Patent | Date |
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Manufacture system for semiconductor device with thin gate insulating film Grant 6,984,267 - Irino , et al. January 10, 2 | 2006-01-10 |
Semiconductor device and method for fabricating the same Grant 6,780,699 - Tamura , et al. August 24, 2 | 2004-08-24 |
Semiconductor device and method for fabricating the same App 20030168697 - Tamura, Yasuyuki ;   et al. | 2003-09-11 |
Manufacture system for semiconductor device with thin gate insulating film App 20030022523 - Irino, Kiyoshi ;   et al. | 2003-01-30 |
Manufacture method and system for semiconductor device with thin gate insulating film of oxynitride Grant 6,468,926 - Irino , et al. October 22, 2 | 2002-10-22 |
Method of making a compound semiconductor crystal-on-substrate structure Grant 5,424,243 - Takasaki June 13, 1 | 1995-06-13 |
Process for the preparation of a high dielectric thin film using ECR plasma CVD Grant 5,312,783 - Takasaki , et al. May 17, 1 | 1994-05-17 |
Method for fabricating a semiconductor substrate Grant 5,210,052 - Takasaki May 11, 1 | 1993-05-11 |
Method of producing a semiconductor device Grant 5,183,778 - Takasaki February 2, 1 | 1993-02-02 |
Semiconductor device with first and second buffer layers Grant 5,107,317 - Takasaki April 21, 1 | 1992-04-21 |
Semiconductor device having a heteroepitaxial substrate Grant 5,057,880 - Eshita , et al. October 15, 1 | 1991-10-15 |
Compound semiconductor device Grant 4,929,985 - Takasaki May 29, 1 | 1990-05-29 |
Process for the formation of phosphosilicate glass coating Grant 4,781,945 - Nishimura , et al. November 1, 1 | 1988-11-01 |
UV erasable EPROM with UV transparent silicon oxynitride coating Grant 4,581,622 - Takasaki , et al. April 8, 1 | 1986-04-08 |
Vapor phase growth method Grant 4,539,068 - Takagi , et al. September 3, 1 | 1985-09-03 |
Process of producing a semiconductor device Grant 4,532,022 - Takasaki , et al. July 30, 1 | 1985-07-30 |
Process for manufacturing a semiconductor device having a non-porous passivation layer Grant 4,406,053 - Takasaki , et al. September 27, 1 | 1983-09-27 |
Method of plasma enhanced chemical vapor deposition of phosphosilicate glass film Grant 4,394,401 - Shioya , et al. July 19, 1 | 1983-07-19 |
Method of reactive sputtering Grant 4,384,933 - Takasaki May 24, 1 | 1983-05-24 |
Process of producing semiconductor devices by forming a silicon oxynitride layer by a plasma CVD technique which is employed in a selective oxidation process Grant 4,363,868 - Takasaki , et al. December 14, 1 | 1982-12-14 |