Takigawa; Tadahiro
Patent Applications and Registrations
Patent applications and USPTO patent grants for Takigawa; Tadahiro.The latest application filed is for "pattern transfer apparatus, an operation management system thereof, and an operation management system for a semiconductor manufacture apparatus".
- Takigawa; Tadahiro - Kawasaki JP
- Takigawa; Tadahiro - Inagi JP
- Takigawa; Tadahiro - Tokyo JP
- Takigawa; Tadahiro - Yokohama JA
| Patent | Date |
|---|---|
| Pattern transfer apparatus, an operation management system thereof, and an operation management system for a semiconductor manufacture apparatus Grant 5,909,030 - Yoshitake , et al. June 1, 1 | 1999-06-01 |
| Focused ion beam deposition using TMCTS Grant 5,639,699 - Nakamura , et al. June 17, 1 | 1997-06-17 |
| Method of depositing an insulating film and a focusing ion beam apparatus Grant 5,083,033 - Komano , et al. January 21, 1 | 1992-01-21 |
| Method of forming a fine pattern with a charged particle beam Grant 4,712,013 - Nishimura , et al. December 8, 1 | 1987-12-08 |
| Exposure method utilizing an energy beam Grant 4,530,064 - Takigawa , et al. July 16, 1 | 1985-07-16 |
| Processing method using a focused ion beam Grant 4,457,803 - Takigawa July 3, 1 | 1984-07-03 |
| Electron beam exposing apparatus Grant 4,430,570 - Takigawa , et al. February 7, 1 | 1984-02-07 |
| Electron beam apparatus Grant 4,424,448 - Takigawa , et al. January 3, 1 | 1984-01-03 |
| Electron gun Grant 4,363,995 - Takigawa , et al. December 14, 1 | 1982-12-14 |
| Electron beam system Grant 4,321,510 - Takigawa March 23, 1 | 1982-03-23 |
| Insulated-gate field-effect transistor Grant 4,080,618 - Tango , et al. March 21, 1 | 1978-03-21 |
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