Patent | Date |
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Resist Composition And Method Of Forming Resist Pattern App 20220107565 - TAKESHITA; Masaru ;   et al. | 2022-04-07 |
Method of forming resist pattern Grant 9,411,224 - Yokoya , et al. August 9, 2 | 2016-08-09 |
Resist composition and method of forming resist pattern Grant 9,023,577 - Takeshita , et al. May 5, 2 | 2015-05-05 |
Method of forming resist pattern Grant 8,975,010 - Takeshita March 10, 2 | 2015-03-10 |
Method of forming resist pattern and resist composition Grant 8,877,432 - Yokoya , et al. November 4, 2 | 2014-11-04 |
Resist composition and method of forming resist pattern Grant 8,614,049 - Utsumi , et al. December 24, 2 | 2013-12-24 |
Resist polymer and resist composition Grant 8,580,481 - Momose , et al. November 12, 2 | 2013-11-12 |
Positive resist composition and method of forming resist pattern Grant 8,535,868 - Takeshita , et al. September 17, 2 | 2013-09-17 |
Resist composition for immersion exposure, method of forming resist pattern, and fluorine-containing resin Grant 8,530,598 - Takeshita , et al. September 10, 2 | 2013-09-10 |
Compound Grant 8,497,395 - Utsumi , et al. July 30, 2 | 2013-07-30 |
Positive resist composition and method of forming resist pattern Grant 8,486,605 - Takeshita , et al. July 16, 2 | 2013-07-16 |
Method Of Forming Resist Pattern App 20130164693 - Takeshita; Masaru | 2013-06-27 |
Method Of Forming Resist Pattern App 20130017500 - Yokoya; Jiro ;   et al. | 2013-01-17 |
Positive resist composition and method of forming resist pattern Grant 8,338,075 - Takeshita , et al. December 25, 2 | 2012-12-25 |
Positive resist composition, method of forming resist pattern using the same, and polymeric compound Grant 8,268,529 - Dazai , et al. September 18, 2 | 2012-09-18 |
Resist composition for immersion exposure, method of forming resist pattern, and fluorine-containing resin Grant 8,247,161 - Takeshita , et al. August 21, 2 | 2012-08-21 |
Positive resist composition and method of forming resist pattern Grant 8,247,159 - Takeshita , et al. August 21, 2 | 2012-08-21 |
Resist Composition And Method Of Forming Resist Pattern App 20120183899 - Takeshita; Masaru ;   et al. | 2012-07-19 |
Positive resist composition and method of forming resist pattern Grant 8,216,764 - Takeshita July 10, 2 | 2012-07-10 |
Resist Composition And Method Of Forming Resist Pattern App 20120148956 - UTSUMI; Yoshiyuki ;   et al. | 2012-06-14 |
Novel Compound App 20120149916 - UTSUMI; Yoshiyuki ;   et al. | 2012-06-14 |
Resist Composition For Immersion Exposure, Method Of Forming Resist Pattern, And Fluorine-containing Resin App 20120116038 - TAKESHITA; Masaru ;   et al. | 2012-05-10 |
Resist Polymer And Resist Composition App 20120034561 - Momose; Hikaru ;   et al. | 2012-02-09 |
Positive resist composition and method for forming resist pattern Grant 8,097,396 - Shimizu , et al. January 17, 2 | 2012-01-17 |
Positive Resist Composition And Method Of Forming Resist Pattern App 20120009520 - Takeshita; Masaru ;   et al. | 2012-01-12 |
Resist polymer and resist composition Grant 8,092,979 - Momose , et al. January 10, 2 | 2012-01-10 |
Method Of Forming Resist Pattern And Resist Composition App 20110262872 - YOKOYA; Jiro ;   et al. | 2011-10-27 |
Positive resist composition and method of forming resist pattern Grant 7,972,762 - Muroi , et al. July 5, 2 | 2011-07-05 |
Positive resist composition and method of forming resist pattern Grant 7,968,276 - Takeshita June 28, 2 | 2011-06-28 |
Positive resist composition and method of forming resist pattern Grant 7,964,331 - Takeshita June 21, 2 | 2011-06-21 |
Resin, resist composition and method of forming resist pattern Grant 7,939,243 - Takeshita , et al. May 10, 2 | 2011-05-10 |
Resist Composition And Method Of Forming Resist Pattern App 20110008728 - NAKAMURA; Tsuyoshi ;   et al. | 2011-01-13 |
Positive resist composition and method of forming resist pattern Grant 7,855,044 - Takeshita , et al. December 21, 2 | 2010-12-21 |
Resin for photoresist composition, photoresist composition and method for forming resist pattern Grant 7,829,259 - Hada , et al. November 9, 2 | 2010-11-09 |
Positive Resist Composition And Method Of Forming Resist Pattern App 20100248133 - Takeshita; Masaru | 2010-09-30 |
Positive resist composition and method of forming resist pattern Grant 7,776,511 - Takeshita , et al. August 17, 2 | 2010-08-17 |
Positive Resist Composition, Method Of Forming Resist Pattern Using The Same, And Polymeric Compound App 20100196821 - Dazai; Takahiro ;   et al. | 2010-08-05 |
Method for producing resist composition and resist composition Grant 7,767,378 - Shimizu , et al. August 3, 2 | 2010-08-03 |
Positive Resist Composition And Method Of Forming Resist Pattern App 20100190108 - Takeshita; Masaru ;   et al. | 2010-07-29 |
Polymer, positive resist composition and method for forming resist pattern Grant 7,763,412 - Takeshita , et al. July 27, 2 | 2010-07-27 |
Resin, Resist Composition And Method Of Forming Resist Pattern App 20100159389 - Takeshita; Masaru ;   et al. | 2010-06-24 |
