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Composition for resist underlayer film formation, resist underlayer film and forming method thereof, patterned substrate-producing method, and compound
Grant 11,454,890 - Nosaka , et al. September 27, 2 | 2022-09-27 |
Composition for resist underlayer film formation, resist underlayer film and forming method thereof, patterned substrate-producing method, and compound
Grant 11,402,757 - Nosaka , et al. August 2, 2 | 2022-08-02 |
Composition, Resist Underlayer Film, Method Of Forming Film, Method Of Producing Patterned Substrate, And Compound
App 20220197144 - NOSAKA; Naoya ; et al. | 2022-06-23 |
Composition, Resist Underlayer Film, Method Of Forming Resist Underlayer Film, Method Of Producing Patterned Substrate, And Compound
App 20220011672 - NAKAFUJI; Shin-ya ; et al. | 2022-01-13 |
Composition for resist underlayer film formation, resist underlayer film and method for forming the same, and production method of a patterned substrate
Grant 11,215,928 - Takanashi , et al. January 4, 2 | 2022-01-04 |
Composition And Substrate-treating Method
App 20210115221 - Aoki; Shun ; et al. | 2021-04-22 |
Composition, Film, And Production Method Of Patterned Substrate
App 20200348595 - NAKAFUJI; Shin-ya ; et al. | 2020-11-05 |
Composition For Resist Underlayer Film Formation, Resist Underlayer Film And Forming Method Thereof, Patterned Substrate-produci
App 20200272053 - NOSAKA; Naoya ; et al. | 2020-08-27 |
Composition, Film, Film-forming Method And Patterned Substrate-producing Method
App 20200199093 - NAKATSU; Hiroki ; et al. | 2020-06-25 |
Resist underlayer film-forming composition, resist underlayer film, resist underlayer film-forming process, and production method of patterned substrate
Grant 10,520,814 - Miyake , et al. Dec | 2019-12-31 |
Composition For Resist Underlayer Film Formation, Resist Underlayer Film And Method For Forming The Same, And Production Method
App 20190212650 - TAKANASHI; Kazunori ; et al. | 2019-07-11 |
Inorganic film-forming composition for multilayer resist processes, and pattern-forming method
Grant 10,090,163 - Nakagawa , et al. October 2, 2 | 2018-10-02 |
Resist pattern-forming method
Grant 10,025,188 - Anno , et al. July 17, 2 | 2018-07-17 |
Resist Underlayer Film-forming Composition, Resist Underlayer Film, Resist Underlayer Film-forming Process, And Production Method Of Patterned Substrate
App 20180046081 - MIYAKE; Masayuki ; et al. | 2018-02-15 |
Pattern forming method
Grant 9,891,526 - Kurita , et al. February 13, 2 | 2018-02-13 |
Resist Pattern-forming Method
App 20170322492 - ANNO; Yusuke ; et al. | 2017-11-09 |
Resist Pattern-forming Method
App 20160320705 - ANNO; Yusuke ; et al. | 2016-11-03 |
Method for forming pattern, and polysiloxane composition
Grant 9,434,609 - Dei , et al. September 6, 2 | 2016-09-06 |
Pattern Forming Method
App 20160131978 - Kurita; Shunsuke ; et al. | 2016-05-12 |
Polysiloxane composition and pattern-forming method
Grant 9,329,478 - Anno , et al. May 3, 2 | 2016-05-03 |
Resist Pattern-forming Method
App 20160097978 - ANNO; Yusuke ; et al. | 2016-04-07 |
Inorganic Film-forming Composition For Multilayer Resist Processes, And Pattern-forming Method
App 20150364332 - Nakagawa; Hisashi ; et al. | 2015-12-17 |
Silicon-containing film-forming composition, silicon-containing film, and pattern forming method
Grant 9,170,492 - Kawazu , et al. October 27, 2 | 2015-10-27 |
Composition for forming resist underlayer film and pattern-forming method
Grant 9,116,427 - Kurita , et al. August 25, 2 | 2015-08-25 |
Resist Pattern-forming Method
App 20150160556 - ANNO; Yusuke ; et al. | 2015-06-11 |
Resist pattern-forming method
Grant 8,993,223 - Anno , et al. March 31, 2 | 2015-03-31 |
Method For Forming Pattern, And Polysiloxane Composition
App 20150048046 - DEI; Satoshi ; et al. | 2015-02-19 |
Resist Pattern-forming Method
App 20150050600 - ANNO; Yusuke ; et al. | 2015-02-19 |
Method for forming resist pattern, and composition for forming resist underlayer film
Grant 8,956,807 - Tanaka , et al. February 17, 2 | 2015-02-17 |
Multilayer resist process pattern-forming method and multilayer resist process inorganic film-forming composition
Grant 8,927,201 - Takanashi , et al. January 6, 2 | 2015-01-06 |
Resist Pattern-forming Method
App 20140134544 - ANNO; Yusuke ; et al. | 2014-05-15 |
Resist pattern-forming method
Grant 8,669,042 - Anno , et al. March 11, 2 | 2014-03-11 |
Multilayer Resist Process Pattern-forming Method And Multilayer Resist Process Inorganic Film-forming Composition
App 20140030660 - TAKANASHI; Kazunori ; et al. | 2014-01-30 |
Composition For Forming Resist Underlayer Film And Pattern-forming Method
App 20130233825 - KURITA; Shunsuke ; et al. | 2013-09-12 |
Polysiloxane Composition And Pattern-forming Method
App 20130130179 - ANNO; Yusuke ; et al. | 2013-05-23 |
Method For Forming Resist Pattern, And Composition For Forming Resist Underlayer Film
App 20130101942 - TANAKA; Hiromitsu ; et al. | 2013-04-25 |
Resist Pattern-forming Method
App 20120183908 - ANNO; Yusuke ; et al. | 2012-07-19 |
Silicon-containing Film-forming Composition, Silicon-containing Film, And Pattern Forming Method
App 20100233632 - KAWAZU; Tomoharu ; et al. | 2010-09-16 |
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