Patent | Date |
---|
Semiconductor device fabrication method and semiconductor device Grant 11,164,936 - Okita , et al. November 2, 2 | 2021-11-02 |
Semiconductor Device Fabrication Method And Semiconductor Device App 20200251551 - Kind Code | 2020-08-06 |
Manufacturing method of a semiconductor device Grant 8,652,854 - Takamatsu , et al. February 18, 2 | 2014-02-18 |
Semiconductor device and system Grant 8,542,041 - Ogai , et al. September 24, 2 | 2013-09-24 |
Manufacturing Method Of A Semiconductor Device App 20120171785 - Takamatsu; Tomohiro ;   et al. | 2012-07-05 |
Manufacturing method of a semiconductor device Grant 8,153,448 - Takamatsu , et al. April 10, 2 | 2012-04-10 |
Semiconductor Device And System App 20100253419 - OGAI; Mitsuhiro ;   et al. | 2010-10-07 |
Manufacturing method of a semiconductor device App 20090280577 - TAKAMATSU; Tomohiro ;   et al. | 2009-11-12 |
Semiconductor device and manufacturing method of a semiconductor device Grant 7,547,933 - Takamatsu , et al. June 16, 2 | 2009-06-16 |
Semiconductor device and method of fabricating the same App 20080160645 - Nakamura; Ko ;   et al. | 2008-07-03 |
Ferroelectric capacitor, process for production thereof and semiconductor device using the same Grant 7,247,504 - Matsuura , et al. July 24, 2 | 2007-07-24 |
Manufacturing method of semiconductor device Grant 7,176,132 - Sashida , et al. February 13, 2 | 2007-02-13 |
Method for fabricating semiconductor device Grant 7,029,984 - Horii , et al. April 18, 2 | 2006-04-18 |
Ferroelectric capacitor, process for production thereof and semiconductor device using the same App 20050242381 - Matsuura, Osamu ;   et al. | 2005-11-03 |
Method for fabricating semiconductor device App 20050215006 - Horii, Yoshimasa ;   et al. | 2005-09-29 |
Semiconductor device and method of fabricating the same App 20050161717 - Nakamura, Ko ;   et al. | 2005-07-28 |
Ferroelectric capacitor, process for production thereof and semiconductor device using the same Grant 6,855,974 - Matsuura , et al. February 15, 2 | 2005-02-15 |
Ferroelectric capacitor, process for manufacturing thereof and ferroelectric memory Grant 6,812,510 - Horii , et al. November 2, 2 | 2004-11-02 |
Manufacturing method of semiconductor device App 20040166596 - Sashida, Naoya ;   et al. | 2004-08-26 |
Ferroelectric capacitor, process for production thereof and semiconductor device using the same App 20040135183 - Matsuura, Osamu ;   et al. | 2004-07-15 |
Semiconductor device and manufacturing method of a semiconductor device App 20040113189 - Takamatsu, Tomohiro ;   et al. | 2004-06-17 |
Semiconductor device and method of manufacturing the same Grant 6,710,422 - Hikosaka , et al. March 23, 2 | 2004-03-23 |
Method of manufacturing a semiconductor device with a hydrogen barrier layer Grant 6,706,540 - Hikosaka , et al. March 16, 2 | 2004-03-16 |
Ferroelectric capacitor, process for manufacturing thereof and ferroelectric memory App 20030230773 - Horii, Yoshimasa ;   et al. | 2003-12-18 |
Semiconductor device and method of manufacturing the same App 20030148579 - Hikosaka, Yukinobu ;   et al. | 2003-08-07 |
Semiconductor device and method of manufacturing the same App 20030127703 - Hikosaka, Yukinobu ;   et al. | 2003-07-10 |
Semiconductor device having a ferroelectric capacitor and a fabrication process thereof Grant 6,495,412 - Zhu , et al. December 17, 2 | 2002-12-17 |
Semiconductor device and method of manufacturing the same App 20020061620 - Hikosaka, Yukinobu ;   et al. | 2002-05-23 |
Ferroelectric memory and method of reading out data from the ferroelectric memory Grant 6,356,475 - Tamura , et al. March 12, 2 | 2002-03-12 |
Method Of Manufacturing Semiconductor Device Having Capacitor App 20010012659 - SASHIDA, NAOYA ;   et al. | 2001-08-09 |
Semiconductor device and method for fabricating the same Grant 6,169,305 - Takai , et al. January 2, 2 | 2001-01-02 |