Resist composition for immersion exposure, method of forming resist pattern, and fluorine-containing resin App 20100143844 - Takeshita; Masaru ;   et al. | 2010-06-10 |
Copolymer for semiconductor lithography and process for production thereof Grant 7,695,889 - Yamagishi , et al. April 13, 2 | 2010-04-13 |
Resist composition and method for forming resist pattern Grant 7,682,770 - Hada , et al. March 23, 2 | 2010-03-23 |
Positive Resist Composition And Method Of Forming Resist Pattern App 20100047724 - Takeshita; Masaru ;   et al. | 2010-02-25 |
Positive Resist Composition And Method Of Forming Resist Pattern App 20100015548 - Takeshita; Masaru ;   et al. | 2010-01-21 |
Positive resist composition and method of forming resist pattern Grant 7,645,559 - Watanabe , et al. January 12, 2 | 2010-01-12 |
Positive resist composition and method for resist pattern formation Grant 7,638,258 - Takeshita December 29, 2 | 2009-12-29 |
Positive Resist Composition And Method Of Forming Resist Pattern App 20090286179 - Takeshita; Masaru | 2009-11-19 |
Resist Polymer And Resist Composition App 20090263743 - MOMOSE; Hikaru ;   et al. | 2009-10-22 |
Positive Resist Composition And Method Of Forming Resist Pattern App 20090246683 - Watanabe; Ryoji ;   et al. | 2009-10-01 |
Resin for photoresist composition, photoresist composition and method for forming resist pattern Grant 7,592,123 - Hada , et al. September 22, 2 | 2009-09-22 |
Positive Resist Composition And Method Of Forming Resist Pattern App 20090233220 - Muroi; Masaaki ;   et al. | 2009-09-17 |
Resist polymer and resist composition Grant 7,575,846 - Momose , et al. August 18, 2 | 2009-08-18 |
Positive Resist Composition And Method Of Forming Resist Pattern App 20090181325 - Takeshita; Masaru | 2009-07-16 |
Resin For Photoresist Composition, Photoresist Composition And Method For Forming Resist Pattern App 20090142700 - Hada; Hideo ;   et al. | 2009-06-04 |
Positive Resist Composition And Method Of Forming Resist Pattern App 20090075204 - Takeshita; Masaru ;   et al. | 2009-03-19 |
Positive Resist Composition And Method Of Forming Resist Pattern App 20090068592 - Takeshita; Masaru ;   et al. | 2009-03-12 |
Positive resist compositions and process for the formation of resist patterns with the same Grant 7,494,759 - Hada , et al. February 24, 2 | 2009-02-24 |
Resist composition and method of forming resist pattern Grant 7,491,485 - Takeshita , et al. February 17, 2 | 2009-02-17 |
Positive Resist Composition And Method For Resist Pattern Formation App 20090042129 - Takeshita; Masaru | 2009-02-12 |
Resist composition, method of forming resist pattern, compound and acid generator Grant 7,488,568 - Iwai , et al. February 10, 2 | 2009-02-10 |
Method For Producing Resist Composition And Resist Composition App 20090029288 - Shimizu; Hiroaki ;   et al. | 2009-01-29 |
Polymer compound, acid generator, positive resist composition, and method for formation of resist patterns Grant 7,482,108 - Matsumaru , et al. January 27, 2 | 2009-01-27 |
Resist Composition And Method Of Forming Resist Pattern App 20080292988 - Takeshita; Masaru ;   et al. | 2008-11-27 |
Resist Composition, Method Of Forming Resist Pattern, Compound And Acid Generator App 20080248422 - Iwai; Takeshi ;   et al. | 2008-10-09 |
Polymer, Positive Resist Composition and Method for Forming Resist Pattern App 20080063975 - Takeshita; Masaru ;   et al. | 2008-03-13 |
Positive Resist Composition and Method for Forming Resist Pattern App 20080063974 - Shimizu; Hiroaki ;   et al. | 2008-03-13 |
Process for refining crude resin for electronic material Grant 7,312,015 - Hada , et al. December 25, 2 | 2007-12-25 |
Resist Composition and Method for Forming Resist Pattern App 20070275307 - Hada; Hideo ;   et al. | 2007-11-29 |
Polymer Compound, Acid Generator, Positive Resist Composition, and Method for Formation of Resist Patterns App 20070231708 - Matsumaru; Shogo ;   et al. | 2007-10-04 |
Positive Resist Compositions and Process for the Formation of Resist Patterns With the Same App 20070224538 - Hada; Hideo ;   et al. | 2007-09-27 |
Positive resist composition and method of forming resist pattern using same App 20070111135 - Hayashi; Ryotaro ;   et al. | 2007-05-17 |
Positive resist composition and method for forming resist pattern App 20070105038 - Takeshita; Masaru ;   et al. | 2007-05-10 |
Resin for photoresist composition, photoresist composition and method for forming resist pattern App 20070065748 - Hada; Hideo ;   et al. | 2007-03-22 |
Copolymer for semiconductor lithography and process for production thereof App 20060257784 - Yamagishi; Takanori ;   et al. | 2006-11-16 |
Resist composition and method of forming resist pattern using same App 20060141382 - Takeshita; Masaru ;   et al. | 2006-06-29 |
Process for refining crude resin for electronic material App 20060141384 - Hada; Hideo ;   et al. | 2006-06-29 |
Resist polymer and resist composition App 20060127801 - Momose; Hikaru ;   et al. | 2006-06-15 |
Apparatus for cutting an elongate rubbery strip Grant 4,516,451 - Takeshita , et al. May 14, 1 | 1985-05-14 |