Patent | Date |
---|
Plasma Processing Apparatus And Plasma Processing Method App 20210267042 - Uchida; Yohei ;   et al. | 2021-08-26 |
Plasma processing apparatus and plasma processing method Grant 11,032,899 - Uchida , et al. June 8, 2 | 2021-06-08 |
Mounting Table And Plasma Processing Apparatus App 20200343122 - Yamamoto; Kyouhei ;   et al. | 2020-10-29 |
Mounting table and plasma processing apparatus Grant 10,727,101 - Yamamoto , et al. | 2020-07-28 |
Plasma Processing Apparatus And Plasma Processing Method App 20200107429 - Uchida; Yohei ;   et al. | 2020-04-02 |
Mounting Table And Plasma Processing Apparatus App 20140209245 - YAMAMOTO; Kyouhei ;   et al. | 2014-07-31 |
Method and apparatus for an improved baffle plate in a plasma processing system Grant 8,118,936 - Saigusa , et al. February 21, 2 | 2012-02-21 |
Apparatus for an improved deposition shield in a plasma processing system Grant 8,117,986 - Saigusa , et al. February 21, 2 | 2012-02-21 |
Method and apparatus for an improved optical window deposition shield in a plasma processing system Grant 7,811,428 - Nishimoto , et al. October 12, 2 | 2010-10-12 |
Method and apparatus for an improved bellows shield in a plasma processing system Grant 7,678,226 - Saigusa , et al. March 16, 2 | 2010-03-16 |
Plasma processing apparatus, control method thereof and program for performing same Grant 7,585,385 - Yamazaki , et al. September 8, 2 | 2009-09-08 |
Method and apparatus for an improved upper electrode plate in a plasma processing system Grant 7,566,368 - Saigusa , et al. July 28, 2 | 2009-07-28 |
Method And Apparatus For An Improved Bellows Shield In A Plasma Processing System App 20070125494 - SAIGUSA; Hidehito ;   et al. | 2007-06-07 |
Method And Apparatus For An Improved Baffle Plate In A Plasma Processing System App 20070107846 - Saigusa; Hidehito ;   et al. | 2007-05-17 |
Method And Apparatus For An Improved Optical Window Deposition Shield In A Plasma Processing System App 20070102287 - Nishimoto; Shinya ;   et al. | 2007-05-10 |
Method And Apparatus For An Improved Upper Electrode Plate In A Plasma Processing System App 20070096658 - SAIGUSA; Hidehito ;   et al. | 2007-05-03 |
Method and apparatus for an improved bellows shield in a plasma processing system Grant 7,204,912 - Saigusa , et al. April 17, 2 | 2007-04-17 |
Method and apparatus for an improved deposition shield in a plasma processing system App 20070028839 - Saigusa; Hidehito ;   et al. | 2007-02-08 |
Method and apparatus for an improved baffle plate in a plasma processing system Grant 7,166,166 - Saigusa , et al. January 23, 2 | 2007-01-23 |
Method and apparatus for an improved upper electrode plate in a plasma processing system Grant 7,166,200 - Saigusa , et al. January 23, 2 | 2007-01-23 |
Method and apparatus for an improved optical window deposition shield in a plasma processing system Grant 7,163,585 - Nishimoto , et al. January 16, 2 | 2007-01-16 |
Method and apparatus for an improved deposition shield in a plasma processing system Grant 7,137,353 - Saigusa , et al. November 21, 2 | 2006-11-21 |
Plasma processing apparatus, control method thereof and program for performing same App 20060005927 - Yamazaki; Satoshi ;   et al. | 2006-01-12 |
Method of cleaning a plasma processing apparatus App 20040216769 - Takase, Taira ;   et al. | 2004-11-04 |
Method and apparatus for an improved optical window deposition shield in a plasma processing system Grant 6,798,519 - Nishimoto , et al. September 28, 2 | 2004-09-28 |
Method of cleaning a plasma processing apparatus Grant 6,790,289 - Takase , et al. September 14, 2 | 2004-09-14 |
Method and apparatus for an improved optical window deposition shield in a plasma processing system App 20040173155 - Nishimoto, Shinya ;   et al. | 2004-09-09 |
Method And Apparatus For An Improved Optical Window Deposition Shield In A Plasma Processing System App 20040060516 - Nishimoto, Shinya ;   et al. | 2004-04-01 |
Method and apparatus for an improved deposition shield in a plasma processing system App 20040060657 - Saigusa, Hidehito ;   et al. | 2004-04-01 |
Method and apparatus for an improved bellows shield in a plasma processing system App 20040060656 - Saigusa, Hidehito ;   et al. | 2004-04-01 |
Method and apparatus for an improved upper electrode plate in a plasma processing system App 20040061447 - Saigusa, Hidehito ;   et al. | 2004-04-01 |
Method and apparatus for an improved baffle plate in a plasma processing system App 20040063333 - Saigusa, Hidehito ;   et al. | 2004-04-01 |
Method of cleaning a plasma processing apparatus App 20030172952 - Takase, Taira ;   et al. | 2003-09-18 |