Patent | Date |
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Method for controlling resistivity and N-type silicon single crystal Grant 10,400,353 - Hoshi , et al. Sep | 2019-09-03 |
Single-crystal pulling apparatus and single-crystal pulling method Grant 10,253,425 - Takano | 2019-04-09 |
Single-crystal Pulling Apparatus And Single-crystal Pulling Method App 20180237940 - TAKANO; Kiyotaka | 2018-08-23 |
Method For Controlling Resistivity And N-type Silicon Single Crystal App 20170260645 - HOSHI; Ryoji ;   et al. | 2017-09-14 |
Method for manufacturing silicon single crystal Grant 9,499,924 - Kimura , et al. November 22, 2 | 2016-11-22 |
Apparatus for producing single crystal Grant 9,217,208 - Hoshi , et al. December 22, 2 | 2015-12-22 |
Apparatus and method for producing single crystals Grant 8,764,900 - Takano , et al. July 1, 2 | 2014-07-01 |
Method For Manufacturing Silicon Single Crystal App 20140174339 - Kimura; Akihiro ;   et al. | 2014-06-26 |
Upper heater, single crystal production apparatus, and method for producing single crystal Grant 8,268,077 - Takano September 18, 2 | 2012-09-18 |
Upper Heater For Use In Production Of Single Crystal, Single Crystal Production Equipment, And Method For Producing Single Crystal App 20110214604 - Takano; Kiyotaka | 2011-09-08 |
Apparatus For Producing Single Crystal App 20100258050 - Hoshi; Ryoji ;   et al. | 2010-10-14 |
Apparatus and method for producing single crystals App 20090249995 - Takano; Kiyotaka ;   et al. | 2009-10-08 |
Method of producing SOI wafer and SOI wafer Grant 7,524,744 - Yokokawa , et al. April 28, 2 | 2009-04-28 |
SOI wafer and a method of producing the same Grant 7,357,839 - Takano , et al. April 15, 2 | 2008-04-15 |
Soi wafer and process for producing the same App 20060246689 - Takano; Kiyotaka ;   et al. | 2006-11-02 |
Method for manufacturing soi wafer and soi wafer App 20060051945 - Yokokawa; Isao ;   et al. | 2006-03-09 |
Method of producing soi wafer and soi wafer App 20050118789 - Aga, Hiroji ;   et al. | 2005-06-02 |
Silicon single crystal with no crystal defect in peripheral part of wafer and process for producing the same Grant 6,120,749 - Takano , et al. September 19, 2 | 2000-09-19 |
Manufacturing method of single crystal Grant 5,792,255 - Iino , et al. August 11, 1 | 1998-08-11 |
Apparatus for supplying granular raw material for a semiconductor single crystal pulling apparatus Grant 5,462,010 - Takano , et al. October 31, 1 | 1995-10-31 |
Single crystal pulling apparatus Grant 5,373,805 - Takano , et al. December 20, 1 | 1994-12-20 |
Single crystal pulling apparatus Grant 5,361,721 - Takano , et al. November 8, 1 | 1994-11-08 |