Patent | Date |
---|
Resist Composition And Method Of Forming Resist Pattern App 20220107564 - YOKOYA; Jiro ;   et al. | 2022-04-07 |
Resist Composition And Method Of Forming Resist Pattern App 20200409259 - TAKAKI; Daichi ;   et al. | 2020-12-31 |
Resist Composition And Method Of Forming Resist Pattern App 20200409264 - Sakata; Makoto ;   et al. | 2020-12-31 |
Resist composition, method of forming resist pattern, compound, and acid diffusion control agent Grant 10,514,600 - Nagamine , et al. Dec | 2019-12-24 |
Resist Composition And Resist Pattern Forming Method App 20190354011 - OIKAWA; Tomohiro ;   et al. | 2019-11-21 |
Method of recovering resist pattern Grant 10,429,740 - Tsuchiya , et al. O | 2019-10-01 |
Resist Composition, Method Of Forming Resist Pattern, Compound, And Acid Diffusion Control Agent App 20180284610 - NAGAMINE; Takashi ;   et al. | 2018-10-04 |
Resist composition, method for forming resist pattern, acid generator and compound Grant 9,678,423 - Nagamine , et al. June 13, 2 | 2017-06-13 |
Resist composition, method for forming resist pattern, photo-reactive quencher and compound Grant 9,671,690 - Nagamine , et al. June 6, 2 | 2017-06-06 |
Method of forming resist pattern Grant 9,639,002 - Arai , et al. May 2, 2 | 2017-05-02 |
Resist Composition, Method For Forming Resist Pattern, Photo-reactive Quencher And Compound App 20160282717 - NAGAMINE; Takashi ;   et al. | 2016-09-29 |
Resist Composition, Method For Forming Resist Pattern, Acid Generator And Compound App 20160274458 - NAGAMINE; Takashi ;   et al. | 2016-09-22 |
Method Of Recovering Resist Pattern App 20160274464 - TSUCHIYA; Junichi ;   et al. | 2016-09-22 |
Method Of Forming Resist Pattern App 20160116843 - ARAI; Masatoshi ;   et al. | 2016-04-28 |
Method of forming resist pattern and negative tone-development resist composition Grant 9,250,531 - Hirano , et al. February 2, 2 | 2016-02-02 |
Resist composition, method of forming resist pattern and polymeric compound Grant 9,133,102 - Takaki , et al. September 15, 2 | 2015-09-15 |
Resist composition, method of forming resist pattern, polymeric compound and method of producing polymeric compound Grant 9,091,915 - Takaki , et al. July 28, 2 | 2015-07-28 |
Resist composition, method of forming resist pattern, polymeric compound, and compound Grant 9,023,581 - Kawaue , et al. May 5, 2 | 2015-05-05 |
Resist composition, method of forming resist pattern, polymeric compound and compound Grant 9,017,924 - Takaki , et al. April 28, 2 | 2015-04-28 |
Resist composition, method of forming resist pattern and polymeric compound Grant 8,986,919 - Takaki , et al. March 24, 2 | 2015-03-24 |
Resist composition, method of forming resist pattern and polymeric compound Grant 8,927,191 - Tsuchiya , et al. January 6, 2 | 2015-01-06 |
Resist composition, method of forming resist pattern, and polymeric compound Grant 8,916,332 - Irie , et al. December 23, 2 | 2014-12-23 |
Resist composition, method of forming resist pattern, polymeric compound and method of producing the same Grant 8,911,928 - Hirano , et al. December 16, 2 | 2014-12-16 |
Resist Composition, Method Of Forming Resist Pattern, Polymeric Compound And Compound App 20140255853 - Takaki; Daichi ;   et al. | 2014-09-11 |
Resist Composition, Method Of Forming Resist Pattern And Polymeric Compound App 20140221673 - Takaki; Daichi ;   et al. | 2014-08-07 |
