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Patent applications and USPTO patent grants for Takami; Shou.The latest application filed is for "height measurement device and charged particle beam device".
Patent | Date |
---|---|
Pattern height measurement device and charged particle beam device Grant 10,393,509 - Kawada , et al. A | 2019-08-27 |
Height measurement device and charged particle beam device Grant 10,101,150 - Kawada , et al. October 16, 2 | 2018-10-16 |
Height Measurement Device and Charged Particle Beam Device App 20170343340 - KAWADA; Hiroki ;   et al. | 2017-11-30 |
Pattern Height Measurement Device and Charged Particle Beam Device App 20170211929 - KAWADA; Hiroki ;   et al. | 2017-07-27 |
Scanning electron microscope Grant 6,872,944 - Todokoro , et al. March 29, 2 | 2005-03-29 |
Scanning electron microscope App 20040089805 - Todokoro, Hideo ;   et al. | 2004-05-13 |
Scanning electron microscope Grant 6,667,476 - Todokoro , et al. December 23, 2 | 2003-12-23 |
Scanning Electron Microscope App 20030127604 - TODOKORO, HIDEO ;   et al. | 2003-07-10 |
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