Patent | Date |
---|
Method for manufacturing semiconductor device and method for evaluating semiconductor device Grant 10,886,129 - Ohtsuki , et al. January 5, 2 | 2021-01-05 |
Method For Manufacturing Semiconductor Device And Method For Evaluating Semiconductor Device App 20190267239 - OHTSUKI; Tsuyoshi ;   et al. | 2019-08-29 |
Method for manufacturing silicon wafer Grant 10,297,463 - Suzuki , et al. | 2019-05-21 |
Method For Manufacturing Silicon Wafer App 20180247830 - SUZUKI; Katsuyoshi ;   et al. | 2018-08-30 |
Method for evaluating semiconductor substrate Grant 9,748,151 - Ohtsuki , et al. August 29, 2 | 2017-08-29 |
Method for measuring recombination lifetime of silicon substrate Grant 9,530,702 - Takeno December 27, 2 | 2016-12-27 |
Method For Evaluating Semiconductor Substrate App 20160365293 - OHTSUKI; Tsuyoshi ;   et al. | 2016-12-15 |
Semiconductor Substrate For Flash Lamp Anneal, Anneal Substrate, Semiconductor Device, And Method For Manufacturing Semiconductor Device App 20160351415 - OHTSUKI; Tsuyoshi ;   et al. | 2016-12-01 |
Method For Measuring Recombination Lifetime Of Silicon Substrate App 20160005664 - Takeno; Hiroshi | 2016-01-07 |
Silicon epitaxial wafer and method for manufacturing the same Grant 8,729,676 - Shiga , et al. May 20, 2 | 2014-05-20 |
SOI (silicon on insulator) structure semiconductor device and method of manufacturing the same Grant 8,410,573 - Ohtsuki , et al. April 2, 2 | 2013-04-02 |
Silicon Epitaxial Wafer And Method For Manufacturing The Same App 20130037920 - Shiga; Yutaka ;   et al. | 2013-02-14 |
Method for manufacturing SOI substrate Grant 8,338,277 - Takeno , et al. December 25, 2 | 2012-12-25 |
Method for producing SOI wafer Grant 8,268,705 - Yoshida , et al. September 18, 2 | 2012-09-18 |
Method for manufacturing soi wafer Grant 7,985,660 - Yokokawa , et al. July 26, 2 | 2011-07-26 |
Method for producing SOI wafer Grant 7,910,455 - Yoshida , et al. March 22, 2 | 2011-03-22 |
Method of manufacturing SOI wafer and thus-manufactured SOI wafer Grant 7,902,042 - Aga , et al. March 8, 2 | 2011-03-08 |
Method For Manufacturing Soi Substrate App 20100323502 - Takeno; Hiroshi ;   et al. | 2010-12-23 |
Soi (silicon On Insulator) Structure Semiconductor Device And Method Of Manufacturing The Same App 20100264510 - Ohtsuki; Hiroshi ;   et al. | 2010-10-21 |
Method for manufacturing SOI substrate Grant 7,799,660 - Ishizuka , et al. September 21, 2 | 2010-09-21 |
Method for manufacturing SOI substrate and SOI substrate Grant 7,749,861 - Takeno , et al. July 6, 2 | 2010-07-06 |
Method For Manufacturing Soi Wafer App 20100112781 - Yokokawa; Isao ;   et al. | 2010-05-06 |
Method for Producing Soi Wafer App 20090280620 - Yoshida; Kazuhiko ;   et al. | 2009-11-12 |
Method for Producing Soi Wafer App 20090104752 - Yoshida; Kazuhiko ;   et al. | 2009-04-23 |
Method for Manufacturing SOI Substrate and SOI Substrate App 20090042361 - Takeno; Hiroshi ;   et al. | 2009-02-12 |
Method for manufacturing SOI substrate App 20080261411 - Ishizuka; Tohru ;   et al. | 2008-10-23 |
Method Of Manufacturing Soi Wafer And Thus-Manufactured Soi Wafer App 20080128851 - Aga; Hiroji ;   et al. | 2008-06-05 |
Annealed wafer and method for manufacturing the same Grant 7,311,888 - Takeno , et al. December 25, 2 | 2007-12-25 |
Silicon epitaxial wafer and process for manufacturing the same Grant 7,229,501 - Takeno June 12, 2 | 2007-06-12 |
Method of producing annealed wafer and annealed wafer Grant 7,189,293 - Kobayashi , et al. March 13, 2 | 2007-03-13 |
Methods for manufacturing silicon wafer and silicon epitaxial wafer, and silicon epitaxial wafer App 20060130736 - Takeno; Hiroshi | 2006-06-22 |
Methods for manufacturing silicon wafer and silicone epitaxial wafer, and silicon epitaxial wafer Grant 7,033,962 - Takeno April 25, 2 | 2006-04-25 |
Annealed wafer and anneald wafer manufacturing method App 20060075957 - Takeno; Hiroshi ;   et al. | 2006-04-13 |
Silicon epitaxial wafer and its production method App 20050087830 - Takeno, Hiroshi | 2005-04-28 |
Silicon wafer and silicon epitaxial wafer and production methods therefor Grant 6,858,094 - Qu , et al. February 22, 2 | 2005-02-22 |
Production method for anneal wafer and anneal wafer App 20040231759 - Kobayashi, Norihiro ;   et al. | 2004-11-25 |
Silicon wafer manufacturing method, silicon epitaxial wafer manufacturing method, and silicon epitaxial wafer App 20040171234 - Takeno, Hiroshi | 2004-09-02 |
Silicon wafer and silicon epitaxial wafer and producition methods therefor App 20040005777 - Qu, Wei Freig ;   et al. | 2004-01-08 |
Process For Manufacturing Silicon Epitaxial Wafer App 20030008480 - Takeno, Hiroshi ;   et al. | 2003-01-09 |
Method for producing silicon epitaxial wafer App 20020157597 - Takeno, Hiroshi | 2002-10-31 |
Scramble apparatus and descramble apparatus Grant 5,636,279 - Katta , et al. June 3, 1 | 1997-06-03 |
Method of evaluating a silicon single crystal Grant 5,598,452 - Takeno , et al. January 28, 1 | 1997-01-28 |
Header detector and associated decoding apparatus Grant 5,568,140 - Imanishi , et al. October 22, 1 | 1996-10-22 |
Scramble apparatus and descramble apparatus Grant 5,377,266 - Katta , et al. December 27, 1 | 1994-12-27 |