| Patent | Date |
|---|
Semiconductor device and method of manufacturing semiconductor device
Grant 10,410,868 - Inoue , et al. Sept | 2019-09-10 |
Semiconductor Device And Method Of Manufacturing Semiconductor Device
App 20180151377 - Inoue; Takashi ; et al. | 2018-05-31 |
Method of manufacturing semiconductor device with a multi-layered gate dielectric
Grant 9,984,884 - Inoue , et al. May 29, 2 | 2018-05-29 |
Semiconductor memory device having memory cells provided in a height direction
Grant 9,812,398 - Hu , et al. November 7, 2 | 2017-11-07 |
Semiconductor memory device
Grant 9,666,597 - Hu , et al. May 30, 2 | 2017-05-30 |
Semiconductor device and a method for manufacturing a semiconductor device
Grant 9,660,045 - Inoue , et al. May 23, 2 | 2017-05-23 |
Semiconductor Device And Method Of Manufacturing Semiconductor Device
App 20170103898 - INOUE; Takashi ; et al. | 2017-04-13 |
Semiconductor Memory Device
App 20170077130 - HU; Ming ; et al. | 2017-03-16 |
Semiconductor device with varying thickness of insulating film between electrode and gate electrode and method of manufacturing semiconductor device
Grant 9,559,183 - Inoue , et al. January 31, 2 | 2017-01-31 |
Semiconductor Memory Device And Method Of Manufacturing The Same
App 20160276364 - HU; Ming ; et al. | 2016-09-22 |
Semiconductor Memory Device
App 20160268191 - HU; Ming ; et al. | 2016-09-15 |
Semiconductor memory device and method of manufacturing the same
Grant 9,443,868 - Hu , et al. September 13, 2 | 2016-09-13 |
Semiconductor Device And A Method For Manufacturing A Semiconductor Device
App 20160204243 - INOUE; Takashi ; et al. | 2016-07-14 |
Semiconductor device
Grant 9,362,401 - Takewaki , et al. June 7, 2 | 2016-06-07 |
Semiconductor device and a method for manufacturing a semiconductor device
Grant 9,306,027 - Inoue , et al. April 5, 2 | 2016-04-05 |
Semiconductor device with high reliability and manufacturing method thereof
Grant 9,177,857 - Oshida , et al. November 3, 2 | 2015-11-03 |
Semiconductor Device
App 20150270394 - TAKEWAKI; Toshiyuki ; et al. | 2015-09-24 |
Semiconductor device including a strain relaxation film
Grant 9,070,661 - Takewaki , et al. June 30, 2 | 2015-06-30 |
Semiconductor Device And A Method For Manufacturing A Semiconductor Device
App 20150145004 - Inoue; Takashi ; et al. | 2015-05-28 |
Semiconductor Device
App 20150061038 - Takewaki; Toshiyuki ; et al. | 2015-03-05 |
Semiconductor Device And Method Of Manufacturing Semiconductor Device
App 20140353720 - Inoue; Takashi ; et al. | 2014-12-04 |
Semiconductor device having silicon-diffused metal wiring layer and its manufacturing method
Grant 8,642,467 - Ohto , et al. February 4, 2 | 2014-02-04 |
Semiconductor device and method of manufacturing the same
Grant 8,486,836 - Oshida , et al. July 16, 2 | 2013-07-16 |
Semiconductor device having dual damascene structure
Grant 8,487,442 - Takewaki July 16, 2 | 2013-07-16 |
Method of manufacturing semiconductor device
Grant 8,329,584 - Takewaki , et al. December 11, 2 | 2012-12-11 |
Method Of Manufacturing A High-reliability Semiconductor Device
App 20120231623 - OSHIDA; Daisuke ; et al. | 2012-09-13 |
Method For Manufacturing A Semiconductor Device Having A Refractory Metal Containing Film
App 20120115324 - TAKEWAKI; Toshiyuki ; et al. | 2012-05-10 |
Semiconductor Device Having Silicon-diffused Metal Wiring Layer And Its Manufacturing Method
App 20120108060 - OHTO; Koichi ; et al. | 2012-05-03 |
Semiconductor device having silicon-diffused metal wiring layer and its manufacturing method
