Takekuma; Takashi
Patent Applications and Registrations
Patent applications and USPTO patent grants for Takekuma; Takashi.The latest application filed is for "coating process method and coating process apparatus".
- Takekuma; Takashi - Kumamoto JP
- Takekuma; Takashi - Kikuchi-gun JP
- Takekuma; Takashi - Yamaga JP
- Takekuma; Takashi - Austin TX
- Takekuma, Takashi - Yamaga-shi JP
| Patent | Date |
|---|---|
| Coating process method and coating process apparatus Grant 7,485,188 - Takekuma , et al. February 3, 2 | 2009-02-03 |
| Coating process method and coating process apparatus App 20060144330 - Takekuma; Takashi ; et al. | 2006-07-06 |
| Process liquid supply mechanism and process liquid supply method Grant 6,848,625 - Takekuma , et al. February 1, 2 | 2005-02-01 |
| Coating process method and coating process apparatus App 20030180444 - Takekuma, Takashi ; et al. | 2003-09-25 |
| Process liquid supply mechanism and process liquid supply method App 20030180471 - Takekuma, Takashi ; et al. | 2003-09-25 |
| Developing apparatus with a porous film nozzle Grant 6,527,861 - Takekuma March 4, 2 | 2003-03-04 |
| Apparatus and method for processing a substrate Grant 6,432,199 - Takekuma August 13, 2 | 2002-08-13 |
| Substrate processing apparatus Grant 6,402,400 - Ueda , et al. June 11, 2 | 2002-06-11 |
| Substrate processing apparatus Grant 6,377,329 - Takekuma April 23, 2 | 2002-04-23 |
| Solution treatment apparatus App 20020026896 - Takekuma, Takashi | 2002-03-07 |
| Solution treatment apparatus Grant 6,284,043 - Takekuma September 4, 2 | 2001-09-04 |
| Process liquid film forming apparatus Grant 6,258,167 - Kawano , et al. July 10, 2 | 2001-07-10 |
| Method of substrate processing to form a film on multiple target objects Grant 6,054,181 - Nanbu , et al. April 25, 2 | 2000-04-25 |
| Double-sided substrate cleaning apparatus and cleaning method using the same Grant 5,964,954 - Matsukawa , et al. October 12, 1 | 1999-10-12 |
| Semiconductor wafer processing apparatus including localized humidification between coating and heat treatment sections Grant 5,725,664 - Nanbu , et al. March 10, 1 | 1998-03-10 |
| Resist treating method Grant 5,686,143 - Matsukawa , et al. November 11, 1 | 1997-11-11 |
| Substrate processing method and substrate processing apparatus Grant 5,665,200 - Fujimoto , et al. September 9, 1 | 1997-09-09 |
| Coating apparatus and method Grant 5,580,607 - Takekuma , et al. December 3, 1 | 1996-12-03 |
| Double-sided substrate cleaning apparatus Grant 5,518,542 - Matsukawa , et al. May 21, 1 | 1996-05-21 |
| Method for applying process solution to substrates Grant 5,416,047 - Konishi , et al. May 16, 1 | 1995-05-16 |
| Coating apparatus Grant 5,070,813 - Sakai , et al. December 10, 1 | 1991-12-10 |
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