Takakuwa; Masaki

Patent Applications and Registrations

Patent applications and USPTO patent grants for Takakuwa; Masaki.The latest application filed is for "electron beam exposure apparatus and electron beam measurement module".

Company Profile

0.9.8

Takakuwa; Masaki - Tokyo JP
Takakuwa; Masaki - Toyohashi JP
Takakuwa, Masaki - Toyohashi-city JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Electron beam exposure apparatus and electron beam measurement module Grant 7,034,321 - Takakuwa , et al. April 25, 2	2006-04-25
Electron beam writing equipment using plural beams and method Grant 7,015,482 - Sohda , et al. March 21, 2	2006-03-21
Charged-particle-beam exposure apparatus and method of controlling same Grant 6,969,862 - Muraki , et al. November 29, 2	2005-11-29
Multi-charged beam lens, charged-particle beam exposure apparatus using the same, and device manufacturing method Grant 6,946,662 - Ono , et al. September 20, 2	2005-09-20
Multibeam generating apparatus and electron beam drawing apparatus Grant 6,870,310 - Okunuki , et al. March 22, 2	2005-03-22
Electron beam exposure apparatus and electron beam measurement module App 20050023486 - Takakuwa, Masaki ; et al.	2005-02-03
Pressure sensor with water repellent filter Grant 6,807,864 - Takakuwa , et al. October 26, 2	2004-10-26
Electron beam monitoring sensor and electron beam monitoring method Grant 6,768,118 - Nakayama , et al. July 27, 2	2004-07-27
Charged-particle-beam exposure apparatus and method of controlling same App 20040135102 - Muraki, Masato ; et al.	2004-07-15
Multi-charged beam lens, charged-particle beam exposure apparatus using the same, and device manufacturing method App 20040061064 - Ono, Haruhito ; et al.	2004-04-01
Multibeam generating apparatus and electron beam drawing apparatus App 20040056578 - Okunuki, Masahiko ; et al.	2004-03-25
Electron beam monitoring sensor and electron beam monitoring method App 20040026627 - Nakayama, Yoshinori ; et al.	2004-02-12
Electron beam writing equipment App 20040021095 - Sohda, Yasunari ; et al.	2004-02-05
Target mark member, method for manufacturing, and electron beam exposure apparatus thereof App 20010052573 - Takakuwa, Masaki	2001-12-20
Pressure sensor with water repellent filter App 20010029786 - Takakuwa, Masaki ; et al.	2001-10-18
Pressure sensor Grant 5,900,554 - Baba , et al. May 4, 1	1999-05-04
Pressure sensor with barrier in a pressure chamber Grant 5,747,694 - Baba , et al. May 5, 1	1998-05-05

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