Grant 8,115,318 - Ohto , et al. February 14, 2 | 2012-02-14 |
Semiconductor Device And Method Of Manufacturing The Same
App 20110318900 - OSHIDA; Daisuke ; et al. | 2011-12-29 |
Electrical fuse and semiconductor device
Grant 8,053,863 - Takewaki November 8, 2 | 2011-11-08 |
Semiconductor device and method of manufacturing the same
Grant 8,030,737 - Oshida , et al. October 4, 2 | 2011-10-04 |
Method Of Manufacturing Semiconductor Device
App 20110230051 - TAKEWAKI; Toshiyuki ; et al. | 2011-09-22 |
Semiconductor Device having dual damascene structure
App 20110169172 - Takewaki; Toshiyuki | 2011-07-14 |
Method of manufacturing semiconductor device
Grant 7,955,980 - Takewaki , et al. June 7, 2 | 2011-06-07 |
Semiconductor device having dual damascene structure
Grant 7,936,072 - Takewaki May 3, 2 | 2011-05-03 |
Semiconductor device having projection on lower electrode and method for forming the same
Grant 7,897,475 - Oshida , et al. March 1, 2 | 2011-03-01 |
Semiconductor device having a refractory metal containing film and method for manufacturing the same
Grant 7,888,254 - Takewaki , et al. February 15, 2 | 2011-02-15 |
Semiconductor device and method for manufacturing same
Grant 7,846,830 - Takewaki , et al. December 7, 2 | 2010-12-07 |
Semiconductor device having silicon-diffused metal wiring layer and its manufacturing method
Grant 7,842,602 - Ohto , et al. November 30, 2 | 2010-11-30 |
Semiconductor device including capacitor including upper electrode covered with high density insulation film and production method thereof
Grant 7,821,101 - Takewaki , et al. October 26, 2 | 2010-10-26 |
Semiconductor Device Having Silicon-diffused Metal Wiring Layer And Its Manufacturing Method
App 20100224995 - Ohto; Koichi ; et al. | 2010-09-09 |
Semiconductor device and method of manufacturing the same
Grant 7,745,937 - Usami , et al. June 29, 2 | 2010-06-29 |
Method of forming a semiconductor device featuring copper wiring layers of different widths having metal capping layers of different thicknesses formed thereon
Grant 7,741,214 - Takewaki , et al. June 22, 2 | 2010-06-22 |
Semiconductor method having silicon-diffused metal wiring layer
Grant 7,737,555 - Ohto , et al. June 15, 2 | 2010-06-15 |
Narrow and wide copper interconnections composed of (111), (200) and (511) surfaces
Grant 7,728,432 - Takewaki , et al. June 1, 2 | 2010-06-01 |
Fuse and seal ring
Grant 7,692,265 - Takewaki , et al. April 6, 2 | 2010-04-06 |
Single damascene structure semiconductor device having silicon-diffused metal wiring layer
Grant 7,687,917 - Ohto , et al. March 30, 2 | 2010-03-30 |
Method of manufacturing a semiconductor device having an interconnect structure that increases in impurity concentration as width increases
Grant 7,674,704 - Takewaki March 9, 2 | 2010-03-09 |
Electrical fuse and semiconductor device
App 20100032797 - Takewaki; Toshiyuki | 2010-02-11 |
Semiconductor device and method of manufacturing the same
Grant 7,633,138 - Takewaki , et al. December 15, 2 | 2009-12-15 |
Method Of Manufacturing Semiconductor Device
App 20090305496 - TAKEWAKI; Toshiyuki ; et al. | 2009-12-10 |
Method of manfacturing semiconductor device
Grant 7,601,640 - Takewaki , et al. October 13, 2 | 2009-10-13 |
Semiconductor Device With High Reliability And Manufacturing Method Thereof
App 20090184421 - Oshida; Daisuke ; et al. | 2009-07-23 |
Semiconductor Device Having A Refractory Metal Containing Film And Method For Manufacturing The Same
App 20090176364 - TAKEWAKI; Toshiyuki ; et al. | 2009-07-09 |
