| Patent | Date |
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Coating apparatus and coating method
Grant 10,350,624 - Takeishi July 16, 2 | 2019-07-16 |
Pattern forming method and manufacturing method of semiconductor device
Grant 9,897,918 - Takeishi , et al. February 20, 2 | 2018-02-20 |
Pattern Forming Method And Manufacturing Method Of Semiconductor Device
App 20170184969 - TAKEISHI; Tomoyuki ; et al. | 2017-06-29 |
Coating Apparatus And Coating Method
App 20170151581 - TAKEISHI; Tomoyuki | 2017-06-01 |
Pattern forming method and manufacturing method of semiconductor device
Grant 9,601,331 - Takeishi , et al. March 21, 2 | 2017-03-21 |
Developing apparatus and developing method
Grant 9,535,328 - Takeishi January 3, 2 | 2017-01-03 |
Substrate Processing Device, Recordng Medium, And Control Method
App 20160217997 - TAKEISHI; Tomoyuki | 2016-07-28 |
Pattern Forming Method And Manufacturing Method Of Semiconductor Device
App 20160042942 - TAKEISHI; Tomoyuki ; et al. | 2016-02-11 |
Pattern forming method and manufacturing method of semiconductor device
Grant 9,202,722 - Takeishi , et al. December 1, 2 | 2015-12-01 |
Developing Apparatus And Developing Method
App 20150234285 - TAKEISHI; Tomoyuki | 2015-08-20 |
Pattern Forming Method And Method Of Manufacturing Semiconductor Device
App 20140242793 - TAKEISHI; Tomoyuki | 2014-08-28 |
Pattern Forming Method And Manufacturing Method Of Semiconductor Device
App 20140226137 - TAKEISHI; Tomoyuki ; et al. | 2014-08-14 |
Pattern forming method and manufacturing method of semiconductor device
Grant 8,728,943 - Takeishi , et al. May 20, 2 | 2014-05-20 |
Substrate Edge Treatment For Coater/developer
App 20120077128 - TAKEISHI; Tomoyuki ; et al. | 2012-03-29 |
Substrate edge treatment for coater/developer
Grant 8,084,194 - Takeishi , et al. December 27, 2 | 2011-12-27 |
Semiconductor Device Manufacturing Method To Form Resist Pattern, And Substrate Processing Apparatus
App 20110229826 - KAWAMURA; Daisuke ; et al. | 2011-09-22 |
Semiconductor device manufacturing method to form resist pattern
Grant 7,968,272 - Kawamura , et al. June 28, 2 | 2011-06-28 |
Pattern forming method and manufacturing method of semiconductor device
App 20110070680 - Takeishi; Tomoyuki ; et al. | 2011-03-24 |
Pattern forming method and manufacturing method of semiconductor device
Grant 7,851,363 - Takeishi , et al. December 14, 2 | 2010-12-14 |
Substrate processing method, substrate processing apparatus, and manufacturing method of semiconductor device
Grant 7,794,923 - Shiobara , et al. September 14, 2 | 2010-09-14 |
Processing method, manufacturing method of semiconductor device, and processing apparatus
Grant 7,727,853 - Takeishi , et al. June 1, 2 | 2010-06-01 |
Film forming method, and substrate-processing apparatus
Grant 7,709,383 - Kato , et al. May 4, 2 | 2010-05-04 |
Pattern forming method and method for manufacturing a semiconductor device
Grant 7,527,918 - Kondoh , et al. May 5, 2 | 2009-05-05 |
Processing method, manufacturing method of semiconductor device, and processing apparatus
App 20090039275 - Takeishi; Tomoyuki ; et al. | 2009-02-12 |
Alkaline solution and manufacturing method, and alkaline solution applied to pattern forming method, resist film removing method, solution application method, substrate treatment method, solution supply method, and semiconductor device manufacturing method
Grant 7,399,578 - Takahashi , et al. July 15, 2 | 2008-07-15 |
Method for forming a pattern and substrate-processing apparatus
Grant 7,364,839 - Hayasaki , et al. April 29, 2 | 2008-04-29 |
Processing method, manufacturing method of semiconductor device, and processing apparatus
App 20080050677 - Takeishi; Tomoyuki ; et al. | 2008-02-28 |
Processing method, manufacturing method of semiconductor device, and processing apparatus
App 20080035851 - Takeishi; Tomoyuki ; et al. | 2008-02-14 |
Processing method, manufacturing method of semiconductor device, and processing apparatus
Grant 7,288,466 - Takeishi , et al. October 30, 2 | 2007-10-30 |
Substrate Edge Treatment For Coater/developer
App 20070196566 - Takeishi; Tomoyuki ; et al. | 2007-08-23 |
Substrate processing method, substrate processing apparatus, and manufacturing method of semiconductor device
App 20070190462 - Shiobara; Eishi ; et al. | 2007-08-16 |
Semiconductor device manufacturing method to form resist pattern, and substrate processing apparatus
App 20070128554 - Kawamura; Daisuke ; et al. | 2007-06-07 |
Alkaline solution and manufacturing method, and alkaline solution applied to pattern forming method, resist film removing method, solution application method, substrate treatment method, solution supply method, and semiconductor device manufacturing method
App 20070037099 - Takahashi; Riichiro ; et al. | 2007-02-15 |
Resist pattern forming method and method of manufacturing semiconductor device
App 20060194449 - Takeishi; Tomoyuki ; et al. | 2006-08-31 |
Alkaline solution and manufacturing method, and alkaline solution applied to pattern forming method, resist film removing method, solution application method, substrate treatment method, solution supply method, and semiconductor device manufacturing method
Grant 7,097,960 - Takahashi , et al. August 29, 2 | 2006-08-29 |
Method for manufacturing semiconductor device
App 20060008746 - Onishi; Yasunobu ; et al. | 2006-01-12 |
Film forming method, and substrate-processing apparatus
App 20050208777 - Kato, Hirokazu ; et al. | 2005-09-22 |
Pattern forming method and manufacturing method of semiconductor device
App 20050176254 - Takeishi, Tomoyuki ; et al. | 2005-08-11 |
Pattern forming method and method for manufacturing a semiconductor device
App 20050130068 - Kondoh, Takehiro ; et al. | 2005-06-16 |
Processing method and semiconductor manufacturing method
App 20050069815 - Takeishi, Tomoyuki ; et al. | 2005-03-31 |
Alkaline solution and manufacturing method, and alkaline solution applied to patern forming method, resist film removing method, solution application method, substrate treatment method, solotion supply method, and semiconductor device manufacturing method
App 20050058944 - Takahashi, Riichiro ; et al. | 2005-03-17 |
Method for forming a pattern and substrate-processing apparatus
App 20040131980 - Hayasaki, Kei ; et al. | 2004-07-08 |
Alkaline Solution And Manufacturing Method, And Alkaline Solution Applied To Pattern Forming Method, Resist Film Removing Method, Solution Application Method, Substrate Treatment Method, Solution Supply Method, And Semiconductor Device Manufacturing Method
Grant 6,742,944 - Takahashi , et al. June 1, 2 | 2004-06-01 |
Processing method, manufacturing method of semiconductor device, and processing apparatus
App 20040043310 - Takeishi, Tomoyuki ; et al. | 2004-03-04 |
Alkaline solution and manufacturing method, and alkaline solution applied to pattern forming method, resist film removing method, solution application method, substrate treatment method, solution supply method, and semiconductor device manufacturing method
App 20030068579 - Takahashi, Riichiro ; et al. | 2003-04-10 |
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