Resist composition, method of forming resist pattern, and polymeric compound Grant 8,778,595 - Takaki , et al. July 15, 2 | 2014-07-15 |
Positive resist composition, method of forming resist pattern, and polymeric compound Grant 8,735,045 - Hirano , et al. May 27, 2 | 2014-05-27 |
Resist composition, method of forming resist pattern and polymeric compound Grant 8,685,620 - Takaki , et al. April 1, 2 | 2014-04-01 |
Resist composition, and method of forming resist pattern Grant 8,658,343 - Arai , et al. February 25, 2 | 2014-02-25 |
Method Of Forming Resist Pattern And Negative Tone-development Resist Composition App 20140004467 - Hirano; Tomoyuki ;   et al. | 2014-01-02 |
Resist composition, method of forming resist pattern, polymeric compound and compound Grant 8,609,320 - Utsumi , et al. December 17, 2 | 2013-12-17 |
Resist Composition, Method Of Forming Resist Pattern, Polymeric Compound And Method Of Producing Polymeric Compound App 20130316285 - Takaki; Daichi ;   et al. | 2013-11-28 |
Resist Composition, Method Of Forming Resist Pattern, And Polymeric Compound App 20130157201 - Takaki; Daichi ;   et al. | 2013-06-20 |
Positive resist composition and method of forming resist pattern Grant 8,450,044 - Hirano , et al. May 28, 2 | 2013-05-28 |
Resist Composition, Method Of Forming Resist Pattern And Polymeric Compound App 20130115554 - Takaki; Daichi ;   et al. | 2013-05-09 |
Resist Composition, Method Of Forming Resist Pattern, Polymeric Compound, And Compound App 20130089819 - Kawaue; Akiya ;   et al. | 2013-04-11 |
Resist Composition, Method Of Forming Resist Pattern, Polymeric Compound And Method Of Producing The Same App 20120308928 - Hirano; Tomoyuki ;   et al. | 2012-12-06 |
Positive resist composition, method of forming resist pattern, and polymeric compound Grant 8,298,748 - Seshimo , et al. October 30, 2 | 2012-10-30 |
Resist Composition, Method Of Forming Resist Pattern, And Polymeric Compound App 20120264052 - Irie; Makiko ;   et al. | 2012-10-18 |
Resist Composition, Method Of Forming Resist Pattern And Polymeric Compound App 20120208128 - Takaki; Daichi ;   et al. | 2012-08-16 |
Resist composition, method of forming resist pattern, polymeric compound, and compound Grant 8,227,170 - Dazai , et al. July 24, 2 | 2012-07-24 |
Resist Composition, Method Of Forming Resist Pattern And Polymeric Compound App 20120183900 - Tsuchiya; Junichi ;   et al. | 2012-07-19 |
Resist composition, and method of forming resist pattern App 20120148953 - Arai; Masatoshi ;   et al. | 2012-06-14 |
Resist Composition, Method Of Forming Resist Pattern, Polymeric Compound And Compound App 20120135347 - UTSUMI; Yoshiyuki ;   et al. | 2012-05-31 |
Resist Composition, Method Of Forming Resist Pattern, And Polymeric Compound App 20120100487 - Hirano; Tomoyuki ;   et al. | 2012-04-26 |
Positive Resist Composition And Method Of Forming Resist Pattern App 20110111343 - HIRANO; Tomoyuki ;   et al. | 2011-05-12 |
Positive Resist Composition, Method Of Forming Resist Pattern, And Polymeric Compound App 20110097667 - Hirano; Tomoyuki ;   et al. | 2011-04-28 |
Positive Resist Composition, Method Of Forming Resist Pattern, And Polymeric Compound App 20100297560 - SESHIMO; Takehiro ;   et al. | 2010-11-25 |
Positive Resist Composition, Method Of Forming Resist Pattern App 20100248144 - IWAI; Takeshi ;   et al. | 2010-09-30 |
Resist Composition, Method Of Forming Resist Pattern, Polymeric Compound, And Compound App 20100178609 - Dazai; Takahiro ;   et al. | 2010-07-15 |