Patent | Date |
---|
Substrate Processing Apparatus App 20220282369 - YANAGISAWA; Yoshihiko ;   et al. | 2022-09-08 |
Substrate processing system, method of manufacturing semiconductor device, and recording medium Grant 11,422,528 - Mizuguchi , et al. August 23, 2 | 2022-08-23 |
Substrate Processing Apparatus, Method Of Manufacturing Semiconductor Device, And Recording Medium App 20220244707 - OHASHI; Naofumi ;   et al. | 2022-08-04 |
Substrate Processing Apparatus App 20220230897 - Yoshino; Teruo ;   et al. | 2022-07-21 |
Substrate processing apparatus Grant 11,380,540 - Nakagawa , et al. July 5, 2 | 2022-07-05 |
Method of manufacturing semiconductor device by setting process chamber to maintenance enable state Grant 11,355,372 - Mizuguchi , et al. June 7, 2 | 2022-06-07 |
Method of manufacturing semiconductor device by setting process chamber maintenance enable state Grant 11,342,212 - Mizuguchi , et al. May 24, 2 | 2022-05-24 |
Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium Grant 11,314,234 - Ohashi , et al. April 26, 2 | 2022-04-26 |
Method of manufacturing semiconductor device, substrate processing apparatus and program Grant 11,305,986 - Yahata , et al. April 19, 2 | 2022-04-19 |
Method Of Manufacturing Semiconductor Device By Setting Process Chamber Maintenance Enable State App 20220115254 - MIZUGUCHI; Yasuhiro ;   et al. | 2022-04-14 |
Method of manufacturing semiconductor device Grant 11,289,350 - Aburatani , et al. March 29, 2 | 2022-03-29 |
Substrate Processing Apparatus, Method Of Manufacturing Semiconductor Device And Non-transitory Computer-readable Recording Medium App 20220093447 - OHASHI; Naofumi ;   et al. | 2022-03-24 |
Substrate Processing System App 20220090263 - YAHATA; Takashi ;   et al. | 2022-03-24 |
Substrate Processing Apparatus App 20220090264 - YAHATA; Takashi ;   et al. | 2022-03-24 |
Substrate processing apparatus Grant 11,104,995 - Yahata , et al. August 31, 2 | 2021-08-31 |
Method of manufacturing semiconductor device and non-transitory computer-readable recording medium capable of adjusting substrate temperature Grant 10,978,310 - Kamakura , et al. April 13, 2 | 2021-04-13 |
Substrate processing apparatus and recording medium Grant 10,978,361 - Sasaki , et al. April 13, 2 | 2021-04-13 |
Method Of Manufacturing Semiconductor Device By Supplying Gas App 20210098251 - NAKAGAWA; Takashi ;   et al. | 2021-04-01 |
Substrate Processing Apparatus App 20210098250 - NAKAGAWA; Takashi ;   et al. | 2021-04-01 |
Method of manufacturing semiconductor device by supplying gas Grant 10,964,531 - Nakagawa , et al. March 30, 2 | 2021-03-30 |
Substrate Processing Apparatus, Method Of Manufacturing Semiconductor Device And Non-transitory Computer-readable Recording Medium App 20210079525 - OHASHI; Naofumi ;   et al. | 2021-03-18 |
Substrate Processing Apparatus App 20210071297 - YANAI; Hidehiro ;   et al. | 2021-03-11 |
Substrate processing apparatus Grant 10,934,622 - Yoshino , et al. March 2, 2 | 2021-03-02 |
Substrate processing apparatus, substrate processing system and method of manufacturing semiconductor device Grant 10,930,533 - Mizuguchi , et al. February 23, 2 | 2021-02-23 |
Method Of Manufacturing Semiconductor Device App 20210028041 - MIZUGUCHI; Yasuhiro ;   et al. | 2021-01-28 |
Method Of Manufacturing Semiconductor Device App 20210028042 - MIZUGUCHI; Yasuhiro ;   et al. | 2021-01-28 |
Substrate Processing System, Method Of Manufacturing Semiconductor Device, And Recording Medium App 20210003990 - MIZUGUCHI; Yasuhiro ;   et al. | 2021-01-07 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus And Program App 20200346924 - YAHATA; Takashi ;   et al. | 2020-11-05 |
