loadpatents
Patent applications and USPTO patent grants for Takamori; Hideyuki.The latest application filed is for "apparatus for and method of transferring substrates".
Patent | Date |
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Substrate processing method and substrate processing apparatus Grant 7,550,043 - Shiraishi , et al. June 23, 2 | 2009-06-23 |
Apparatus for and method of transferring substrates Grant 6,962,477 - Tateyama , et al. November 8, 2 | 2005-11-08 |
Apparatus for and method of transferring substrates App 20050095115 - Tateyama, Kiyohisa ;   et al. | 2005-05-05 |
Apparatus for and method of transferring substrates Grant 6,837,672 - Tateyama , et al. January 4, 2 | 2005-01-04 |
Substrate processing method and substrate processing apparatus App 20040126713 - Shiraishi, Masatoshi ;   et al. | 2004-07-01 |
Coating apparatus and coating method Grant 6,635,113 - Takamori , et al. October 21, 2 | 2003-10-21 |
Substrate treating method App 20020187423 - Takamori, Hideyuki ;   et al. | 2002-12-12 |
Coating film forming method and coating apparatus Grant 6,485,782 - Takamori November 26, 2 | 2002-11-26 |
Coating Apparatus And Coating Method App 20020152954 - TAKAMORI, HIDEYUKI ;   et al. | 2002-10-24 |
Spin coating apparatus Grant 6,447,608 - Sakai , et al. September 10, 2 | 2002-09-10 |
Substrate process method and substrate process apparatus Grant 6,443,641 - Takamori , et al. September 3, 2 | 2002-09-03 |
Coating film forming method and coating apparatus App 20020026894 - Takamori, Hideyuki | 2002-03-07 |
Substrate processing method App 20020025375 - Takamori, Hideyuki ;   et al. | 2002-02-28 |
Substrate Treating Method App 20010049070 - TAKAMORI, HIDEYUKI ;   et al. | 2001-12-06 |
Coating film forming method and coating apparatus Grant 6,319,317 - Takamori November 20, 2 | 2001-11-20 |
Substrate processing method Grant 6,306,455 - Takamori , et al. October 23, 2 | 2001-10-23 |
Substrate process method and substrate process apparatus App 20010031147 - Takamori, Hideyuki ;   et al. | 2001-10-18 |
Substrate process method and substrate process apparatus App 20010026691 - Takamori, Hideyuki ;   et al. | 2001-10-04 |
Substrate processing apparatus Grant 6,264,748 - Kuriki , et al. July 24, 2 | 2001-07-24 |
Substrate process method and substrate process apparatus Grant 6,261,007 - Takamori , et al. July 17, 2 | 2001-07-17 |
Heat treatment device Grant 5,514,852 - Takamori , et al. May 7, 1 | 1996-05-07 |
Method for applying process solution to substrates Grant 5,416,047 - Konishi , et al. May 16, 1 | 1995-05-16 |
Coating apparatus with nozzle moving means Grant 5,250,114 - Konishi , et al. October 5, 1 | 1993-10-05 |
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