Takane; Atsushi
Patent Applications and Registrations
Patent applications and USPTO patent grants for Takane; Atsushi.The latest application filed is for "charged particle beam apparatus".
Company Profile
0.41.42
- Takane; Atsushi - Mito JP
- Takane; Atsushi - Hitachinaka JP
- Takane, Atsushi - Ibaraki JP
- Takane; Atsushi - Katsuta JP
Patent Activity
| Patent | Date |
|---|---|
| Defect inspection apparatus and method utilizing multiple inspection conditions Grant 8,558,999 - Kawaki , et al. October 15, 2 | 2013-10-15 |
| Charged particle beam apparatus Grant 8,335,397 - Takane , et al. December 18, 2 | 2012-12-18 |
| Charged particle beam equipment and charged particle microscopy Grant 8,304,722 - Inada , et al. November 6, 2 | 2012-11-06 |
| Charged particle beam apparatus Grant 8,263,935 - Takane , et al. September 11, 2 | 2012-09-11 |
| Pattern matching apparatus and scanning electron microscope using the same Grant 8,041,104 - Toyoda , et al. October 18, 2 | 2011-10-18 |
| Charged particle beam apparatus and dimension measuring method Grant 8,030,614 - Sato , et al. October 4, 2 | 2011-10-04 |
| Charged particle beam apparatus and method for charged particle beam adjustment Grant 8,026,491 - Ogashiwa , et al. September 27, 2 | 2011-09-27 |
| Charged particle beam apparatus and dimension measuring method Grant 7,973,282 - Sato , et al. July 5, 2 | 2011-07-05 |
| Charged particle beam equipment Grant 7,923,701 - Inada , et al. April 12, 2 | 2011-04-12 |
| Image evaluation method and microscope Grant 7,805,023 - Ishitani , et al. September 28, 2 | 2010-09-28 |
| Method of forming a sample image and charged particle beam apparatus Grant 7,800,059 - Sato , et al. September 21, 2 | 2010-09-21 |
| Charged Particle Beam Apparatus App 20100102224 - TAKANE; Atsushi ; et al. | 2010-04-29 |
| Charged particle beam apparatus Grant 7,652,249 - Takane , et al. January 26, 2 | 2010-01-26 |
| Charged Particle Beam Alignment Method And Charged Particle Beam Apparatus App 20100006755 - Sato; Mitsugo ; et al. | 2010-01-14 |
| Charged particle beam apparatus Grant 7,642,514 - Takane , et al. January 5, 2 | 2010-01-05 |
| Charged Particle Beam Apparatus And Dimension Measuring Method App 20090314938 - Sato; Mitsugu ; et al. | 2009-12-24 |
| Charged particle beam apparatus Grant 7,633,063 - Takane , et al. December 15, 2 | 2009-12-15 |
| Charged particle beam alignment method and charged particle beam apparatus Grant 7,605,381 - Sato , et al. October 20, 2 | 2009-10-20 |
| Charged particle beam equipment App 20090242794 - Inada; Hiromi ; et al. | 2009-10-01 |
| Charged Particle Beam Equipment And Charged Particle Microscopy App 20090084955 - Inada; Hiromi ; et al. | 2009-04-02 |
| Charged particle beam device with DF-STEM image valuation method Grant 7,459,683 - Araki , et al. December 2, 2 | 2008-12-02 |
| Charged Particle Beam Apparatus App 20080292199 - Takane; Atsushi ; et al. | 2008-11-27 |
| Charged particle beam equipment and charged particle microscopy Grant 7,435,957 - Inada , et al. October 14, 2 | 2008-10-14 |
| Method for measuring line and space pattern using scanning electron microscope Grant 7,433,542 - Takane , et al. October 7, 2 | 2008-10-07 |
| Apparatus and method for inspecting defects App 20080239292 - Kawaki; Koji ; et al. | 2008-10-02 |
| Method of forming a sample image and charged particle beam apparatus App 20080217535 - Sato; Mitsugu ; et al. | 2008-09-11 |
| Charged particle beam apparatus App 20080116376 - Takane; Atsushi ; et al. | 2008-05-22 |
| Charged particle beam equipment Grant 7,375,330 - Inada , et al. May 20, 2 | 2008-05-20 |
| Charged particle system and a method for measuring image magnification Grant 7,372,047 - Sato , et al. May 13, 2 | 2008-05-13 |
| Charged particle beam apparatus and dimension measuring method App 20080100832 - Sato; Mitsugu ; et al. | 2008-05-01 |
| Method of forming a sample image and charged particle beam apparatus Grant 7,361,894 - Sato , et al. April 22, 2 | 2008-04-22 |
| Charged particle beam apparatus App 20080073526 - Takane; Atsushi ; et al. | 2008-03-27 |
| Image evaluation method and microscope Grant 7,340,111 - Ishitani , et al. March 4, 2 | 2008-03-04 |
| Charged particle beam apparatus Grant 7,329,868 - Takane , et al. February 12, 2 | 2008-02-12 |
| Charged particle beam apparatus and method for charged particle beam adjustment App 20070284542 - Ogashiwa; Takeshi ; et al. | 2007-12-13 |
| Image evaluation method and microscope App 20070280559 - Ishitani; Tohru ; et al. | 2007-12-06 |
| Semiconductor inspection system App 20070194236 - Takane; Atsushi ; et al. | 2007-08-23 |
| Semiconductor inspection system Grant 7,235,782 - Takane , et al. June 26, 2 | 2007-06-26 |
| Image evaluation method and microscope Grant 7,236,651 - Ishitani , et al. June 26, 2 | 2007-06-26 |
| Charged particle beam apparatus App 20070120065 - Takane; Atsushi ; et al. | 2007-05-31 |
| Charged particle beam apparatus and dimension measuring method Grant 7,214,936 - Sato , et al. May 8, 2 | 2007-05-08 |
