| Patent | Date |
|---|
Plasma Module With Slotted Ground Plate
App 20170076917 - Yudovsky; Joseph ; et al. | 2017-03-16 |
Precise critical dimension control using bilayer ALD
Grant 9,443,716 - Takeshita , et al. September 13, 2 | 2016-09-13 |
Process and device for reducing radioactive material of object containing radioactive material to safe level in living environment
Grant 9,395,003 - Hayafuji , et al. July 19, 2 | 2016-07-19 |
Precise Critical Dimension Control Using Bilayer ALD
App 20160104613 - Takeshita; Kenji ; et al. | 2016-04-14 |
Prevention of line bending and tilting for etch with tri-layer mask
Grant 8,946,091 - Oh , et al. February 3, 2 | 2015-02-03 |
Wood fiber board and manufacturing method thereof
Grant 8,936,855 - Kimuro , et al. January 20, 2 | 2015-01-20 |
Integrated capacitive and inductive power sources for a plasma etching chamber
Grant 8,911,590 - Dhindsa , et al. December 16, 2 | 2014-12-16 |
Process And Device For Reducing Radioactive Material Of Object Containing Radioactive Material To Safe Level In Living Environment
App 20140228612 - Hayafuji; Shigeto ; et al. | 2014-08-14 |
Uniform etch system
Grant 8,801,892 - Larson , et al. August 12, 2 | 2014-08-12 |
Prevention Of Line Bending And Tilting For Etch With Tri-layer Mask
App 20120276747 - Oh; Youn-Jin ; et al. | 2012-11-01 |
Laser gain medium and laser oscillator using the same
Grant 8,259,763 - Takeshita , et al. September 4, 2 | 2012-09-04 |
Method for low-K dielectric etch with reduced damage
Grant 8,236,188 - Ji , et al. August 7, 2 | 2012-08-07 |
Selectivity control in a plasma processing system
Grant 8,222,155 - Takeshita , et al. July 17, 2 | 2012-07-17 |
Wood Fiber Board And Manufacturing Method Thereof
App 20120108706 - KIMURO; Makoto ; et al. | 2012-05-03 |
Method for dielectric material removal between conductive lines
Grant 8,114,780 - Block , et al. February 14, 2 | 2012-02-14 |
Laser Gain Medium And Laser Oscillator Using The Same
App 20120008654 - TAKESHITA; Kenji ; et al. | 2012-01-12 |
Laser gain medium and laser oscillator using the same
Grant 8,068,523 - Takeshita , et al. November 29, 2 | 2011-11-29 |
Method For Repairing Low-k Dielectric Damage
App 20110097904 - Sirard; Stephen M. ; et al. | 2011-04-28 |
Wafer electrical discharge control using argon free dechucking gas
Grant 7,892,445 - Wei , et al. February 22, 2 | 2011-02-22 |
Method For Low-k Dielectric Etch With Reduced Damage
App 20100261352 - Ji; Bing ; et al. | 2010-10-14 |
Method For Dielectric Material Removal Between Conductive Lines
App 20100248485 - Block; Mayumi ; et al. | 2010-09-30 |
Optically pumped disk-type solid state laser oscillator and optically pumped disk-type solid state laser system
Grant 7,773,641 - Takeshita , et al. August 10, 2 | 2010-08-10 |
Laser Gain Medium And Laser Oscillator Using The Same
App 20100111121 - Takeshita; Kenji ; et al. | 2010-05-06 |
Optically pumped disk-type solid state laser oscillator and optically pumped disk-type solid state laser system
App 20090161702 - Takeshita; Kenji ; et al. | 2009-06-25 |
Method for providing uniform removal of organic material
Grant 7,534,363 - Annapragada , et al. May 19, 2 | 2009-05-19 |
Methods for the optimization of ion energy control in a plasma processing system
Grant 7,521,362 - Takeshita , et al. April 21, 2 | 2009-04-21 |
Method for selectivity control in a plasma processing system
Grant 7,517,801 - Takeshita April 14, 2 | 2009-04-14 |
Laser scanning optical apparatus having exclusive optical elements at varying distances from receiving surfaces
Grant 7,515,168 - Takeshita , et al. April 7, 2 | 2009-04-07 |
Tuning Via Facet With Minimal Rie Lag
App 20090068767 - Sirard; Stephen ; et al. | 2009-03-12 |
Uniform Etch System
App 20080210377 - Larson; Dean J. ; et al. | 2008-09-04 |
