TAKEBAYASHI; Motonari
Patent Applications and Registrations
Patent applications and USPTO patent grants for TAKEBAYASHI; Motonari.The latest application filed is for "substrate processing apparatus, method of manufacturing semiconductor device, substrate processing method, and recording medium".
- TAKEBAYASHI; Motonari - Toyama JP
- Takebayashi; Motonari - Nakano-ku JP
- TAKEBAYASHI; Motonari - Toyama-shi JP
- Takebayashi; Motonari - Tokyo JP
- Takebayashi; Motonari - Takaoka N/A JP
- Takebayashi; Motonari - Takaoka-shi JP
| Patent | Date |
|---|---|
| Substrate Processing Apparatus, Method Of Manufacturing Semiconductor Device, Substrate Processing Method, And Recording Medium App 20220081770 - TAKEBAYASHI; Motonari ; et al. | 2022-03-17 |
| Substrate processing apparatus, method of manufacturing semiconductor device, and method of processing substrate Grant 10,604,839 - Inada , et al. | 2020-03-31 |
| Batch-type remote plasma processing apparatus Grant 9,373,499 - Toyoda , et al. June 21, 2 | 2016-06-21 |
| Substrate Processing Apparatus, Method Of Manufacturing Semiconductor Device, And Method Of Processing Substrate App 20160053373 - INADA; Tetsuaki ; et al. | 2016-02-25 |
| Substrate Processing Apparatus, Method Of Manufacturing Semiconductor Device And Non-transitory Computer-readable Recording Medium App 20150252474 - ITATANI; Hideharu ; et al. | 2015-09-10 |
| Batch-type Remote Plasma Processing Apparatus App 20150228476 - Toyoda; Kazuyuki ; et al. | 2015-08-13 |
| Batch-type remote plasma processing apparatus Grant 9,039,912 - Toyoda , et al. May 26, 2 | 2015-05-26 |
| Batch-type remote plasma processing apparatus Grant 8,544,411 - Toyoda , et al. October 1, 2 | 2013-10-01 |
| Substrate processing apparatus Grant 8,518,182 - Ogawa , et al. August 27, 2 | 2013-08-27 |
| Substrate processing apparatus Grant 8,444,363 - Sakata , et al. May 21, 2 | 2013-05-21 |
| Batch-Type Remote Plasma Processing Apparatus App 20130104804 - Toyoda; Kazuyuki ; et al. | 2013-05-02 |
| Batch-Type Remote Plasma Processing Apparatus App 20130072002 - TOYODA; Kazuyuki ; et al. | 2013-03-21 |
| Batch-type remote plasma processing apparatus Grant 8,028,652 - Toyoda , et al. October 4, 2 | 2011-10-04 |
| Batch-type remote plasma processing apparatus Grant 8,020,514 - Toyoda , et al. September 20, 2 | 2011-09-20 |
| Substrate Processing Apparatus App 20110209664 - Ogawa; Shizue ; et al. | 2011-09-01 |
| Substrate processing apparatus Grant 7,958,842 - Ogawa , et al. June 14, 2 | 2011-06-14 |
| Batch-type remote plasma processing apparatus Grant 7,861,668 - Toyoda , et al. January 4, 2 | 2011-01-04 |
| Substrate Processing Apparatus And Producing Method Of Device App 20100323507 - TOYODA; Kazuyuki ; et al. | 2010-12-23 |
| Substrate Processing Apparatus And Producing Method Of Device App 20100258530 - TOYODA; Kazuyuki ; et al. | 2010-10-14 |
| Substrate Processing Apparatus App 20100150687 - SAKATA; Masakazu ; et al. | 2010-06-17 |
| Batch-Type Remote Plasma Processing Apparatus App 20090159440 - TOYODA; Kazuyuki ; et al. | 2009-06-25 |
| Batch-Type Remote Plasma Processing Apparatus App 20090133630 - TOYODA; Kazuyuki ; et al. | 2009-05-28 |
| Substrate Processing Apparatus App 20080153308 - Ogawa; Shizue ; et al. | 2008-06-26 |
| Batch-Type Remote Plasma Processing Apparatus App 20080093215 - TOYODA; Kazuyuki ; et al. | 2008-04-24 |
| Batch-Type Remote Plasma Processing Apparatus App 20080066681 - Toyoda; Kazuyuki ; et al. | 2008-03-20 |
| Batch-Type Remote Plasma Processing Apparatus App 20080060580 - TOYODA; Kazuyuki ; et al. | 2008-03-13 |
| Batch-Type Remote Plasma Processing Apparatus App 20070246355 - TOYODA; Kazuyuki ; et al. | 2007-10-25 |
| Substrate processing and method of manufacturing device App 20060260544 - Toyoda; Kazuyuki ; et al. | 2006-11-23 |
| Batch-type remote plasma processing apparatus App 20030164143 - Toyoda, Kazuyuki ; et al. | 2003-09-04 |
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