Patent | Date |
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Plasma processing method Grant 11,257,678 - Takamatsu , et al. February 22, 2 | 2022-02-22 |
Plasma Processing Method App 20200357650 - TAKAMATSU; Tomohiro ;   et al. | 2020-11-12 |
Semiconductor memory device and method for manufacturing the same Grant 9,666,596 - Takamatsu May 30, 2 | 2017-05-30 |
Semiconductor Memory Device And Method For Manufacturing The Same App 20170062461 - TAKAMATSU; Tomohiro | 2017-03-02 |
Manufacturing method of a semiconductor device Grant 8,652,854 - Takamatsu , et al. February 18, 2 | 2014-02-18 |
Manufacturing Method Of A Semiconductor Device App 20120171785 - Takamatsu; Tomohiro ;   et al. | 2012-07-05 |
Manufacturing method of a semiconductor device Grant 8,153,448 - Takamatsu , et al. April 10, 2 | 2012-04-10 |
Inspection method for semiconductor memory Grant 7,982,466 - Hikosaka , et al. July 19, 2 | 2011-07-19 |
Semiconductor device and fabricating method thereof Grant 7,892,916 - Takamatsu , et al. February 22, 2 | 2011-02-22 |
Manufacturing method of a semiconductor device App 20090280577 - TAKAMATSU; Tomohiro ;   et al. | 2009-11-12 |
Semiconductor device and manufacturing method of a semiconductor device Grant 7,547,933 - Takamatsu , et al. June 16, 2 | 2009-06-16 |
Semiconductor device and manufacturing method thereof Grant 7,498,625 - Takamatsu , et al. March 3, 2 | 2009-03-03 |
Semiconductor device and manufacturing method thereof App 20070184595 - Miura; Jirou ;   et al. | 2007-08-09 |
Semiconductor device with specifically shaped contact holes Grant 7,211,850 - Miura , et al. May 1, 2 | 2007-05-01 |
Inspection method for semiconductor memory App 20070058416 - Hikosaka; Yukinobu ;   et al. | 2007-03-15 |
Semiconductor device and fabricating method thereof App 20060118847 - Takamatsu; Tomohiro ;   et al. | 2006-06-08 |
Semiconductor device and manufacturing method thereof App 20060091438 - Takamatsu; Tomohiro ;   et al. | 2006-05-04 |
Process for producing high quality PZT films for ferroelectric memory integrated circuits Grant 6,887,716 - Fox , et al. May 3, 2 | 2005-05-03 |
Semiconductor device and manufacturing method thereof App 20050072998 - Miura, Jirou ;   et al. | 2005-04-07 |
Ferroelectric capacitor with electrode formed in separate oxidizing conditions Grant 6,825,515 - Takamatsu November 30, 2 | 2004-11-30 |
Semiconductor device and method of manufacturing the same App 20040212041 - Takamatsu, Tomohiro ;   et al. | 2004-10-28 |
Semiconductor device and manufacturing method of a semiconductor device App 20040113189 - Takamatsu, Tomohiro ;   et al. | 2004-06-17 |
Semiconductor device having a ferroelectric capacitor and fabrication process thereof Grant 6,740,533 - Takamatsu , et al. May 25, 2 | 2004-05-25 |
Semiconductor device having a ferroelectric capacitor and fabrication process thereof App 20030213986 - Takamatsu, Tomohiro ;   et al. | 2003-11-20 |
Semiconductor device having a ferroelectric capacitor and fabrication process thereof Grant 6,624,458 - Takamatsu , et al. September 23, 2 | 2003-09-23 |
Ferroelectric Capacitor With Electrode Formed In Separate Oxidizing Conditions App 20030122176 - Takamatsu, Tomohiro | 2003-07-03 |
Semiconductor device having a ferroelectric capacitor and fabrication process thereof App 20020185668 - Takamatsu, Tomohiro ;   et al. | 2002-12-12 |
Process for producing high quality PZT films for ferroelectric memory integrated circuits App 20020074601 - Fox, Glen ;   et al. | 2002-06-20 |