Selectivity Control In A Plasma Processing System
App 20080113516 - Takeshita; Kenji ; et al. | 2008-05-15 |
Uniform etch system
Grant 7,371,332 - Larson , et al. May 13, 2 | 2008-05-13 |
Integrated capacitive and inductive power sources for a plasma etching chamber
App 20070199658 - Dhindsa; Rajinder ; et al. | 2007-08-30 |
Methods for protecting silicon or silicon carbide electrode surfaces from morphological modification during plasma etch processing
Grant 7,226,869 - Takeshita , et al. June 5, 2 | 2007-06-05 |
Laser scanning optical apparatus
App 20070120944 - Takeshita; Kenji ; et al. | 2007-05-31 |
Gas distribution system with tuning gas
Grant 7,169,231 - Larson , et al. January 30, 2 | 2007-01-30 |
Method of preventing damage to porous low-K materials during resist stripping
App 20060240661 - Annapragada; Rao ; et al. | 2006-10-26 |
Etch with uniformity control
Grant 7,090,782 - Kawaguchi , et al. August 15, 2 | 2006-08-15 |
Method of preventing damage to porous low-k materials during resist stripping
Grant 7,081,407 - Annapragada , et al. July 25, 2 | 2006-07-25 |
Methods for the optimization of ion energy control in a plasma processing system
App 20060121729 - Takeshita; Kenji ; et al. | 2006-06-08 |
Methods for protecting silicon or silicon carbide electrode surfaces from morphological modification during plasma etch processing
App 20060091104 - Takeshita; Kenji ; et al. | 2006-05-04 |
Laser scanning optical unit used in image forming apparatus
App 20060012669 - Taniguchi; Hajime ; et al. | 2006-01-19 |
Cartridge syringe, cartridge and ophthalmologic syringe set having such syringe
App 20050154354 - Kawasaki, Yoshihiko ; et al. | 2005-07-14 |
Method of preventing damage to porous low-k materials during resist stripping
App 20050130435 - Annapragada, Rao ; et al. | 2005-06-16 |
Vacuum plasma processor method
Grant 6,897,156 - Ni , et al. May 24, 2 | 2005-05-24 |
Method for providing uniform removal of organic material
App 20050006346 - Annapragada, Rao V. ; et al. | 2005-01-13 |
Moveable barrier for multiple etch processes
App 20040144493 - Ni, Tuqiang ; et al. | 2004-07-29 |
Uniform etch system
App 20040112540 - Larson, Dean J. ; et al. | 2004-06-17 |
Uniform etch system
App 20040112539 - Larson, Dean J. ; et al. | 2004-06-17 |
Gas distribution system with tuning gas
App 20040112538 - Larson, Dean J. ; et al. | 2004-06-17 |
Tandem scanning optical device
Grant 6,710,905 - Nishikiuchi , et al. March 23, 2 | 2004-03-23 |
Moveable barrier for multiple etch processes
Grant 6,709,547 - Ni , et al. March 23, 2 | 2004-03-23 |
Tandem scanning optical device
App 20030137710 - Nishikiuchi, Hirofumi ; et al. | 2003-07-24 |
Vacuum plasma processor apparatus and method
App 20030106645 - Ni, Tuqiang ; et al. | 2003-06-12 |
Vacuum plasma processor apparatus and method
Grant 6,531,029 - Ni , et al. March 11, 2 | 2003-03-11 |
Method for improving uniformity and reducing etch rate variation of etching polysilicon
Grant 6,514,378 - Ni , et al. February 4, 2 | 2003-02-04 |
High temperature tungsten etching process
Grant 6,461,974 - Ni , et al. October 8, 2 | 2002-10-08 |
Light beam scanner
Grant 6,400,488 - Nagasaka , et al. June 4, 2 | 2002-06-04 |
Scanning optical system and a scanning optical apparatus
Grant 6,088,146 - Takeshita , et al. July 11, 2 | 2000-07-11 |
Light beam scanning optical apparatus
Grant 6,038,353 - Naiki , et al. | 2000-03-14 |
Laser beam scanning optical apparatus
Grant 5,969,346 - Nagasaka , et al. October 19, 1 | 1999-10-19 |
Laser beam scanning optical apparatus
Grant 5,808,775 - Inagaki , et al. September 15, 1 | 1998-09-15 |
Image forming apparatus with optical element support structure
Grant 5,499,045 - Takeshita , et al. March 12, 1 | 1996-03-12 |
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