Method Of Manufacturing A Semiconductor Device Having An Interconnect Structure That Increases In Impurity Concentration As Width Increases
App 20090149018 - TAKEWAKI; Toshiyuki | 2009-06-11 |
Semiconductor device having dual damascene structure
App 20090121360 - Takewaki; Toshiyuki | 2009-05-14 |
Semiconductor Device
App 20090115022 - NAKASHIBA; Yasutaka ; et al. | 2009-05-07 |
Semiconductor device having a refractory metal containing film and method for manufacturing the same
Grant 7,521,802 - Takewaki , et al. April 21, 2 | 2009-04-21 |
Method of manufacturing a semiconductor device having an interconnect structure that increases in impurity concentration as width increases
Grant 7,514,352 - Takewaki April 7, 2 | 2009-04-07 |
Method Of Forming A Semiconductor Device Featuring Copper Wiring Layers Of Different Widths Having Metal Capping Layers Of Different Thicknesses Formed Thereon
App 20090081870 - Takewaki; Toshiyuki ; et al. | 2009-03-26 |
Semiconductor device and method of manufacturing the same
Grant 7,508,082 - Takewaki , et al. March 24, 2 | 2009-03-24 |
Semiconductor device featuring copper wiring layers of different widths having metal capping layers of different thickness formed thereon, and method for manufacturing the same
Grant 7,479,700 - Takewaki , et al. January 20, 2 | 2009-01-20 |
Semiconductor device and manufacturing method thereof
Grant 7,476,611 - Kunishima , et al. January 13, 2 | 2009-01-13 |
Semiconductor device including capacitor including upper electrode covered with high density insulation film and production method thereof
App 20080277762 - Takewaki; Toshiyuki ; et al. | 2008-11-13 |
Semiconductor device having projection on lower electrode and method for forming the same
App 20080237793 - Oshida; Daisuke ; et al. | 2008-10-02 |
Semiconductor Device And Method Of Manufacturing The Same
App 20080217737 - OSHIDA; Daisuke ; et al. | 2008-09-11 |
Method Of Manfacturing Semiconcudtor Device
App 20080160750 - TAKEWAKI; Toshiyuki ; et al. | 2008-07-03 |
Semiconductor Device And Method Of Manufacturing Same
App 20080160686 - NAKAMATSU; Ikuo ; et al. | 2008-07-03 |
Semiconductor device
Grant 7,358,609 - Iguchi , et al. April 15, 2 | 2008-04-15 |
Method of manufacturing a semiconductor device having an interconnect structure that increases in impurity concentration as width increases
App 20080064202 - Takewaki; Toshiyuki | 2008-03-13 |
Semiconductor device and method for manufacturing same
App 20080044997 - Takewaki; Toshiyuki ; et al. | 2008-02-21 |
Semiconductor device and method of manufacturing the same
Grant 7,327,031 - Takewaki , et al. February 5, 2 | 2008-02-05 |
Semiconductor Device And Method Of Manufacturing The Same
App 20080017993 - TAKEWAKI; Toshiyuki ; et al. | 2008-01-24 |
Semiconductor device having an anti-oxidizing layer that inhibits corrosion of an interconnect layer
Grant 7,312,535 - Takewaki , et al. December 25, 2 | 2007-12-25 |
Semiconductor device having an interconnect that increases in impurity concentration as width increases
Grant 7,274,104 - Takewaki September 25, 2 | 2007-09-25 |
Semiconductor Device Having Silicon-diffused Metal Wiring Layer And Its Manufacturing Method
App 20070212809 - Ohto; Koichi ; et al. | 2007-09-13 |
Semiconductor device and manufacturing method for the same
Grant 7,229,921 - Hironaga , et al. June 12, 2 | 2007-06-12 |
Semiconductor device having silicon-diffused metal wiring layer and its manufacturing method
App 20070108620 - Ohto; Koichi ; et al. | 2007-05-17 |
