TAKEDA; Yuta

Patent Applications and Registrations

Patent applications and USPTO patent grants for TAKEDA; Yuta.The latest application filed is for "method for producing tungsten hexafluoride".

Company Profile

5.7.14

TAKEDA; Yuta - Ube-shi Yamaguchi
Takeda; Yuta - Ube JP
Takeda; Yuta - Kyoto N/A JP
Takeda; Yuta - Maebashi JP
TAKEDA; Yuta - Maebashi-shi JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Method for Producing Tungsten Hexafluoride App 20210253442 - KIKUCHI; Akiou ; et al.	2021-08-19
Method for purifying fluorine compound gas Grant 10,926,211 - Yao , et al. February 23, 2	2021-02-23
Processing system, and processing method and program Grant 10,754,944 - Takeda A	2020-08-25
Processing System, And Processing Method And Program App 20190080083 - TAKEDA; Yuta	2019-03-14
Method for Purifying Fluorine Gas App 20190047858 - YAO; Akifumi ; et al.	2019-02-14
Method for Purifying Fluorine Compound Gas App 20190046917 - YAO; Akifumi ; et al.	2019-02-14
Cleaning method, method of manufacturing semiconductor device, substrate processing apparatus, and a non-transitory computer-readable recording medium Grant 10,156,012 - Kameda , et al. Dec	2018-12-18
Cleaning Method, Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And A Non-transitory Computer-readable Recording Medium App 20180057936 - KAMEDA; Kenji ; et al.	2018-03-01
Method for Dry-Cleaning Metal Film in Film-Formation Apparatus App 20150047680 - Umezaki; Tomonori ; et al.	2015-02-19
Dry Etching Method, Dry Etching Apparatus, Metal Film, And Device Including The Metal Film App 20140352716 - KIKUCHI; Akiou ; et al.	2014-12-04
Dry Cleaning Method App 20130333729 - Umezaki; Tomonori ; et al.	2013-12-19
Dry cleaning method of substrate processing apparatus Grant 8,562,751 - Gunji , et al. October 22, 2	2013-10-22
Halogen-containing Gas Supply Apparatus And Halogen-containing Gas Supply Method App 20130221024 - Yao; Akifumi ; et al.	2013-08-29
Dry Cleaning Method Of Substrate Processing Apparatus App 20120180811 - GUNJI; Isao ; et al.	2012-07-19
Optical disc reproducing method Grant 8,213,274 - Takeda July 3, 2	2012-07-03
Optical Disc Reproducing Method App 20100329086 - TAKEDA; Yuta	2010-12-30

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