Patent | Date |
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Manufacturing method and manufacturing apparatus of display device Grant 7,367,374 - Amimoto , et al. May 6, 2 | 2008-05-06 |
Manufacturing method and manufacturing apparatus of display device App 20050109457 - Amimoto, Toshiyuki ;   et al. | 2005-05-26 |
Image-forming device App 20020006293 - Kakuguchi, Kazuhiro ;   et al. | 2002-01-17 |
Image-forming apparatus comprising a process unit Grant 5,835,822 - Nagasaki , et al. November 10, 1 | 1998-11-10 |
Process for continuously forming a large area functional deposited film by a microwave PCVD method and an apparatus suitable for practicing the same Grant 5,714,010 - Matsuyama , et al. February 3, 1 | 1998-02-03 |
Process for using microwave plasma CVD Grant 5,597,623 - Takai , et al. January 28, 1 | 1997-01-28 |
Method and apparatus for continuously forming functional deposited films with a large area by a microwave plasma CVD method Grant 5,527,391 - Echizen , et al. June 18, 1 | 1996-06-18 |
Microwave plasma CVD apparatus with a deposition chamber having a circumferential wall comprising a curved moving substrate web and a microwave applicator means having a specific dielectric member on the exterior thereof Grant 5,514,217 - Niino , et al. May 7, 1 | 1996-05-07 |
Continuous film-forming process using microwave energy in a moving substrate web functioning as a substrate and plasma generating space Grant 5,510,151 - Matsuyama , et al. April 23, 1 | 1996-04-23 |
Microwave plasma CVD apparatus comprising coaxially aligned multiple gas pipe gas feed structure Grant 5,443,645 - Otoshi , et al. August 22, 1 | 1995-08-22 |
Process and apparatus for microwave plasma chemical vapor deposition Grant 5,439,715 - Okamura , et al. August 8, 1 | 1995-08-08 |
Deposit film forming apparatus with microwave CVD method Grant 5,433,790 - Niino , et al. July 18, 1 | 1995-07-18 |
Method of preparation of functional deposited film by microwave plasma chemical vapor deposition Grant 5,338,580 - Katagiri , et al. August 16, 1 | 1994-08-16 |
Method for treating metal substrate for electro-photographic photosensitive member and method for manufacturing electrophotographic photosensitive member Grant 5,314,780 - Takei , et al. May 24, 1 | 1994-05-24 |
Electrophotographic light-receiving member Grant 5,284,730 - Takei , et al. February 8, 1 | 1994-02-08 |
Apparatus for forming deposited films with microwave plasma CVD method Grant 5,232,507 - Ohtoshi , et al. August 3, 1 | 1993-08-03 |
Microwave plasma CVD apparatus for the formation of functional deposited film with discharge space provided with gas feed device capable of applying bias voltage between the gas feed device and substrate Grant 5,129,359 - Takei , et al. July 14, 1 | 1992-07-14 |
Microwave PCVD method for continuously forming a large area functional deposited film using a curved moving substrate web with microwave energy with a directivity in one direction perpendicular to the direction of microwave propagation Grant 5,130,170 - Kanai , et al. July 14, 1 | 1992-07-14 |
Method for continuously forming functional deposited films with a large area by a microwave plasma CVD method Grant 5,114,770 - Echizen , et al. May 19, 1 | 1992-05-19 |
Method for forming functional deposited films by means of microwave plasma chemical vapor deposition method Grant 5,061,511 - Saitoh , et al. October 29, 1 | 1991-10-29 |
Process and apparatus for the formation of a functional deposited film on a cylindrical substrate by means of microwave plasma chemical vapor deposition Grant 5,030,476 - Okamura , et al. July 9, 1 | 1991-07-09 |
Method for forming functional deposited films by means of microwave plasma chemical vapor deposition method Grant 4,957,772 - Saitoh , et al. September 18, 1 | 1990-09-18 |
Microwave plasma CVD apparatus having substrate shielding member Grant 4,953,498 - Hashizume , et al. September 4, 1 | 1990-09-04 |
Microwave plasma CVD apparatus having an improved microwave transmissive window Grant 4,930,442 - Iida , et al. June 5, 1 | 1990-06-05 |
Process for forming a deposited film on each of a plurality of substrates by way of microwave plasma chemical vapor deposition method Grant 4,897,284 - Arai , et al. January 30, 1 | 1990-01-30 |
Process for the formation of a functional deposited film by way of microwave plasma CVD method Grant 4,897,281 - Arai , et al. January 30, 1 | 1990-01-30 |
Apparatus for the formation of a functional deposited film using microwave plasma chemical vapor deposition process Grant 4,840,139 - Takei June 20, 1 | 1989-06-20 |
Cleaning device Grant 4,674,865 - Tada , et al. June 23, 1 | 1987-06-23 |