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Patent applications and USPTO patent grants for Takahara; Go.The latest application filed is for "sheath heater".
Patent | Date |
---|---|
Substrate supporting unit and film forming device having the substrate supporting unit Grant 11,201,040 - Takahara , et al. December 14, 2 | 2021-12-14 |
Sheath Heater App 20200045779 - HANAMACHI; Toshihiko ;   et al. | 2020-02-06 |
Heater Unit App 20200043638 - HANAMACHI; Toshihiko ;   et al. | 2020-02-06 |
Substrate Supporting Unit And Film Forming Device Having The Substrate Supporting Unit App 20190385827 - TAKAHARA; Go ;   et al. | 2019-12-19 |
Substrate-placing Stage And Manufacturing Method Thereof App 20190228953 - TACHIKAWA; Toshihiro ;   et al. | 2019-07-25 |
Substrate support device Grant 10,276,410 - Tachikawa , et al. | 2019-04-30 |
Substrate Support Device App 20130134148 - TACHIKAWA; Toshihiro ;   et al. | 2013-05-30 |
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