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Retainer ring, polish apparatus, and polish method Grant 9,539,696 - Fukushima , et al. January 10, 2 | 2017-01-10 |
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Polishing Apparatus And Polishing Method App 20140342640 - Fukushima; Dai ;   et al. | 2014-11-20 |
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Method For Fabricating Semiconductor Device App 20120202348 - TOMIYAMA; Mio ;   et al. | 2012-08-09 |
Method for polishing organic film on semiconductor substrate by use of resin particles, and slurry Grant 7,037,839 - Takayasu , et al. May 2, 2 | 2006-05-02 |
Method for polishing organic film on semiconductor substrate by use of resin particles, and slurry App 20060006142 - Takayasu; Jun ;   et al. | 2006-01-12 |
Semiconductor device having high-voltage and low-voltage operation regions and method of fabricating the same App 20050167760 - Takayasu, Jun | 2005-08-04 |
Abrasive used for planarization of semiconductor device and method of manufacturing semiconductor device using the abrasive Grant 6,878,631 - Takayasu April 12, 2 | 2005-04-12 |
Abrasive used for planarization of semiconductor device and method of manufacturing semiconductor device using the abrasive App 20050026441 - Takayasu, Jun | 2005-02-03 |
Method and apparatus for forming electrolytic water and apparatus for washing semiconductor substrate using electrolytic water-forming apparatus Grant 6,723,226 - Takayasu , et al. April 20, 2 | 2004-04-20 |
Method for polishing organic film on semiconductor substrate by use of resin particles, and slurry App 20040067652 - Takayasu, Jun ;   et al. | 2004-04-08 |
Abrasive used for planarization of semiconductor device and method of manufacturing semiconductor device using the abrasive App 20040036149 - Takayasu, Jun | 2004-02-26 |
Abrasive and method for polishing semiconductor substrate Grant 6,354,913 - Miyashita , et al. March 12, 2 | 2002-03-12 |
Method of manufacturing a semiconductor device and an apparatus for manufacturing the same Grant 6,098,638 - Miyashita , et al. August 8, 2 | 2000-08-08 |
Apparatus and method for manufacturing electrolytic ionic water and washing method using electroyltic ionic water Grant 6,007,696 - Takayasu , et al. December 28, 1 | 1999-12-28 |
Method for purifying pure water and an apparatus for the same Grant 6,001,238 - Takayasu , et al. December 14, 1 | 1999-12-14 |