Method of manufacturing semiconductor device by setting process chamber to maintenance enable state Grant 10,651,068 - Mizuguchi , et al. | 2020-05-12 |
Substrate Processing Apparatus And Recording Medium App 20200098653 - SASAKI; Takafumi ;   et al. | 2020-03-26 |
Substrate Processing Apparatus, Method Of Manufacturing Semiconductor Device, And Recording Medium App 20200089196 - OHASHI; Naofumi ;   et al. | 2020-03-19 |
Method Of Manufacturing Semiconductor Device App 20200051838 - ITATANI; Hideharu ;   et al. | 2020-02-13 |
Method Of Manufacturing Semiconductor Device App 20200035523 - ABURATANI; Yukinori ;   et al. | 2020-01-30 |
Method of manufacturing semiconductor device Grant 10,503,152 - Ohashi , et al. Dec | 2019-12-10 |
Method of manufacturing semiconductor device Grant 10,453,720 - Aburatani , et al. Oc | 2019-10-22 |
Method of Manufacturing Semiconductor Device App 20190294151 - OHASHI; Naofumi ;   et al. | 2019-09-26 |
Method of Manufacturing Semiconductor Device and Non-Transitory Computer-Readable Recording Medium App 20190295854 - KAMAKURA; Tsukasa ;   et al. | 2019-09-26 |
Method of manufacturing semiconductor device Grant 10,424,520 - Sasaki , et al. Sept | 2019-09-24 |
Substrate Processing Apparatus, Substrate Processing System And Method Of Manufacturing Semiconductor Device App 20190287831 - MIZUGUCHI; Yasuhiro ;   et al. | 2019-09-19 |
Method Of Manufacturing A Semiconductor Device App 20190221460 - MIZUGUCHI; Yasuhiro ;   et al. | 2019-07-18 |
Substrate Processing Apparatus App 20190085455 - YOSHINO; Teruo ;   et al. | 2019-03-21 |
Substrate Processing Apparatus App 20180158714 - YAHATA; Takashi ;   et al. | 2018-06-07 |
Substrate Processing Apparatus App 20170283949 - YAHATA; Takashi ;   et al. | 2017-10-05 |
Method of manufacturing semiconductor device Grant 9,728,431 - Ohashi , et al. August 8, 2 | 2017-08-08 |
Substrate processing apparatus and method of manufacturing semiconductor device Grant 9,659,767 - Yanai , et al. May 23, 2 | 2017-05-23 |
Method Of Manufacturing Semiconductor Device App 20170092517 - OHASHI; Naofumi ;   et al. | 2017-03-30 |
Method of manufacturing semiconductor device Grant 9,508,546 - Toyoda , et al. November 29, 2 | 2016-11-29 |
Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium Grant 9,163,309 - Yamamoto , et al. October 20, 2 | 2015-10-20 |
Method Of Manufacturing Semiconductor Device App 20150221503 - TOYODA; Kazuyuki ;   et al. | 2015-08-06 |
Method Of Manufacturing Semiconductor Device App 20150214044 - YANAI; Hidehiro ;   et al. | 2015-07-30 |
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium Grant 9,070,554 - Toyoda , et al. June 30, 2 | 2015-06-30 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium App 20150093913 - TOYODA; Kazuyuki ;   et al. | 2015-04-02 |
Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device and Non-Transitory Computer-Readable Recording Medium App 20150093916 - YAMAMOTO; Tetsuo ;   et al. | 2015-04-02 |
Substrate processing apparatus and method of manufacturing semiconductor device Grant 8,986,450 - Yanai , et al. March 24, 2 | 2015-03-24 |
Substrate processing apparatus and method of manufacturing semiconductor device Grant 8,925,562 - Toyoda , et al. January 6, 2 | 2015-01-06 |
Substrate processing apparatus and semiconductor devices manufacturing method Grant 8,222,161 - Yanagisawa , et al. July 17, 2 | 2012-07-17 |
Substrate Processing Apparatus And Semiconductor Devices Manufacturing Method App 20110192347 - YANAGISAWA; Yoshihiko ;   et al. | 2011-08-11 |
Substrate processing apparatus and semiconductor devices manufacturing method Grant 7,943,528 - Yanagisawa , et al. May 17, 2 | 2011-05-17 |
Substrate Processing Apparatus And Semiconductor Devices Manufacturing Method App 20110053382 - YANAGISAWA; Yoshihiko ;   et al. | 2011-03-03 |