| Charged particle beam device with DF-STEM image valuation method App 20070085007 - Araki; Mine ; et al. | 2007-04-19 |
| Method of forming a sample image and charged particle beam apparatus App 20070029478 - Sato; Mitsugu ; et al. | 2007-02-08 |
| Charged particle beam apparatus App 20070023657 - Takane; Atsushi ; et al. | 2007-02-01 |
| Method for determining depression/protrusion of sample and charged particle beam apparatus therefor Grant 7,166,840 - Takane , et al. January 23, 2 | 2007-01-23 |
| Method of forming a sample image and charged particle beam apparatus Grant 7,164,126 - Sato , et al. January 16, 2 | 2007-01-16 |
| Charged particle beam equipment App 20060219908 - Inada; Hiromi ; et al. | 2006-10-05 |
| Charged particle beam apparatus, method of displaying sample image, and method of measuring image shift sensitivity App 20060219907 - Ogashiwa; Takeshi ; et al. | 2006-10-05 |
| Charged particle beam apparatus Grant 7,109,485 - Takane , et al. September 19, 2 | 2006-09-19 |
| Shape measuring device and shape measuring method Grant 7,078,688 - Kazui , et al. July 18, 2 | 2006-07-18 |
| Charged particle beam equipment and charged particle microscopy App 20060151697 - Inada; Hiromi ; et al. | 2006-07-13 |
| Method of forming a sample image and charged particle beam apparatus Grant 7,034,296 - Sato , et al. April 25, 2 | 2006-04-25 |
| Semiconductor inspection system Grant 7,026,615 - Takane , et al. April 11, 2 | 2006-04-11 |
| Charged particle beam apparatus and dimension measuring method App 20060071166 - Sato; Mitsugu ; et al. | 2006-04-06 |
| Pattern matching apparatus and scanning electron microscope using the same App 20060045326 - Toyoda; Yasutaka ; et al. | 2006-03-02 |
| Scanning electron microscope and sample observing method using it Grant 6,963,067 - Takeuchi , et al. November 8, 2 | 2005-11-08 |
| Method for measuring line and space pattern using scanning electron microscope App 20050207673 - Takane, Atsushi ; et al. | 2005-09-22 |
| Image evaluation method and microscope App 20050199811 - Ishitani, Tohru ; et al. | 2005-09-15 |
| Charged particle system and a method for measuring image magnification App 20050189501 - Sato, Mitsugu ; et al. | 2005-09-01 |
| Charged particle beam apparatus Grant 6,936,818 - Takane , et al. August 30, 2 | 2005-08-30 |
| Charged particle beam apparatus App 20050184237 - Takane, Atsushi ; et al. | 2005-08-25 |
| Method for determining depression/protrusion of sample and charged particle beam apparatus therefor App 20050151078 - Takane, Atsushi ; et al. | 2005-07-14 |
| Method for determining depression/protrusion of sample and charged particle beam apparatus therefor Grant 6,872,943 - Takane , et al. March 29, 2 | 2005-03-29 |
| Shape measuring device and shape measuring method App 20050061973 - Kazui, Masato ; et al. | 2005-03-24 |
| Charged particle beam alignment method and charged particle beam apparatus Grant 6,864,493 - Sato , et al. March 8, 2 | 2005-03-08 |
| Scanning electron microscope and sample observing method using it App 20040188611 - Takeuchi, Shuichi ; et al. | 2004-09-30 |
| Shape measurement method and apparatus App 20040164243 - Kazui, Masato ; et al. | 2004-08-26 |
| Charged particle beam alignment method and charged particle beam apparatus App 20040124364 - Sato, Mitsugu ; et al. | 2004-07-01 |
| Shape measurement method and apparatus Grant 6,756,590 - Kazui , et al. June 29, 2 | 2004-06-29 |
| Charged particle beam apparatus App 20040069956 - Takane, Atsushi ; et al. | 2004-04-15 |
| Charged particle beam apparatus Grant 6,653,633 - Takane , et al. November 25, 2 | 2003-11-25 |
| Shape measurement method and apparatus App 20030197873 - Kazui, Masato ; et al. | 2003-10-23 |
| Semiconductor inspection system App 20030173516 - Takane, Atsushi ; et al. | 2003-09-18 |
| Method of forming a sample image and charged particle beam apparatus App 20030141451 - Sato, Mitsugu ; et al. | 2003-07-31 |
| Charged particle beam apparatus App 20030136907 - Takane, Atsushi ; et al. | 2003-07-24 |
| Method of forming a sample image and charged particle beam apparatus App 20030111602 - Sato, Mitsugu ; et al. | 2003-06-19 |
| Image-formation apparatus using charged particle beams under various focus conditions Grant 6,538,249 - Takane , et al. March 25, 2 | 2003-03-25 |
| Image evaluation method and microscope App 20030039386 - Ishitani, Tohru ; et al. | 2003-02-27 |
| Method for determining depression/protrusion of sample and charged particle beam apparatus therefor App 20030010914 - Takane, Atsushi ; et al. | 2003-01-16 |
| Charged particle beam alignment method and charged particle beam apparatus App 20020179851 - Sato, Mitsugu ; et al. | 2002-12-05 |
| Semiconductor inspection system App 20020158199 - Takane, Atsushi ; et al. | 2002-10-31 |
| NMR imaging method of low flow rate fluid Grant 5,189,369 - Takane , et al. February 23, 1 | 1993-02-23 |
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