Semiconductor device and method of manufacturing the same
App 20070034924 - Takewaki; Toshiyuki ; et al. | 2007-02-15 |
Semiconductor device and method of manufacturing the same
App 20060186549 - Usami; Tatsuya ; et al. | 2006-08-24 |
Semiconductor device featuring copper wiring layers of different widths having metal capping layers of different thickness formed thereon, and method for manufacturing the same
App 20060157854 - Takewaki; Toshiyuki ; et al. | 2006-07-20 |
Method for manufacturing semiconductor device, and processing system and semiconductor device
Grant 7,052,994 - Matsubara , et al. May 30, 2 | 2006-05-30 |
Semiconductor device and method fabricating the same
App 20060027931 - Takewaki; Toshiyuki ; et al. | 2006-02-09 |
Semiconductor device
App 20060017167 - Iguchi; Manabu ; et al. | 2006-01-26 |
Semiconductor device and method for manufacturing the same
App 20050230782 - Takewaki, Toshiyuki ; et al. | 2005-10-20 |
Semiconductor device and method for manufacturing the same
App 20050218477 - Takewaki, Toshiyuki ; et al. | 2005-10-06 |
Semiconductor device including dissimilar element-diffused metal layer and manufacturing method thereof
Grant 6,949,832 - Kunishima , et al. September 27, 2 | 2005-09-27 |
Semiconductor device and method of manufacturing the same
App 20050112866 - Takewaki, Toshiyuki | 2005-05-26 |
Semiconductor device fabricating method and treating liquid
Grant 6,890,864 - Aoki , et al. May 10, 2 | 2005-05-10 |
Semiconductor device and manufacturing method thereof
App 20050095847 - Kunishima, Hiroyuki ; et al. | 2005-05-05 |
Semiconductor device and method of manufacturing the same
App 20050067700 - Takewaki, Toshiyuki ; et al. | 2005-03-31 |
Semiconductor device and manufacturing method the same
App 20040251552 - Takewaki, Toshiyuki ; et al. | 2004-12-16 |
Semiconductor device and method of manufacturing the same
App 20040245643 - Takewaki, Toshiyuki ; et al. | 2004-12-09 |
Semiconductor device and method for manufacturing same
App 20040188851 - Takewaki, Toshiyuki ; et al. | 2004-09-30 |
Semiconductor device having silicon-diffused metal wiring layer and its manufacturing method
App 20040046261 - Ohto, Koichi ; et al. | 2004-03-11 |
Semiconductor device and manufacturing method thereof
App 20040014312 - Kunishima, Hiroyuki ; et al. | 2004-01-22 |
Semiconductor device having silicon-including metal wiring layer and its manufacturing method
App 20030209738 - Ohto, Koichi ; et al. | 2003-11-13 |
Semiconductor device and manufacturing method for the same
App 20030173671 - Hironaga, Nobuo ; et al. | 2003-09-18 |
Semiconductor device fabricating method and treating liquid
App 20030134507 - Aoki, Hidemitsu ; et al. | 2003-07-17 |
Semiconductor device and method of manufacturing interconnections thereof using copper and tungsten in predetermined ratios
Grant 6,555,911 - Matsubara , et al. April 29, 2 | 2003-04-29 |
Semiconductor device formed with metal wiring on a wafer by chemical mechanical polishing, and method of manufacturing the same
App 20030039845 - Iguchi, Manabu ; et al. | 2003-02-27 |
Semiconductor device fabricating method and treating liquid
App 20030027418 - Aoki, Hidemitsu ; et al. | 2003-02-06 |
Method for manufacturing a multilayer interconnection structure
App 20020009878 - Takewaki, Toshiyuki ; et al. | 2002-01-24 |
Method for manufacturing semiconductor device, and processing system and semiconductor device
App 20010036736 - Matsubara, Yoshihisa ; et al. | 2001-11-01 |
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