 12, 2 | 2002-11-12 |
Method for forming a silicide region on a silicon body
Grant 6,387,803 - Talwar , et al. May 14, 2 | 2002-05-14 |
High-speed semiconductor transistor and selective absorption process forming same
Grant 6,380,044 - Talwar , et al. April 30, 2 | 2002-04-30 |
Laser thermal process for fabricating field-effect transistors
Grant 6,365,476 - Talwar , et al. April 2, 2 | 2002-04-02 |
Thermally induced reflectivity switch for laser thermal processing
App 20020022294 - Hawryluk, Andrew M. ; et al. | 2002-02-21 |
Thermally induced reflectivity switch for laser thermal processing
App 20020019148 - Hawryluk, Andrew M. ; et al. | 2002-02-14 |
Methods For Determining Wavelength And Pulse Length Of Radiant Energy Used For Annealing
App 20010039063 - MARKLE, DAVID A. ; et al. | 2001-11-08 |
Methods for annealing an integrated device using a radiant energy absorber layer
Grant 6,300,208 - Talwar , et al. October 9, 2 | 2001-10-09 |
Method for forming silicide regions on an integrated device
Grant 6,297,135 - Talwar , et al. October 2, 2 | 2001-10-02 |
Method of forming a silicide region in a Si substrate and a device having same
Grant 6,274,488 - Talwar , et al. August 14, 2 | 2001-08-14 |
Method For Forming A Silicide Region On A Silicon Body
App 20010012693 - TALWAR, SOMIT ; et al. | 2001-08-09 |
Gas immersion laser annealing method suitable for use in the fabrication of reduced-dimension integrated circuits
Grant 5,956,603 - Talwar , et al. September 21, 1 | 1999-09-21 |
Fabrication method for reduced-dimension FET devices
Grant 5,908,307 - Talwar , et al. June 1, 1 | 1999-06-01 |
Method for forming a silicide region on a silicon body
Grant 5,888,888 - Talwar , et al. March 30, 1 | 1999-03-30 |
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