Patent | Date |
---|
Substrate processing apparatus and method for processing a substrate Grant 10,837,110 - Sato , et al. November 17, 2 | 2020-11-17 |
Support structure for suspended injector and substrate processing apparatus using same Grant 10,549,305 - Sasaki , et al. Fe | 2020-02-04 |
Film deposition apparatus, method of depositing film, and non-transitory computer-readable recording medium Grant 10,428,425 - Oyama , et al. October 1, 2 | 2019-10-01 |
Substrate processing apparatus Grant 10,294,565 - Takahashi , et al. | 2019-05-21 |
Ready for rotation state detection device, method of detecting ready for rotation state and substrate processing apparatus Grant 10,002,417 - Takahashi , et al. June 19, 2 | 2018-06-19 |
Support Structure for Suspended Injector and Substrate Processing Apparatus Using Same App 20180056317 - SASAKI; Yuya ;   et al. | 2018-03-01 |
Film Deposition Apparatus, Film Deposition Method And Computer Readable Medium App 20170241018 - OYAMA; Katsuhiko ;   et al. | 2017-08-24 |
Film Deposition Apparatus, Method Of Depositing Film, And Non-transitory Computer-readable Recording Medium App 20170211181 - OYAMA; Katsuhiko ;   et al. | 2017-07-27 |
Film Forming Apparatus App 20170125282 - UMEHARA; Takahito ;   et al. | 2017-05-04 |
Substrate Processing Apparatus App 20170114461 - TAKAHASHI; Kiichi ;   et al. | 2017-04-27 |
Vacuum processing apparatus and vacuum processing method Grant 9,349,589 - Enomoto , et al. May 24, 2 | 2016-05-24 |
Vacuum Processing Apparatus And Vacuum Processing Method App 20150203965 - ENOMOTO; Tadashi ;   et al. | 2015-07-23 |
Substrate Processing Apparatus And Method For Processing A Substrate App 20150078864 - SATO; Kaoru ;   et al. | 2015-03-19 |
Heat treatment apparatus and method of transferring substrates to the same Grant 8,979,469 - Takahashi , et al. March 17, 2 | 2015-03-17 |
Ready For Rotation State Detection Device, Method Of Detecting Ready For Rotation State And Substrate Processing Apparatus App 20140347465 - TAKAHASHI; Kiichi ;   et al. | 2014-11-27 |
Vertical thermal processing apparatus Grant 8,672,602 - Asari , et al. March 18, 2 | 2014-03-18 |
Thermal processing apparatus, thermal processing method, and storage medium Grant 8,565,911 - Abe , et al. October 22, 2 | 2013-10-22 |
Thermal Processing Apparatus, Thermal Processing Method, And Storage Medium App 20130204425 - ABE; Yo ;   et al. | 2013-08-08 |
Thermal processing apparatus, thermal processing method, and storage medium Grant 8,423,175 - Abe , et al. April 16, 2 | 2013-04-16 |
Heat Treatment Apparatus And Method Of Transferring Substrates To The Same App 20130028687 - TAKAHASHI; Kiichi ;   et al. | 2013-01-31 |
Processing system for process object and thermal processing method for process object Grant 8,231,381 - Hishiya , et al. July 31, 2 | 2012-07-31 |
Workpiece transfer mechanism, workpiece transfer method and workpiece processing system Grant 8,181,769 - Hishiya , et al. May 22, 2 | 2012-05-22 |
Vertical-type heat processing apparatus and method of controlling transfer mechanism in vertical-type heat processing apparatus Grant 7,905,700 - Asari , et al. March 15, 2 | 2011-03-15 |
Heat treatment apparatus Grant 7,762,809 - Takahashi , et al. July 27, 2 | 2010-07-27 |
Vertical Thermal Processing Apparatus App 20100061828 - ASARI; Satoshi ;   et al. | 2010-03-11 |
Thermal Processing Apparatus, Thermal Processing Method, And Storage Medium App 20100057249 - ABE; Yo ;   et al. | 2010-03-04 |
Workpiece transfer mechanism, workpiece transfer method and workpiece processing system App 20090101472 - Hishiya; Katsuyuki ;   et al. | 2009-04-23 |
Processing system for process object and thermal processing method for process object App 20090092940 - Hishiya; Katsuyuki ;   et al. | 2009-04-09 |
Heat treatment apparatus App 20080090195 - Takahashi; Kiichi ;   et al. | 2008-04-17 |
Processing apparatus and processing method App 20080056861 - Takahashi; Kiichi ;   et al. | 2008-03-06 |
Vertical-type heat processing apparatus and method of controlling transfer mechanism in vertical-type heat processing apparatus App 20070248439 - Asari; Satoshi ;   et al. | 2007-10-25 |
Vertical-type heat processing apparatus and method of controlling transfer mechanism in vertical-type heat processing apparatus App 20070238062 - Asari; Satoshi ;   et al. | 2007-10-11 |
Vertical heat treating equipment Grant 6,957,956 - Toba , et al. October 25, 2 | 2005-10-25 |
Vertical heat treating equipment App 20050175952 - Toba, Katsuya ;   et al. | 2005-08-11 |
Transfer apparatus and vertical heat-processing system using the same Grant 5,857,848 - Takahashi , et al. January 12, 1 | 1999-01-12 |