Patent | Date |
---|
Underlying coating forming composition for lithography containing compound having protected carboxyl group Grant 10,509,320 - Takei , et al. Dec | 2019-12-17 |
Composition for forming resist underlayer film for nanoimprint Grant 9,946,158 - Takei , et al. April 17, 2 | 2018-04-17 |
Resist underlayer coating forming composition for forming photo-crosslinking cured resist underlayer coating Grant 9,134,610 - Takei , et al. September 15, 2 | 2015-09-15 |
Composition For Forming Resist Underlayer Film For Nanoimprint App 20150099070 - TAKEI; Satoshi ;   et al. | 2015-04-09 |
Underlayer coating forming composition containing dextrin ester compound Grant 8,916,327 - Takei , et al. December 23, 2 | 2014-12-23 |
Resist Underlayer Coating Forming Composition For Forming Photo-crosslinking Cured Resist Underlayer Coating App 20130189850 - TAKEI; Satoshi ;   et al. | 2013-07-25 |
Resist underlayer film forming composition containing liquid additive Grant 8,481,247 - Horiguchi , et al. July 9, 2 | 2013-07-09 |
Resist underlayer coating forming composition for forming photo-crosslinking cured resist underlayer coating Grant 8,426,111 - Takei , et al. April 23, 2 | 2013-04-23 |
Composition for forming resist underlayer film for lithography and production method of semiconductor device Grant 8,283,103 - Imamura , et al. October 9, 2 | 2012-10-09 |
Method of producing semiconductor device using resist underlayer film by photo-crosslinking curing Grant 8,227,172 - Horiguchi , et al. July 24, 2 | 2012-07-24 |
Composition For Forming Resist Underlayer Film For Nanoimprint App 20120128891 - Takei; Satoshi ;   et al. | 2012-05-24 |
Underlayer coating forming composition for lithography containing polysilane compound Grant 8,163,460 - Takei , et al. April 24, 2 | 2012-04-24 |
Underlayer coating forming composition for lithography containing naphthalene ring having halogen atom Grant 8,088,546 - Takei , et al. January 3, 2 | 2012-01-03 |
Silicon-containing resist underlayer coating forming composition for forming photo-crosslinking cured resist underlayer coating Grant 8,048,615 - Takei , et al. November 1, 2 | 2011-11-01 |
Acrylic polymer-containing gap fill material forming composition for lithography Grant 8,007,979 - Takei , et al. August 30, 2 | 2011-08-30 |
Composition For Forming Resist Underlayer Film For Lithography And Production Method Of Semiconductor Device App 20110045404 - Imamura; Hikaru ;   et al. | 2011-02-24 |
Method for manufacturing semiconductor device using quadruple-layer laminate Grant 7,842,620 - Takei , et al. November 30, 2 | 2010-11-30 |
Composition for forming nitride coating film for hard mask Grant 7,727,902 - Takei , et al. June 1, 2 | 2010-06-01 |
Underlayer coating forming composition for lithography containing cyclodextrin compound Grant 7,687,223 - Takei , et al. March 30, 2 | 2010-03-30 |
Method for manufacturing semiconductor device using quadruple-layer laminate App 20100022089 - Takei; Satoshi ;   et al. | 2010-01-28 |
Method of producing semiconductor device using resist underlayer film by photo-crosslinking curing App 20100022092 - Horiguchi; Yusuke ;   et al. | 2010-01-28 |
Resist Underlayer Film Forming Composition Containing Liquid Additive App 20090311624 - Horiguchi; Yusuke ;   et al. | 2009-12-17 |
Silicon-Containing Resist Underlayer Coating Forming Composition for Forming Photo-Crosslinking Cured Resist Underlayer Coating App 20090162782 - Takei; Satoshi ;   et al. | 2009-06-25 |
Resist Underlayer Coating Forming Composition for Forming Photo-Crosslinking Cured Resist Underlayer Coating App 20090130594 - Takei; Satoshi ;   et al. | 2009-05-21 |
Composition for forming gap-filling material for lithography Grant 7,517,633 - Takei , et al. April 14, 2 | 2009-04-14 |
Underlayer Coating Forming Composition for Lithography Containing Polysilane Compound App 20080318158 - Takei; Satoshi ;   et al. | 2008-12-25 |
Composition for forming anti-reflective coating for use in lithography Grant 7,425,347 - Takei , et al. September 16, 2 | 2008-09-16 |
Underlayer Coating Forming Composition For Lythography Containing Compound Having Protected Carboxyl Group App 20080102649 - Takei; Satoshi ;   et al. | 2008-05-01 |
Porous underlayer coating and underlayer coating forming composition for forming porous underlayer coating Grant 7,365,023 - Takei , et al. April 29, 2 | 2008-04-29 |
Alkali-soluble gap fill material forming composition for lithography Grant 7,361,718 - Takei , et al. April 22, 2 | 2008-04-22 |
Underlayer Coating Forming Composition For Lithography Containing Cyclodextrin Compound App 20070292767 - Takei; Satoshi ;   et al. | 2007-12-20 |
Underlayer Coating Forming Composition for Lithography Containing Naphthalene Ring Having Halogen Atom App 20070238029 - Takei; Satoshi ;   et al. | 2007-10-11 |
Composition for forming nitride coating film for hard mask App 20070148557 - Takei; Satoshi ;   et al. | 2007-06-28 |
Underlayer coating forming composition containing dextrin ester compound App 20070135581 - Takei; Satoshi ;   et al. | 2007-06-14 |
Underlayer coating forming composition for lithography containing compound having protected carboxyl group Grant 7,226,721 - Takei , et al. June 5, 2 | 2007-06-05 |
Porous underlayer film and underlayer film forming composition used for forming the same App 20060211256 - Takei; Satoshi ;   et al. | 2006-09-21 |
Composition for forming lower layer film for lithography comprising compound having protected carboxyl group App 20060210915 - Takei; Satoshi ;   et al. | 2006-09-21 |
Acrylic polymer-containing gap filler forming composition for lithography App 20060068526 - Takei; Satoshi ;   et al. | 2006-03-30 |
Alkali-soluble gap filling material forming composition for lithography App 20060041078 - Takei; Satoshi ;   et al. | 2006-02-23 |
Composition for forming anti-reflective coating for use in lithography App 20050008964 - Takei, Satoshi ;   et al. | 2005-01-13 |
Lithographic gap-filler forming composition App 20030146416 - Takei, Satoshi ;   et al. | 2003-08-07 |
Thermosetting anti-reflective coatings for full-fill dual damascene process App 20020132123 - Takei, Satoshi ;   et al. | 2002-09-19 |
Aqueous solution containing a quinolone carboxylic acid Grant 4,780,465 - Ogata , et al. October 25, 1 | 1988-10-25 |