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Controlling an intensity profile of an energy beam in additive manufacturing based on travel direction or velocity Grant 10,421,125 - Ng , et al. Sept | 2019-09-24 |
Controlling an intensity profile of an energy beam with a deformable mirror in additive manufacturing Grant 10,307,822 - Ng , et al. | 2019-06-04 |
Extreme ultraviolet (EUV) substrate inspection system with simplified optics and method of manufacturing thereof Grant 9,915,621 - Foad , et al. March 13, 2 | 2018-03-13 |
Controlling An Intensity Profile Of An Energy Beam In Additive Manufacturing Based On Travel Direction Or Velocity App 20180029127 - Ng; Hou T. ;   et al. | 2018-02-01 |
Controlling An Intensity Profile Of An Energy Beam With A Deformable Mirror In Additive Manufacturing App 20180029126 - Ng; Hou T. ;   et al. | 2018-02-01 |
Extreme Ultraviolet (euv) Substrate Inspection System With Simplified Optics And Method Of Manufacturing Thereof App 20160282280 - Foad; Majeed A. ;   et al. | 2016-09-29 |
Contact Opening Metrology App 20070257191 - Kadyshevitch; Alexander ;   et al. | 2007-11-08 |
Detection of defects in patterned substrates Grant 7,253,645 - Talbot , et al. August 7, 2 | 2007-08-07 |
Contact opening metrology App 20060113471 - Kadyshevitch; Alexander ;   et al. | 2006-06-01 |
Detection of defects in patterned substrates App 20050200841 - Talbot, Christopher G. ;   et al. | 2005-09-15 |
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Feature-based defect detection Grant 6,539,106 - Gallarda , et al. March 25, 2 | 2003-03-25 |
Apparatus for detecting defects in patterned substrates Grant 6,509,750 - Talbot , et al. January 21, 2 | 2003-01-21 |
Detection of defects in patterned substrates App 20020166964 - Talbot, Christopher G. ;   et al. | 2002-11-14 |
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