Takahashi; Kiichi

Patent Applications and Registrations

Patent applications and USPTO patent grants for Takahashi; Kiichi.The latest application filed is for "support structure for suspended injector and substrate processing apparatus using same".

Company Profile

3.19.20

Takahashi; Kiichi - Iwate JP
Takahashi; Kiichi - Oshu JP
TAKAHASHI; Kiichi - Oshu-shi JP
Takahashi; Kiichi - Tokyo JP
Takahashi; Kiichi - Esashi JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Substrate processing apparatus and method for processing a substrate Grant 10,837,110 - Sato , et al. November 17, 2	2020-11-17
Support structure for suspended injector and substrate processing apparatus using same Grant 10,549,305 - Sasaki , et al. Fe	2020-02-04
Film deposition apparatus, method of depositing film, and non-transitory computer-readable recording medium Grant 10,428,425 - Oyama , et al. October 1, 2	2019-10-01
Substrate processing apparatus Grant 10,294,565 - Takahashi , et al.	2019-05-21
Ready for rotation state detection device, method of detecting ready for rotation state and substrate processing apparatus Grant 10,002,417 - Takahashi , et al. June 19, 2	2018-06-19
Support Structure for Suspended Injector and Substrate Processing Apparatus Using Same App 20180056317 - SASAKI; Yuya ; et al.	2018-03-01
Film Deposition Apparatus, Film Deposition Method And Computer Readable Medium App 20170241018 - OYAMA; Katsuhiko ; et al.	2017-08-24
Film Deposition Apparatus, Method Of Depositing Film, And Non-transitory Computer-readable Recording Medium App 20170211181 - OYAMA; Katsuhiko ; et al.	2017-07-27
Film Forming Apparatus App 20170125282 - UMEHARA; Takahito ; et al.	2017-05-04
Substrate Processing Apparatus App 20170114461 - TAKAHASHI; Kiichi ; et al.	2017-04-27
Vacuum processing apparatus and vacuum processing method Grant 9,349,589 - Enomoto , et al. May 24, 2	2016-05-24
Vacuum Processing Apparatus And Vacuum Processing Method App 20150203965 - ENOMOTO; Tadashi ; et al.	2015-07-23
Substrate Processing Apparatus And Method For Processing A Substrate App 20150078864 - SATO; Kaoru ; et al.	2015-03-19
Heat treatment apparatus and method of transferring substrates to the same Grant 8,979,469 - Takahashi , et al. March 17, 2	2015-03-17
Ready For Rotation State Detection Device, Method Of Detecting Ready For Rotation State And Substrate Processing Apparatus App 20140347465 - TAKAHASHI; Kiichi ; et al.	2014-11-27
Vertical thermal processing apparatus Grant 8,672,602 - Asari , et al. March 18, 2	2014-03-18
Thermal processing apparatus, thermal processing method, and storage medium Grant 8,565,911 - Abe , et al. October 22, 2	2013-10-22
Thermal Processing Apparatus, Thermal Processing Method, And Storage Medium App 20130204425 - ABE; Yo ; et al.	2013-08-08
Thermal processing apparatus, thermal processing method, and storage medium Grant 8,423,175 - Abe , et al. April 16, 2	2013-04-16
Heat Treatment Apparatus And Method Of Transferring Substrates To The Same App 20130028687 - TAKAHASHI; Kiichi ; et al.	2013-01-31
Processing system for process object and thermal processing method for process object Grant 8,231,381 - Hishiya , et al. July 31, 2	2012-07-31
Workpiece transfer mechanism, workpiece transfer method and workpiece processing system Grant 8,181,769 - Hishiya , et al. May 22, 2	2012-05-22
Vertical-type heat processing apparatus and method of controlling transfer mechanism in vertical-type heat processing apparatus Grant 7,905,700 - Asari , et al. March 15, 2	2011-03-15
Heat treatment apparatus Grant 7,762,809 - Takahashi , et al. July 27, 2	2010-07-27
Vertical Thermal Processing Apparatus App 20100061828 - ASARI; Satoshi ; et al.	2010-03-11
Thermal Processing Apparatus, Thermal Processing Method, And Storage Medium App 20100057249 - ABE; Yo ; et al.	2010-03-04
Workpiece transfer mechanism, workpiece transfer method and workpiece processing system App 20090101472 - Hishiya; Katsuyuki ; et al.	2009-04-23
Processing system for process object and thermal processing method for process object App 20090092940 - Hishiya; Katsuyuki ; et al.	2009-04-09
Heat treatment apparatus App 20080090195 - Takahashi; Kiichi ; et al.	2008-04-17
Processing apparatus and processing method App 20080056861 - Takahashi; Kiichi ; et al.	2008-03-06
Vertical-type heat processing apparatus and method of controlling transfer mechanism in vertical-type heat processing apparatus App 20070248439 - Asari; Satoshi ; et al.	2007-10-25
Vertical-type heat processing apparatus and method of controlling transfer mechanism in vertical-type heat processing apparatus App 20070238062 - Asari; Satoshi ; et al.	2007-10-11
Vertical heat treating equipment Grant 6,957,956 - Toba , et al. October 25, 2	2005-10-25
Vertical heat treating equipment App 20050175952 - Toba, Katsuya ; et al.	2005-08-11
Transfer apparatus and vertical heat-processing system using the same Grant 5,857,848 - Takahashi , et al. January 12, 1	1999-01-12

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