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Silicon Carbide Single Crystal Substrate App 20210054529 - OKITA; Kyoko ;   et al. | 2021-02-25 |
Method Of Manufacturing Silicon Carbide Single Crystal App 20170314161 - SASAKI; Sho ;   et al. | 2017-11-02 |
Metalorganic chemical vapor deposition reactor Grant 8,920,565 - Ueno , et al. December 30, 2 | 2014-12-30 |
Metal organic chemical vapor deposition equipment Grant 8,906,162 - Ueno , et al. December 9, 2 | 2014-12-09 |
Vapor-phase process apparatus, vapor-phase process method, and substrate Grant 8,628,616 - Takasuka , et al. January 14, 2 | 2014-01-14 |
Method For Manufacturing Silicon Carbide Single Crystal App 20130255568 - INOUE; Hiroki ;   et al. | 2013-10-03 |
Vapor-phase Process Apparatus, Vapor-phase Process Method, And Substrate App 20130108788 - TAKASUKA; Eiryo ;   et al. | 2013-05-02 |
Vapor-phase process apparatus, vapor-phase process method, and substrate Grant 8,349,083 - Takasuka , et al. January 8, 2 | 2013-01-08 |
Vapor-phase process apparatus, vapor-phase process method, and substrate Grant 8,349,403 - Takasuka , et al. January 8, 2 | 2013-01-08 |
Metal Organic Chemical Vapor Deposition Equipment App 20120118234 - UENO; Masaki ;   et al. | 2012-05-17 |
Group III nitride white light emitting diode Grant 8,120,012 - Chua , et al. February 21, 2 | 2012-02-21 |
Vapor-phase Process Apparatus, Vapor-phase Process Method, And Substrate App 20120024227 - TAKASUKA; Eiryo ;   et al. | 2012-02-02 |
Vapor-phase Process Apparatus, Vapor-phase Process Method, And Substrate App 20120003142 - Takasuka; Eiryo ;   et al. | 2012-01-05 |
Method For Manufacturing Light Emitting Element And Light Emitting Element App 20110198566 - Yoshizumi; Yusuke ;   et al. | 2011-08-18 |
GaN SINGLE-CRYSTAL SUBSTRATE, NITRIDE TYPE SEMICONDUCTOR EPITAXIAL SUBSTRATE, NITRIDE TYPE SEMICONDUCTOR DEVICE, AND METHODS OF MAKING THE SAME App 20100173483 - Ueno; Masaki ;   et al. | 2010-07-08 |
Group Iii Nitride White Light Emitting Diode App 20090302308 - Chua; Soo-Jin ;   et al. | 2009-12-10 |
Group Iii Nitride White Light Emitting Diode App 20090206320 - Chua; Soo Jin ;   et al. | 2009-08-20 |
Method Of Growing Group Iii-v Compound Semiconductor, And Method Of Manufacturing Light-emitting Device And Electron Device App 20090197399 - Nakamura; Takao ;   et al. | 2009-08-06 |
Vapor-phase Process Apparatus, Vapor-phase Process Method, And Substrate App 20090148704 - TAKASUKA; Eiryo ;   et al. | 2009-06-11 |
Metalorganic Chemical Vapor Deposition Reactor App 20090126635 - Ueno; Masaki ;   et al. | 2009-05-21 |
GaN substrate and method of fabricating the same, nitride semiconductor device and method of fabricating the same Grant 7,387,678 - Akita , et al. June 17, 2 | 2008-06-17 |
Vapor-Phase Growth System and Vapor-Phase Growth Method App 20080131979 - Takasuka; Eiryo | 2008-06-05 |
Metal organic chemical vapor deposition equipment App 20080006208 - Ueno; Masaki ;   et al. | 2008-01-10 |
GaN single-crystal substrate, nitride type semiconductor epitaxial substrate, nitride type semiconductor device, and methods of making the same App 20050095861 - Ueno, Masaki ;   et al. | 2005-05-05 |
GaN single-crystal substrate, nitride type semiconductor epitaxial substrate, nitride type semiconductor device, and methods of making the same Grant 6,841,274 - Ueno , et al. January 11, 2 | 2005-01-11 |
GaN substrate and method of fabricating the same, nitride semiconductor device and method of fabricating the same App 20040262624 - Akita, Katsushi ;   et al. | 2004-12-30 |
GaN single-crystal substrate, nitride type semiconductor epitaxial substrate, nitride type semiconductor device, and methods of making the same App 20030209185 - Ueno, Masaki ;   et al. | 2003-11-13 |