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Patent applications and USPTO patent grants for TAKAKI; Takamasa.The latest application filed is for "light exposure method, light exposure device, and reflective projection light exposure mask".
Patent | Date |
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Light Exposure Method, Light Exposure Device, And Reflective Projection Light Exposure Mask App 20150070672 - TAKAKI; Takamasa ;   et al. | 2015-03-12 |
Exposing method and method of manufacturing semiconductor device Grant 8,654,313 - Takahashi , et al. February 18, 2 | 2014-02-18 |
Exposing Method, Method Of Manufacturing Semiconductor Device, And Exposure Apparatus App 20110122390 - TAKAHASHI; Masanori ;   et al. | 2011-05-26 |
Manufacturing Method Of Phase Shift Mask, Creating Method Of Mask Data Of Phase Shift Mask, And Manufacturing Method Of Semiconductor Device App 20100304279 - MIMOTOGI; Akiko ;   et al. | 2010-12-02 |
Pattern Forming Method App 20100261121 - TAKAHASHI; Masanori ;   et al. | 2010-10-14 |
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